10/26/2011	12:11:54 AM	Helium valve closed
10/26/2011	12:11:54 AM	PH3 valve closed
10/26/2011	12:11:54 AM	Main Vac valve closed
10/26/2011	12:11:54 AM	Bypass valve closed
10/26/2011	12:11:54 AM	H2 valve opened
10/26/2011	12:11:54 AM	BCl3 valve opened
10/26/2011	12:11:54 AM	SiCl4 pre valve opened
10/26/2011	12:11:54 AM	SiCl4 post valve opened
10/26/2011	12:11:54 AM	Bubbler valve opened
10/26/2011	12:11:54 AM	Helium MFC set to  0.000000
10/26/2011	12:11:54 AM	H2 MFC set to  500.000000
10/26/2011	12:11:54 AM	BCl3 MFC set to  2.000000
10/26/2011	12:11:54 AM	PHl3 MFC set to  0.000000
10/26/2011	12:11:54 AM	SiCl4 MFC set to  50.000000
10/26/2011	12:11:54 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:11:54 AM	Tube furnace set to 1048
10/26/2011	12:36:54 AM	Helium valve closed
10/26/2011	12:36:54 AM	BCl3 valve closed
10/26/2011	12:36:54 AM	PH3 valve closed
10/26/2011	12:36:54 AM	SiCl4 pre valve closed
10/26/2011	12:36:54 AM	SiCl4 post valve closed
10/26/2011	12:36:54 AM	Main Vac valve closed
10/26/2011	12:36:54 AM	Bypass valve closed
10/26/2011	12:36:54 AM	H2 valve opened
10/26/2011	12:36:54 AM	Bubbler valve opened
10/26/2011	12:36:54 AM	Helium MFC set to  0.000000
10/26/2011	12:36:54 AM	H2 MFC set to  500.000000
10/26/2011	12:36:54 AM	BCl3 MFC set to  0.000000
10/26/2011	12:36:54 AM	PHl3 MFC set to  0.000000
10/26/2011	12:36:54 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:36:54 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:36:54 AM	Tube furnace set to 750
10/26/2011	12:46:54 AM	H2 valve closed
10/26/2011	12:46:54 AM	BCl3 valve closed
10/26/2011	12:46:54 AM	PH3 valve closed
10/26/2011	12:46:54 AM	SiCl4 pre valve closed
10/26/2011	12:46:54 AM	SiCl4 post valve closed
10/26/2011	12:46:54 AM	Main Vac valve closed
10/26/2011	12:46:54 AM	Bypass valve closed
10/26/2011	12:46:54 AM	Helium valve opened
10/26/2011	12:46:54 AM	Bubbler valve opened
10/26/2011	12:46:54 AM	Helium MFC set to  500.000000
10/26/2011	12:46:54 AM	H2 MFC set to  0.000000
10/26/2011	12:46:54 AM	BCl3 MFC set to  0.000000
10/26/2011	12:46:54 AM	PHl3 MFC set to  0.000000
10/26/2011	12:46:54 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:46:54 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:46:55 AM	Tube furnace set to 0
10/26/2011	12:59:38 AM	Helium valve closed
10/26/2011	12:59:38 AM	H2 valve closed
10/26/2011	12:59:38 AM	BCl3 valve closed
10/26/2011	12:59:38 AM	PH3 valve closed
10/26/2011	12:59:38 AM	SiCl4 pre valve closed
10/26/2011	12:59:38 AM	SiCl4 post valve closed
10/26/2011	12:59:38 AM	Main Vac valve closed
10/26/2011	12:59:38 AM	Bypass valve closed
10/26/2011	12:59:38 AM	Bubbler valve closed
10/26/2011	12:59:38 AM	Helium MFC set to  0.000000
10/26/2011	12:59:38 AM	H2 MFC set to  0.000000
10/26/2011	12:59:38 AM	BCl3 MFC set to  0.000000
10/26/2011	12:59:38 AM	PHl3 MFC set to  0.000000
10/26/2011	12:59:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:59:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:59:38 AM	Tube furnace set to 0
10/26/2011	12:59:39 AM	Run finished at 12:59 AM
10/26/2011	12:59:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	12:59:44 AM	Recipe started at 12:59 AM
10/26/2011	12:59:44 AM	Helium valve closed
10/26/2011	12:59:44 AM	H2 valve closed
10/26/2011	12:59:44 AM	BCl3 valve closed
10/26/2011	12:59:44 AM	PH3 valve closed
10/26/2011	12:59:44 AM	SiCl4 pre valve closed
10/26/2011	12:59:44 AM	SiCl4 post valve closed
10/26/2011	12:59:44 AM	Main Vac valve closed
10/26/2011	12:59:44 AM	Bypass valve closed
10/26/2011	12:59:44 AM	Bubbler valve closed
10/26/2011	12:59:44 AM	Helium MFC set to  0.000000
10/26/2011	12:59:44 AM	H2 MFC set to  0.000000
10/26/2011	12:59:44 AM	BCl3 MFC set to  0.000000
10/26/2011	12:59:44 AM	PHl3 MFC set to  0.000000
10/26/2011	12:59:44 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:59:44 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:59:44 AM	Tube furnace set to 0
10/26/2011	12:59:47 AM	H2 valve closed
10/26/2011	12:59:47 AM	BCl3 valve closed
10/26/2011	12:59:47 AM	PH3 valve closed
10/26/2011	12:59:47 AM	SiCl4 pre valve closed
10/26/2011	12:59:47 AM	SiCl4 post valve closed
10/26/2011	12:59:47 AM	Main Vac valve closed
10/26/2011	12:59:47 AM	Bypass valve closed
10/26/2011	12:59:47 AM	Bubbler valve closed
10/26/2011	12:59:47 AM	Helium valve opened
10/26/2011	12:59:47 AM	Helium MFC set to  500.000000
10/26/2011	12:59:47 AM	H2 MFC set to  0.000000
10/26/2011	12:59:47 AM	BCl3 MFC set to  0.000000
10/26/2011	12:59:47 AM	PHl3 MFC set to  0.000000
10/26/2011	12:59:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:59:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:59:47 AM	Tube furnace set to 0
10/26/2011	12:59:47 AM	Helium valve closed
10/26/2011	12:59:47 AM	H2 valve closed
10/26/2011	12:59:47 AM	BCl3 valve closed
10/26/2011	12:59:47 AM	PH3 valve closed
10/26/2011	12:59:47 AM	SiCl4 pre valve closed
10/26/2011	12:59:47 AM	SiCl4 post valve closed
10/26/2011	12:59:47 AM	Main Vac valve closed
10/26/2011	12:59:47 AM	Bypass valve closed
10/26/2011	12:59:47 AM	Bubbler valve closed
10/26/2011	12:59:47 AM	Helium MFC set to  0.000000
10/26/2011	12:59:47 AM	H2 MFC set to  0.000000
10/26/2011	12:59:47 AM	BCl3 MFC set to  0.000000
10/26/2011	12:59:47 AM	PHl3 MFC set to  0.000000
10/26/2011	12:59:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	12:59:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:59:48 AM	Tube furnace set to 0
10/26/2011	12:59:49 AM	Run finished at 12:59 AM
10/26/2011	12:59:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	1:06:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	1:06:42 AM	Recipe started at 1:06 AM
10/26/2011	1:06:42 AM	Helium valve closed
10/26/2011	1:06:42 AM	H2 valve closed
10/26/2011	1:06:42 AM	BCl3 valve closed
10/26/2011	1:06:42 AM	PH3 valve closed
10/26/2011	1:06:42 AM	SiCl4 pre valve closed
10/26/2011	1:06:42 AM	SiCl4 post valve closed
10/26/2011	1:06:42 AM	Main Vac valve closed
10/26/2011	1:06:42 AM	Bubbler valve closed
10/26/2011	1:06:42 AM	Bypass valve opened
10/26/2011	1:06:42 AM	Helium MFC set to  0.000000
10/26/2011	1:06:42 AM	H2 MFC set to  0.000000
10/26/2011	1:06:42 AM	BCl3 MFC set to  0.000000
10/26/2011	1:06:42 AM	PHl3 MFC set to  0.000000
10/26/2011	1:06:42 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:06:42 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:06:42 AM	Tube furnace set to 0
10/26/2011	1:07:48 AM	Helium valve closed
10/26/2011	1:07:48 AM	H2 valve closed
10/26/2011	1:07:48 AM	BCl3 valve closed
10/26/2011	1:07:48 AM	PH3 valve closed
10/26/2011	1:07:48 AM	SiCl4 pre valve closed
10/26/2011	1:07:48 AM	SiCl4 post valve closed
10/26/2011	1:07:48 AM	Main Vac valve closed
10/26/2011	1:07:48 AM	Bubbler valve closed
10/26/2011	1:07:48 AM	Bypass valve opened
10/26/2011	1:07:48 AM	Helium MFC set to  0.000000
10/26/2011	1:07:48 AM	H2 MFC set to  0.000000
10/26/2011	1:07:48 AM	BCl3 MFC set to  0.000000
10/26/2011	1:07:48 AM	PHl3 MFC set to  0.000000
10/26/2011	1:07:48 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:07:48 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:07:49 AM	Tube furnace set to 0
10/26/2011	1:08:49 AM	Helium valve closed
10/26/2011	1:08:49 AM	H2 valve closed
10/26/2011	1:08:49 AM	BCl3 valve closed
10/26/2011	1:08:49 AM	PH3 valve closed
10/26/2011	1:08:49 AM	SiCl4 pre valve closed
10/26/2011	1:08:49 AM	SiCl4 post valve closed
10/26/2011	1:08:49 AM	Bypass valve closed
10/26/2011	1:08:49 AM	Bubbler valve closed
10/26/2011	1:08:49 AM	Main Vac valve opened
10/26/2011	1:08:49 AM	Helium MFC set to  0.000000
10/26/2011	1:08:49 AM	H2 MFC set to  0.000000
10/26/2011	1:08:49 AM	BCl3 MFC set to  0.000000
10/26/2011	1:08:49 AM	PHl3 MFC set to  0.000000
10/26/2011	1:08:49 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:08:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:08:49 AM	Tube furnace set to 0
10/26/2011	1:08:50 AM	Run finished at 1:08 AM
10/26/2011	1:08:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	1:17:26 AM	Recipe started at 1:17 AM
10/26/2011	1:17:26 AM	Helium valve closed
10/26/2011	1:17:26 AM	H2 valve closed
10/26/2011	1:17:26 AM	BCl3 valve closed
10/26/2011	1:17:26 AM	PH3 valve closed
10/26/2011	1:17:26 AM	SiCl4 pre valve closed
10/26/2011	1:17:26 AM	SiCl4 post valve closed
10/26/2011	1:17:26 AM	Bypass valve closed
10/26/2011	1:17:26 AM	Bubbler valve closed
10/26/2011	1:17:26 AM	Main Vac valve opened
10/26/2011	1:17:26 AM	Helium MFC set to  0.000000
10/26/2011	1:17:26 AM	H2 MFC set to  0.000000
10/26/2011	1:17:26 AM	BCl3 MFC set to  0.000000
10/26/2011	1:17:26 AM	PHl3 MFC set to  0.000000
10/26/2011	1:17:26 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:17:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:17:26 AM	Tube furnace set to 150
10/26/2011	1:17:56 AM	H2 valve closed
10/26/2011	1:17:56 AM	BCl3 valve closed
10/26/2011	1:17:56 AM	PH3 valve closed
10/26/2011	1:17:56 AM	SiCl4 pre valve closed
10/26/2011	1:17:56 AM	SiCl4 post valve closed
10/26/2011	1:17:56 AM	Bypass valve closed
10/26/2011	1:17:56 AM	Bubbler valve closed
10/26/2011	1:17:56 AM	Helium valve opened
10/26/2011	1:17:56 AM	Main Vac valve opened
10/26/2011	1:17:56 AM	Helium MFC set to  20.000000
10/26/2011	1:17:56 AM	H2 MFC set to  0.000000
10/26/2011	1:17:56 AM	BCl3 MFC set to  0.000000
10/26/2011	1:17:56 AM	PHl3 MFC set to  0.000000
10/26/2011	1:17:56 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:17:56 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:17:56 AM	Tube furnace set to 150
10/26/2011	1:18:26 AM	Helium valve closed
10/26/2011	1:18:26 AM	H2 valve closed
10/26/2011	1:18:26 AM	BCl3 valve closed
10/26/2011	1:18:26 AM	PH3 valve closed
10/26/2011	1:18:26 AM	SiCl4 pre valve closed
10/26/2011	1:18:26 AM	SiCl4 post valve closed
10/26/2011	1:18:26 AM	Bypass valve closed
10/26/2011	1:18:26 AM	Bubbler valve closed
10/26/2011	1:18:26 AM	Main Vac valve opened
10/26/2011	1:18:26 AM	Helium MFC set to  0.000000
10/26/2011	1:18:26 AM	H2 MFC set to  0.000000
10/26/2011	1:18:26 AM	BCl3 MFC set to  0.000000
10/26/2011	1:18:26 AM	PHl3 MFC set to  0.000000
10/26/2011	1:18:26 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:18:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:18:26 AM	Tube furnace set to 150
10/26/2011	1:18:56 AM	H2 valve closed
10/26/2011	1:18:56 AM	BCl3 valve closed
10/26/2011	1:18:56 AM	PH3 valve closed
10/26/2011	1:18:56 AM	SiCl4 pre valve closed
10/26/2011	1:18:56 AM	SiCl4 post valve closed
10/26/2011	1:18:56 AM	Bypass valve closed
10/26/2011	1:18:56 AM	Bubbler valve closed
10/26/2011	1:18:56 AM	Helium valve opened
10/26/2011	1:18:56 AM	Main Vac valve opened
10/26/2011	1:18:56 AM	Helium MFC set to  20.000000
10/26/2011	1:18:56 AM	H2 MFC set to  0.000000
10/26/2011	1:18:56 AM	BCl3 MFC set to  0.000000
10/26/2011	1:18:56 AM	PHl3 MFC set to  0.000000
10/26/2011	1:18:56 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:18:56 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:18:56 AM	Tube furnace set to 150
10/26/2011	1:19:26 AM	Helium valve closed
10/26/2011	1:19:26 AM	H2 valve closed
10/26/2011	1:19:26 AM	BCl3 valve closed
10/26/2011	1:19:26 AM	PH3 valve closed
10/26/2011	1:19:26 AM	SiCl4 pre valve closed
10/26/2011	1:19:26 AM	SiCl4 post valve closed
10/26/2011	1:19:26 AM	Bypass valve closed
10/26/2011	1:19:26 AM	Bubbler valve closed
10/26/2011	1:19:26 AM	Main Vac valve opened
10/26/2011	1:19:26 AM	Helium MFC set to  0.000000
10/26/2011	1:19:26 AM	H2 MFC set to  0.000000
10/26/2011	1:19:26 AM	BCl3 MFC set to  0.000000
10/26/2011	1:19:26 AM	PHl3 MFC set to  0.000000
10/26/2011	1:19:26 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:19:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:19:26 AM	Tube furnace set to 150
10/26/2011	1:19:57 AM	H2 valve closed
10/26/2011	1:19:57 AM	BCl3 valve closed
10/26/2011	1:19:57 AM	PH3 valve closed
10/26/2011	1:19:57 AM	SiCl4 pre valve closed
10/26/2011	1:19:57 AM	SiCl4 post valve closed
10/26/2011	1:19:57 AM	Bypass valve closed
10/26/2011	1:19:57 AM	Bubbler valve closed
10/26/2011	1:19:57 AM	Helium valve opened
10/26/2011	1:19:57 AM	Main Vac valve opened
10/26/2011	1:19:57 AM	Helium MFC set to  20.000000
10/26/2011	1:19:57 AM	H2 MFC set to  0.000000
10/26/2011	1:19:57 AM	BCl3 MFC set to  0.000000
10/26/2011	1:19:57 AM	PHl3 MFC set to  0.000000
10/26/2011	1:19:57 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:19:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:19:57 AM	Tube furnace set to 150
10/26/2011	1:20:27 AM	Helium valve closed
10/26/2011	1:20:27 AM	H2 valve closed
10/26/2011	1:20:27 AM	BCl3 valve closed
10/26/2011	1:20:27 AM	PH3 valve closed
10/26/2011	1:20:27 AM	SiCl4 pre valve closed
10/26/2011	1:20:27 AM	SiCl4 post valve closed
10/26/2011	1:20:27 AM	Bypass valve closed
10/26/2011	1:20:27 AM	Bubbler valve closed
10/26/2011	1:20:27 AM	Main Vac valve opened
10/26/2011	1:20:27 AM	Helium MFC set to  0.000000
10/26/2011	1:20:27 AM	H2 MFC set to  0.000000
10/26/2011	1:20:27 AM	BCl3 MFC set to  0.000000
10/26/2011	1:20:27 AM	PHl3 MFC set to  0.000000
10/26/2011	1:20:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:20:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:20:27 AM	Tube furnace set to 150
10/26/2011	1:20:57 AM	H2 valve closed
10/26/2011	1:20:57 AM	BCl3 valve closed
10/26/2011	1:20:57 AM	PH3 valve closed
10/26/2011	1:20:57 AM	SiCl4 pre valve closed
10/26/2011	1:20:57 AM	SiCl4 post valve closed
10/26/2011	1:20:57 AM	Bypass valve closed
10/26/2011	1:20:57 AM	Bubbler valve closed
10/26/2011	1:20:57 AM	Helium valve opened
10/26/2011	1:20:57 AM	Main Vac valve opened
10/26/2011	1:20:57 AM	Helium MFC set to  20.000000
10/26/2011	1:20:57 AM	H2 MFC set to  0.000000
10/26/2011	1:20:57 AM	BCl3 MFC set to  0.000000
10/26/2011	1:20:57 AM	PHl3 MFC set to  0.000000
10/26/2011	1:20:57 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:20:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:20:57 AM	Tube furnace set to 150
10/26/2011	1:21:27 AM	Helium valve closed
10/26/2011	1:21:27 AM	H2 valve closed
10/26/2011	1:21:27 AM	BCl3 valve closed
10/26/2011	1:21:27 AM	PH3 valve closed
10/26/2011	1:21:27 AM	SiCl4 pre valve closed
10/26/2011	1:21:27 AM	SiCl4 post valve closed
10/26/2011	1:21:27 AM	Bypass valve closed
10/26/2011	1:21:27 AM	Bubbler valve closed
10/26/2011	1:21:27 AM	Main Vac valve opened
10/26/2011	1:21:27 AM	Helium MFC set to  0.000000
10/26/2011	1:21:27 AM	H2 MFC set to  0.000000
10/26/2011	1:21:27 AM	BCl3 MFC set to  0.000000
10/26/2011	1:21:27 AM	PHl3 MFC set to  0.000000
10/26/2011	1:21:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:21:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:21:27 AM	Tube furnace set to 150
10/26/2011	1:21:57 AM	H2 valve closed
10/26/2011	1:21:57 AM	BCl3 valve closed
10/26/2011	1:21:57 AM	PH3 valve closed
10/26/2011	1:21:57 AM	SiCl4 pre valve closed
10/26/2011	1:21:57 AM	SiCl4 post valve closed
10/26/2011	1:21:57 AM	Bypass valve closed
10/26/2011	1:21:57 AM	Bubbler valve closed
10/26/2011	1:21:57 AM	Helium valve opened
10/26/2011	1:21:57 AM	Main Vac valve opened
10/26/2011	1:21:57 AM	Helium MFC set to  20.000000
10/26/2011	1:21:57 AM	H2 MFC set to  0.000000
10/26/2011	1:21:57 AM	BCl3 MFC set to  0.000000
10/26/2011	1:21:57 AM	PHl3 MFC set to  0.000000
10/26/2011	1:21:57 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:21:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:21:57 AM	Tube furnace set to 150
10/26/2011	1:22:27 AM	Helium valve closed
10/26/2011	1:22:28 AM	H2 valve closed
10/26/2011	1:22:28 AM	BCl3 valve closed
10/26/2011	1:22:28 AM	PH3 valve closed
10/26/2011	1:22:28 AM	SiCl4 pre valve closed
10/26/2011	1:22:28 AM	SiCl4 post valve closed
10/26/2011	1:22:28 AM	Bypass valve closed
10/26/2011	1:22:28 AM	Bubbler valve closed
10/26/2011	1:22:28 AM	Main Vac valve opened
10/26/2011	1:22:28 AM	Helium MFC set to  0.000000
10/26/2011	1:22:28 AM	H2 MFC set to  0.000000
10/26/2011	1:22:28 AM	BCl3 MFC set to  0.000000
10/26/2011	1:22:28 AM	PHl3 MFC set to  0.000000
10/26/2011	1:22:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:22:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:22:28 AM	Tube furnace set to 150
10/26/2011	1:22:58 AM	H2 valve closed
10/26/2011	1:22:58 AM	BCl3 valve closed
10/26/2011	1:22:58 AM	PH3 valve closed
10/26/2011	1:22:58 AM	SiCl4 pre valve closed
10/26/2011	1:22:58 AM	SiCl4 post valve closed
10/26/2011	1:22:58 AM	Bypass valve closed
10/26/2011	1:22:58 AM	Bubbler valve closed
10/26/2011	1:22:58 AM	Helium valve opened
10/26/2011	1:22:58 AM	Main Vac valve opened
10/26/2011	1:22:58 AM	Helium MFC set to  20.000000
10/26/2011	1:22:58 AM	H2 MFC set to  0.000000
10/26/2011	1:22:58 AM	BCl3 MFC set to  0.000000
10/26/2011	1:22:58 AM	PHl3 MFC set to  0.000000
10/26/2011	1:22:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:22:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:22:58 AM	Tube furnace set to 150
10/26/2011	1:23:28 AM	Helium valve closed
10/26/2011	1:23:28 AM	H2 valve closed
10/26/2011	1:23:28 AM	BCl3 valve closed
10/26/2011	1:23:28 AM	PH3 valve closed
10/26/2011	1:23:28 AM	SiCl4 pre valve closed
10/26/2011	1:23:28 AM	SiCl4 post valve closed
10/26/2011	1:23:28 AM	Bypass valve closed
10/26/2011	1:23:28 AM	Bubbler valve closed
10/26/2011	1:23:28 AM	Main Vac valve opened
10/26/2011	1:23:28 AM	Helium MFC set to  0.000000
10/26/2011	1:23:28 AM	H2 MFC set to  0.000000
10/26/2011	1:23:28 AM	BCl3 MFC set to  0.000000
10/26/2011	1:23:28 AM	PHl3 MFC set to  0.000000
10/26/2011	1:23:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:23:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:23:28 AM	Tube furnace set to 150
10/26/2011	1:23:58 AM	H2 valve closed
10/26/2011	1:23:58 AM	BCl3 valve closed
10/26/2011	1:23:58 AM	PH3 valve closed
10/26/2011	1:23:58 AM	SiCl4 pre valve closed
10/26/2011	1:23:58 AM	SiCl4 post valve closed
10/26/2011	1:23:58 AM	Bypass valve closed
10/26/2011	1:23:58 AM	Bubbler valve closed
10/26/2011	1:23:58 AM	Helium valve opened
10/26/2011	1:23:58 AM	Main Vac valve opened
10/26/2011	1:23:58 AM	Helium MFC set to  20.000000
10/26/2011	1:23:58 AM	H2 MFC set to  0.000000
10/26/2011	1:23:58 AM	BCl3 MFC set to  0.000000
10/26/2011	1:23:58 AM	PHl3 MFC set to  0.000000
10/26/2011	1:23:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:23:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:23:58 AM	Tube furnace set to 150
10/26/2011	1:24:28 AM	Helium valve closed
10/26/2011	1:24:28 AM	H2 valve closed
10/26/2011	1:24:28 AM	BCl3 valve closed
10/26/2011	1:24:28 AM	PH3 valve closed
10/26/2011	1:24:28 AM	SiCl4 pre valve closed
10/26/2011	1:24:28 AM	SiCl4 post valve closed
10/26/2011	1:24:28 AM	Bypass valve closed
10/26/2011	1:24:28 AM	Bubbler valve closed
10/26/2011	1:24:28 AM	Main Vac valve opened
10/26/2011	1:24:28 AM	Helium MFC set to  0.000000
10/26/2011	1:24:28 AM	H2 MFC set to  0.000000
10/26/2011	1:24:28 AM	BCl3 MFC set to  0.000000
10/26/2011	1:24:28 AM	PHl3 MFC set to  0.000000
10/26/2011	1:24:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:24:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:24:28 AM	Tube furnace set to 150
10/26/2011	1:24:58 AM	H2 valve closed
10/26/2011	1:24:58 AM	BCl3 valve closed
10/26/2011	1:24:58 AM	PH3 valve closed
10/26/2011	1:24:58 AM	SiCl4 pre valve closed
10/26/2011	1:24:58 AM	SiCl4 post valve closed
10/26/2011	1:24:58 AM	Bypass valve closed
10/26/2011	1:24:58 AM	Bubbler valve closed
10/26/2011	1:24:58 AM	Helium valve opened
10/26/2011	1:24:58 AM	Main Vac valve opened
10/26/2011	1:24:59 AM	Helium MFC set to  20.000000
10/26/2011	1:24:59 AM	H2 MFC set to  0.000000
10/26/2011	1:24:59 AM	BCl3 MFC set to  0.000000
10/26/2011	1:24:59 AM	PHl3 MFC set to  0.000000
10/26/2011	1:24:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:24:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:24:59 AM	Tube furnace set to 150
10/26/2011	1:25:29 AM	Helium valve closed
10/26/2011	1:25:29 AM	H2 valve closed
10/26/2011	1:25:29 AM	BCl3 valve closed
10/26/2011	1:25:29 AM	PH3 valve closed
10/26/2011	1:25:29 AM	SiCl4 pre valve closed
10/26/2011	1:25:29 AM	SiCl4 post valve closed
10/26/2011	1:25:29 AM	Bypass valve closed
10/26/2011	1:25:29 AM	Bubbler valve closed
10/26/2011	1:25:29 AM	Main Vac valve opened
10/26/2011	1:25:29 AM	Helium MFC set to  0.000000
10/26/2011	1:25:29 AM	H2 MFC set to  0.000000
10/26/2011	1:25:29 AM	BCl3 MFC set to  0.000000
10/26/2011	1:25:29 AM	PHl3 MFC set to  0.000000
10/26/2011	1:25:29 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:25:29 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:25:29 AM	Tube furnace set to 150
10/26/2011	1:25:59 AM	H2 valve closed
10/26/2011	1:25:59 AM	BCl3 valve closed
10/26/2011	1:25:59 AM	PH3 valve closed
10/26/2011	1:25:59 AM	SiCl4 pre valve closed
10/26/2011	1:25:59 AM	SiCl4 post valve closed
10/26/2011	1:25:59 AM	Bypass valve closed
10/26/2011	1:25:59 AM	Bubbler valve closed
10/26/2011	1:25:59 AM	Helium valve opened
10/26/2011	1:25:59 AM	Main Vac valve opened
10/26/2011	1:25:59 AM	Helium MFC set to  20.000000
10/26/2011	1:25:59 AM	H2 MFC set to  0.000000
10/26/2011	1:25:59 AM	BCl3 MFC set to  0.000000
10/26/2011	1:25:59 AM	PHl3 MFC set to  0.000000
10/26/2011	1:25:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:25:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:25:59 AM	Tube furnace set to 150
10/26/2011	1:26:29 AM	Helium valve closed
10/26/2011	1:26:29 AM	H2 valve closed
10/26/2011	1:26:29 AM	BCl3 valve closed
10/26/2011	1:26:29 AM	PH3 valve closed
10/26/2011	1:26:29 AM	SiCl4 pre valve closed
10/26/2011	1:26:29 AM	SiCl4 post valve closed
10/26/2011	1:26:29 AM	Bypass valve closed
10/26/2011	1:26:29 AM	Bubbler valve closed
10/26/2011	1:26:29 AM	Main Vac valve opened
10/26/2011	1:26:29 AM	Helium MFC set to  0.000000
10/26/2011	1:26:29 AM	H2 MFC set to  0.000000
10/26/2011	1:26:29 AM	BCl3 MFC set to  0.000000
10/26/2011	1:26:29 AM	PHl3 MFC set to  0.000000
10/26/2011	1:26:29 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:26:29 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:26:29 AM	Tube furnace set to 150
10/26/2011	1:26:59 AM	H2 valve closed
10/26/2011	1:26:59 AM	BCl3 valve closed
10/26/2011	1:26:59 AM	PH3 valve closed
10/26/2011	1:26:59 AM	SiCl4 pre valve closed
10/26/2011	1:26:59 AM	SiCl4 post valve closed
10/26/2011	1:26:59 AM	Bypass valve closed
10/26/2011	1:26:59 AM	Bubbler valve closed
10/26/2011	1:26:59 AM	Helium valve opened
10/26/2011	1:26:59 AM	Main Vac valve opened
10/26/2011	1:26:59 AM	Helium MFC set to  20.000000
10/26/2011	1:26:59 AM	H2 MFC set to  0.000000
10/26/2011	1:26:59 AM	BCl3 MFC set to  0.000000
10/26/2011	1:26:59 AM	PHl3 MFC set to  0.000000
10/26/2011	1:26:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:26:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:26:59 AM	Tube furnace set to 150
10/26/2011	1:27:29 AM	Helium valve closed
10/26/2011	1:27:29 AM	H2 valve closed
10/26/2011	1:27:29 AM	BCl3 valve closed
10/26/2011	1:27:29 AM	PH3 valve closed
10/26/2011	1:27:29 AM	SiCl4 pre valve closed
10/26/2011	1:27:29 AM	SiCl4 post valve closed
10/26/2011	1:27:29 AM	Bypass valve closed
10/26/2011	1:27:29 AM	Bubbler valve closed
10/26/2011	1:27:29 AM	Main Vac valve opened
10/26/2011	1:27:29 AM	Helium MFC set to  0.000000
10/26/2011	1:27:29 AM	H2 MFC set to  0.000000
10/26/2011	1:27:29 AM	BCl3 MFC set to  0.000000
10/26/2011	1:27:29 AM	PHl3 MFC set to  0.000000
10/26/2011	1:27:29 AM	SiCl4 MFC set to  0.000000
10/26/2011	1:27:29 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:27:30 AM	Tube furnace set to 150
10/26/2011	1:27:31 AM	Run finished at 1:27 AM
10/26/2011	7:48:07 AM	Recipe started at 7:48 AM
10/26/2011	7:48:07 AM	Helium valve closed
10/26/2011	7:48:07 AM	H2 valve closed
10/26/2011	7:48:07 AM	BCl3 valve closed
10/26/2011	7:48:07 AM	PH3 valve closed
10/26/2011	7:48:07 AM	SiCl4 pre valve closed
10/26/2011	7:48:07 AM	SiCl4 post valve closed
10/26/2011	7:48:07 AM	Bypass valve closed
10/26/2011	7:48:07 AM	Bubbler valve closed
10/26/2011	7:48:07 AM	Main Vac valve opened
10/26/2011	7:48:07 AM	Helium MFC set to  0.000000
10/26/2011	7:48:07 AM	H2 MFC set to  0.000000
10/26/2011	7:48:07 AM	BCl3 MFC set to  0.000000
10/26/2011	7:48:07 AM	PHl3 MFC set to  0.000000
10/26/2011	7:48:07 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:48:07 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:48:07 AM	Tube furnace set to 150
10/26/2011	7:48:37 AM	H2 valve closed
10/26/2011	7:48:37 AM	BCl3 valve closed
10/26/2011	7:48:37 AM	PH3 valve closed
10/26/2011	7:48:37 AM	SiCl4 pre valve closed
10/26/2011	7:48:37 AM	SiCl4 post valve closed
10/26/2011	7:48:37 AM	Bypass valve closed
10/26/2011	7:48:37 AM	Bubbler valve closed
10/26/2011	7:48:37 AM	Helium valve opened
10/26/2011	7:48:37 AM	Main Vac valve opened
10/26/2011	7:48:37 AM	Helium MFC set to  20.000000
10/26/2011	7:48:37 AM	H2 MFC set to  0.000000
10/26/2011	7:48:37 AM	BCl3 MFC set to  0.000000
10/26/2011	7:48:37 AM	PHl3 MFC set to  0.000000
10/26/2011	7:48:37 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:48:37 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:48:37 AM	Tube furnace set to 150
10/26/2011	7:49:07 AM	Helium valve closed
10/26/2011	7:49:07 AM	H2 valve closed
10/26/2011	7:49:07 AM	BCl3 valve closed
10/26/2011	7:49:07 AM	PH3 valve closed
10/26/2011	7:49:07 AM	SiCl4 pre valve closed
10/26/2011	7:49:07 AM	SiCl4 post valve closed
10/26/2011	7:49:07 AM	Bypass valve closed
10/26/2011	7:49:07 AM	Bubbler valve closed
10/26/2011	7:49:07 AM	Main Vac valve opened
10/26/2011	7:49:07 AM	Helium MFC set to  0.000000
10/26/2011	7:49:07 AM	H2 MFC set to  0.000000
10/26/2011	7:49:07 AM	BCl3 MFC set to  0.000000
10/26/2011	7:49:07 AM	PHl3 MFC set to  0.000000
10/26/2011	7:49:07 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:49:07 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:49:07 AM	Tube furnace set to 150
10/26/2011	7:49:37 AM	H2 valve closed
10/26/2011	7:49:37 AM	BCl3 valve closed
10/26/2011	7:49:37 AM	PH3 valve closed
10/26/2011	7:49:37 AM	SiCl4 pre valve closed
10/26/2011	7:49:37 AM	SiCl4 post valve closed
10/26/2011	7:49:37 AM	Bypass valve closed
10/26/2011	7:49:37 AM	Bubbler valve closed
10/26/2011	7:49:37 AM	Helium valve opened
10/26/2011	7:49:37 AM	Main Vac valve opened
10/26/2011	7:49:37 AM	Helium MFC set to  20.000000
10/26/2011	7:49:37 AM	H2 MFC set to  0.000000
10/26/2011	7:49:37 AM	BCl3 MFC set to  0.000000
10/26/2011	7:49:37 AM	PHl3 MFC set to  0.000000
10/26/2011	7:49:37 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:49:37 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:49:37 AM	Tube furnace set to 150
10/26/2011	7:50:07 AM	Helium valve closed
10/26/2011	7:50:07 AM	H2 valve closed
10/26/2011	7:50:07 AM	BCl3 valve closed
10/26/2011	7:50:07 AM	PH3 valve closed
10/26/2011	7:50:07 AM	SiCl4 pre valve closed
10/26/2011	7:50:07 AM	SiCl4 post valve closed
10/26/2011	7:50:07 AM	Bypass valve closed
10/26/2011	7:50:07 AM	Bubbler valve closed
10/26/2011	7:50:07 AM	Main Vac valve opened
10/26/2011	7:50:08 AM	Helium MFC set to  0.000000
10/26/2011	7:50:08 AM	H2 MFC set to  0.000000
10/26/2011	7:50:08 AM	BCl3 MFC set to  0.000000
10/26/2011	7:50:08 AM	PHl3 MFC set to  0.000000
10/26/2011	7:50:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:50:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:50:08 AM	Tube furnace set to 150
10/26/2011	7:50:38 AM	H2 valve closed
10/26/2011	7:50:38 AM	BCl3 valve closed
10/26/2011	7:50:38 AM	PH3 valve closed
10/26/2011	7:50:38 AM	SiCl4 pre valve closed
10/26/2011	7:50:38 AM	SiCl4 post valve closed
10/26/2011	7:50:38 AM	Bypass valve closed
10/26/2011	7:50:38 AM	Bubbler valve closed
10/26/2011	7:50:38 AM	Helium valve opened
10/26/2011	7:50:38 AM	Main Vac valve opened
10/26/2011	7:50:38 AM	Helium MFC set to  20.000000
10/26/2011	7:50:38 AM	H2 MFC set to  0.000000
10/26/2011	7:50:38 AM	BCl3 MFC set to  0.000000
10/26/2011	7:50:38 AM	PHl3 MFC set to  0.000000
10/26/2011	7:50:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:50:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:50:38 AM	Tube furnace set to 150
10/26/2011	7:51:08 AM	Helium valve closed
10/26/2011	7:51:08 AM	H2 valve closed
10/26/2011	7:51:08 AM	BCl3 valve closed
10/26/2011	7:51:08 AM	PH3 valve closed
10/26/2011	7:51:08 AM	SiCl4 pre valve closed
10/26/2011	7:51:08 AM	SiCl4 post valve closed
10/26/2011	7:51:08 AM	Bypass valve closed
10/26/2011	7:51:08 AM	Bubbler valve closed
10/26/2011	7:51:08 AM	Main Vac valve opened
10/26/2011	7:51:08 AM	Helium MFC set to  0.000000
10/26/2011	7:51:08 AM	H2 MFC set to  0.000000
10/26/2011	7:51:08 AM	BCl3 MFC set to  0.000000
10/26/2011	7:51:08 AM	PHl3 MFC set to  0.000000
10/26/2011	7:51:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:51:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:51:08 AM	Tube furnace set to 150
10/26/2011	7:51:38 AM	H2 valve closed
10/26/2011	7:51:38 AM	BCl3 valve closed
10/26/2011	7:51:38 AM	PH3 valve closed
10/26/2011	7:51:38 AM	SiCl4 pre valve closed
10/26/2011	7:51:38 AM	SiCl4 post valve closed
10/26/2011	7:51:38 AM	Bypass valve closed
10/26/2011	7:51:38 AM	Bubbler valve closed
10/26/2011	7:51:38 AM	Helium valve opened
10/26/2011	7:51:38 AM	Main Vac valve opened
10/26/2011	7:51:38 AM	Helium MFC set to  20.000000
10/26/2011	7:51:38 AM	H2 MFC set to  0.000000
10/26/2011	7:51:38 AM	BCl3 MFC set to  0.000000
10/26/2011	7:51:38 AM	PHl3 MFC set to  0.000000
10/26/2011	7:51:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:51:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:51:38 AM	Tube furnace set to 150
10/26/2011	7:52:08 AM	Helium valve closed
10/26/2011	7:52:08 AM	H2 valve closed
10/26/2011	7:52:08 AM	BCl3 valve closed
10/26/2011	7:52:08 AM	PH3 valve closed
10/26/2011	7:52:08 AM	SiCl4 pre valve closed
10/26/2011	7:52:08 AM	SiCl4 post valve closed
10/26/2011	7:52:08 AM	Bypass valve closed
10/26/2011	7:52:08 AM	Bubbler valve closed
10/26/2011	7:52:08 AM	Main Vac valve opened
10/26/2011	7:52:08 AM	Helium MFC set to  0.000000
10/26/2011	7:52:08 AM	H2 MFC set to  0.000000
10/26/2011	7:52:08 AM	BCl3 MFC set to  0.000000
10/26/2011	7:52:08 AM	PHl3 MFC set to  0.000000
10/26/2011	7:52:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:52:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:52:09 AM	Tube furnace set to 150
10/26/2011	7:52:39 AM	H2 valve closed
10/26/2011	7:52:39 AM	BCl3 valve closed
10/26/2011	7:52:39 AM	PH3 valve closed
10/26/2011	7:52:39 AM	SiCl4 pre valve closed
10/26/2011	7:52:39 AM	SiCl4 post valve closed
10/26/2011	7:52:39 AM	Bypass valve closed
10/26/2011	7:52:39 AM	Bubbler valve closed
10/26/2011	7:52:39 AM	Helium valve opened
10/26/2011	7:52:39 AM	Main Vac valve opened
10/26/2011	7:52:39 AM	Helium MFC set to  20.000000
10/26/2011	7:52:39 AM	H2 MFC set to  0.000000
10/26/2011	7:52:39 AM	BCl3 MFC set to  0.000000
10/26/2011	7:52:39 AM	PHl3 MFC set to  0.000000
10/26/2011	7:52:39 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:52:39 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:52:39 AM	Tube furnace set to 150
10/26/2011	7:53:09 AM	Helium valve closed
10/26/2011	7:53:09 AM	H2 valve closed
10/26/2011	7:53:09 AM	BCl3 valve closed
10/26/2011	7:53:09 AM	PH3 valve closed
10/26/2011	7:53:09 AM	SiCl4 pre valve closed
10/26/2011	7:53:09 AM	SiCl4 post valve closed
10/26/2011	7:53:09 AM	Bypass valve closed
10/26/2011	7:53:09 AM	Bubbler valve closed
10/26/2011	7:53:09 AM	Main Vac valve opened
10/26/2011	7:53:09 AM	Helium MFC set to  0.000000
10/26/2011	7:53:09 AM	H2 MFC set to  0.000000
10/26/2011	7:53:09 AM	BCl3 MFC set to  0.000000
10/26/2011	7:53:09 AM	PHl3 MFC set to  0.000000
10/26/2011	7:53:09 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:53:09 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:53:09 AM	Tube furnace set to 150
10/26/2011	7:53:39 AM	H2 valve closed
10/26/2011	7:53:39 AM	BCl3 valve closed
10/26/2011	7:53:39 AM	PH3 valve closed
10/26/2011	7:53:39 AM	SiCl4 pre valve closed
10/26/2011	7:53:39 AM	SiCl4 post valve closed
10/26/2011	7:53:39 AM	Bypass valve closed
10/26/2011	7:53:39 AM	Bubbler valve closed
10/26/2011	7:53:39 AM	Helium valve opened
10/26/2011	7:53:39 AM	Main Vac valve opened
10/26/2011	7:53:39 AM	Helium MFC set to  20.000000
10/26/2011	7:53:39 AM	H2 MFC set to  0.000000
10/26/2011	7:53:39 AM	BCl3 MFC set to  0.000000
10/26/2011	7:53:39 AM	PHl3 MFC set to  0.000000
10/26/2011	7:53:39 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:53:39 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:53:39 AM	Tube furnace set to 150
10/26/2011	7:54:09 AM	Helium valve closed
10/26/2011	7:54:09 AM	H2 valve closed
10/26/2011	7:54:09 AM	BCl3 valve closed
10/26/2011	7:54:09 AM	PH3 valve closed
10/26/2011	7:54:09 AM	SiCl4 pre valve closed
10/26/2011	7:54:09 AM	SiCl4 post valve closed
10/26/2011	7:54:09 AM	Bypass valve closed
10/26/2011	7:54:09 AM	Bubbler valve closed
10/26/2011	7:54:09 AM	Main Vac valve opened
10/26/2011	7:54:09 AM	Helium MFC set to  0.000000
10/26/2011	7:54:09 AM	H2 MFC set to  0.000000
10/26/2011	7:54:09 AM	BCl3 MFC set to  0.000000
10/26/2011	7:54:09 AM	PHl3 MFC set to  0.000000
10/26/2011	7:54:09 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:54:09 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:54:09 AM	Tube furnace set to 150
10/26/2011	7:54:39 AM	H2 valve closed
10/26/2011	7:54:39 AM	BCl3 valve closed
10/26/2011	7:54:39 AM	PH3 valve closed
10/26/2011	7:54:39 AM	SiCl4 pre valve closed
10/26/2011	7:54:39 AM	SiCl4 post valve closed
10/26/2011	7:54:39 AM	Bypass valve closed
10/26/2011	7:54:39 AM	Bubbler valve closed
10/26/2011	7:54:39 AM	Helium valve opened
10/26/2011	7:54:39 AM	Main Vac valve opened
10/26/2011	7:54:39 AM	Helium MFC set to  20.000000
10/26/2011	7:54:39 AM	H2 MFC set to  0.000000
10/26/2011	7:54:39 AM	BCl3 MFC set to  0.000000
10/26/2011	7:54:39 AM	PHl3 MFC set to  0.000000
10/26/2011	7:54:39 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:54:39 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:54:40 AM	Tube furnace set to 150
10/26/2011	7:55:10 AM	Helium valve closed
10/26/2011	7:55:10 AM	H2 valve closed
10/26/2011	7:55:10 AM	BCl3 valve closed
10/26/2011	7:55:10 AM	PH3 valve closed
10/26/2011	7:55:10 AM	SiCl4 pre valve closed
10/26/2011	7:55:10 AM	SiCl4 post valve closed
10/26/2011	7:55:10 AM	Bypass valve closed
10/26/2011	7:55:10 AM	Bubbler valve closed
10/26/2011	7:55:10 AM	Main Vac valve opened
10/26/2011	7:55:10 AM	Helium MFC set to  0.000000
10/26/2011	7:55:10 AM	H2 MFC set to  0.000000
10/26/2011	7:55:10 AM	BCl3 MFC set to  0.000000
10/26/2011	7:55:10 AM	PHl3 MFC set to  0.000000
10/26/2011	7:55:10 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:55:10 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:55:10 AM	Tube furnace set to 150
10/26/2011	7:55:40 AM	H2 valve closed
10/26/2011	7:55:40 AM	BCl3 valve closed
10/26/2011	7:55:40 AM	PH3 valve closed
10/26/2011	7:55:40 AM	SiCl4 pre valve closed
10/26/2011	7:55:40 AM	SiCl4 post valve closed
10/26/2011	7:55:40 AM	Bypass valve closed
10/26/2011	7:55:40 AM	Bubbler valve closed
10/26/2011	7:55:40 AM	Helium valve opened
10/26/2011	7:55:40 AM	Main Vac valve opened
10/26/2011	7:55:40 AM	Helium MFC set to  20.000000
10/26/2011	7:55:40 AM	H2 MFC set to  0.000000
10/26/2011	7:55:40 AM	BCl3 MFC set to  0.000000
10/26/2011	7:55:40 AM	PHl3 MFC set to  0.000000
10/26/2011	7:55:40 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:55:40 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:55:40 AM	Tube furnace set to 150
10/26/2011	7:56:10 AM	Helium valve closed
10/26/2011	7:56:10 AM	H2 valve closed
10/26/2011	7:56:10 AM	BCl3 valve closed
10/26/2011	7:56:10 AM	PH3 valve closed
10/26/2011	7:56:10 AM	SiCl4 pre valve closed
10/26/2011	7:56:10 AM	SiCl4 post valve closed
10/26/2011	7:56:10 AM	Bypass valve closed
10/26/2011	7:56:10 AM	Bubbler valve closed
10/26/2011	7:56:10 AM	Main Vac valve opened
10/26/2011	7:56:10 AM	Helium MFC set to  0.000000
10/26/2011	7:56:10 AM	H2 MFC set to  0.000000
10/26/2011	7:56:10 AM	BCl3 MFC set to  0.000000
10/26/2011	7:56:10 AM	PHl3 MFC set to  0.000000
10/26/2011	7:56:10 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:56:10 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:56:10 AM	Tube furnace set to 150
10/26/2011	7:56:40 AM	H2 valve closed
10/26/2011	7:56:40 AM	BCl3 valve closed
10/26/2011	7:56:40 AM	PH3 valve closed
10/26/2011	7:56:40 AM	SiCl4 pre valve closed
10/26/2011	7:56:40 AM	SiCl4 post valve closed
10/26/2011	7:56:40 AM	Bypass valve closed
10/26/2011	7:56:40 AM	Bubbler valve closed
10/26/2011	7:56:40 AM	Helium valve opened
10/26/2011	7:56:40 AM	Main Vac valve opened
10/26/2011	7:56:40 AM	Helium MFC set to  20.000000
10/26/2011	7:56:40 AM	H2 MFC set to  0.000000
10/26/2011	7:56:40 AM	BCl3 MFC set to  0.000000
10/26/2011	7:56:40 AM	PHl3 MFC set to  0.000000
10/26/2011	7:56:40 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:56:40 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:56:40 AM	Tube furnace set to 150
10/26/2011	7:57:10 AM	Helium valve closed
10/26/2011	7:57:10 AM	H2 valve closed
10/26/2011	7:57:11 AM	BCl3 valve closed
10/26/2011	7:57:11 AM	PH3 valve closed
10/26/2011	7:57:11 AM	SiCl4 pre valve closed
10/26/2011	7:57:11 AM	SiCl4 post valve closed
10/26/2011	7:57:11 AM	Bypass valve closed
10/26/2011	7:57:11 AM	Bubbler valve closed
10/26/2011	7:57:11 AM	Main Vac valve opened
10/26/2011	7:57:11 AM	Helium MFC set to  0.000000
10/26/2011	7:57:11 AM	H2 MFC set to  0.000000
10/26/2011	7:57:11 AM	BCl3 MFC set to  0.000000
10/26/2011	7:57:11 AM	PHl3 MFC set to  0.000000
10/26/2011	7:57:11 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:57:11 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:57:11 AM	Tube furnace set to 150
10/26/2011	7:57:41 AM	H2 valve closed
10/26/2011	7:57:41 AM	BCl3 valve closed
10/26/2011	7:57:41 AM	PH3 valve closed
10/26/2011	7:57:41 AM	SiCl4 pre valve closed
10/26/2011	7:57:41 AM	SiCl4 post valve closed
10/26/2011	7:57:41 AM	Bypass valve closed
10/26/2011	7:57:41 AM	Bubbler valve closed
10/26/2011	7:57:41 AM	Helium valve opened
10/26/2011	7:57:41 AM	Main Vac valve opened
10/26/2011	7:57:41 AM	Helium MFC set to  20.000000
10/26/2011	7:57:41 AM	H2 MFC set to  0.000000
10/26/2011	7:57:41 AM	BCl3 MFC set to  0.000000
10/26/2011	7:57:41 AM	PHl3 MFC set to  0.000000
10/26/2011	7:57:41 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:57:41 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:57:41 AM	Tube furnace set to 150
10/26/2011	7:58:11 AM	Helium valve closed
10/26/2011	7:58:11 AM	H2 valve closed
10/26/2011	7:58:11 AM	BCl3 valve closed
10/26/2011	7:58:11 AM	PH3 valve closed
10/26/2011	7:58:11 AM	SiCl4 pre valve closed
10/26/2011	7:58:11 AM	SiCl4 post valve closed
10/26/2011	7:58:11 AM	Bypass valve closed
10/26/2011	7:58:11 AM	Bubbler valve closed
10/26/2011	7:58:11 AM	Main Vac valve opened
10/26/2011	7:58:11 AM	Helium MFC set to  0.000000
10/26/2011	7:58:11 AM	H2 MFC set to  0.000000
10/26/2011	7:58:11 AM	BCl3 MFC set to  0.000000
10/26/2011	7:58:11 AM	PHl3 MFC set to  0.000000
10/26/2011	7:58:11 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:58:11 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:58:11 AM	Tube furnace set to 150
10/26/2011	7:58:12 AM	Run finished at 7:58 AM
10/26/2011	7:58:52 AM	Main Vac valve closed
10/26/2011	7:59:12 AM	Main Vac valve opened
10/26/2011	7:59:55 AM	Recipe started at 7:59 AM
10/26/2011	7:59:55 AM	Helium valve closed
10/26/2011	7:59:55 AM	H2 valve closed
10/26/2011	7:59:55 AM	BCl3 valve closed
10/26/2011	7:59:55 AM	PH3 valve closed
10/26/2011	7:59:55 AM	SiCl4 pre valve closed
10/26/2011	7:59:55 AM	SiCl4 post valve closed
10/26/2011	7:59:55 AM	Main Vac valve closed
10/26/2011	7:59:55 AM	Bypass valve closed
10/26/2011	7:59:55 AM	Bubbler valve closed
10/26/2011	7:59:55 AM	Helium MFC set to  0.000000
10/26/2011	7:59:55 AM	H2 MFC set to  0.000000
10/26/2011	7:59:55 AM	BCl3 MFC set to  0.000000
10/26/2011	7:59:55 AM	PHl3 MFC set to  0.000000
10/26/2011	7:59:55 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:59:55 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:59:55 AM	Tube furnace set to 0
10/26/2011	7:59:58 AM	Helium valve closed
10/26/2011	7:59:58 AM	BCl3 valve closed
10/26/2011	7:59:58 AM	PH3 valve closed
10/26/2011	7:59:58 AM	SiCl4 pre valve closed
10/26/2011	7:59:58 AM	SiCl4 post valve closed
10/26/2011	7:59:58 AM	Main Vac valve closed
10/26/2011	7:59:58 AM	Bypass valve closed
10/26/2011	7:59:58 AM	Bubbler valve closed
10/26/2011	7:59:58 AM	H2 valve opened
10/26/2011	7:59:58 AM	Helium MFC set to  0.000000
10/26/2011	7:59:58 AM	H2 MFC set to  500.000000
10/26/2011	7:59:58 AM	BCl3 MFC set to  0.000000
10/26/2011	7:59:58 AM	PHl3 MFC set to  0.000000
10/26/2011	7:59:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	7:59:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:59:58 AM	Tube furnace set to 0
10/26/2011	8:01:02 AM	Helium valve closed
10/26/2011	8:01:02 AM	BCl3 valve closed
10/26/2011	8:01:02 AM	PH3 valve closed
10/26/2011	8:01:02 AM	SiCl4 pre valve closed
10/26/2011	8:01:02 AM	SiCl4 post valve closed
10/26/2011	8:01:02 AM	Main Vac valve closed
10/26/2011	8:01:02 AM	Bypass valve closed
10/26/2011	8:01:02 AM	H2 valve opened
10/26/2011	8:01:02 AM	Bubbler valve opened
10/26/2011	8:01:02 AM	Helium MFC set to  0.000000
10/26/2011	8:01:02 AM	H2 MFC set to  500.000000
10/26/2011	8:01:02 AM	BCl3 MFC set to  0.000000
10/26/2011	8:01:02 AM	PHl3 MFC set to  0.000000
10/26/2011	8:01:02 AM	SiCl4 MFC set to  0.000000
10/26/2011	8:01:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	8:01:02 AM	Tube furnace set to 0
10/26/2011	8:01:03 AM	Helium valve closed
10/26/2011	8:01:03 AM	BCl3 valve closed
10/26/2011	8:01:03 AM	PH3 valve closed
10/26/2011	8:01:03 AM	SiCl4 pre valve closed
10/26/2011	8:01:03 AM	SiCl4 post valve closed
10/26/2011	8:01:03 AM	Main Vac valve closed
10/26/2011	8:01:03 AM	Bypass valve closed
10/26/2011	8:01:03 AM	H2 valve opened
10/26/2011	8:01:03 AM	Bubbler valve opened
10/26/2011	8:01:03 AM	Helium MFC set to  0.000000
10/26/2011	8:01:03 AM	H2 MFC set to  500.000000
10/26/2011	8:01:03 AM	BCl3 MFC set to  0.000000
10/26/2011	8:01:03 AM	PHl3 MFC set to  0.000000
10/26/2011	8:01:03 AM	SiCl4 MFC set to  0.000000
10/26/2011	8:01:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	8:01:03 AM	Tube furnace set to 1048
10/26/2011	8:31:03 AM	Helium valve closed
10/26/2011	8:31:03 AM	PH3 valve closed
10/26/2011	8:31:03 AM	Main Vac valve closed
10/26/2011	8:31:03 AM	Bypass valve closed
10/26/2011	8:31:03 AM	H2 valve opened
10/26/2011	8:31:03 AM	BCl3 valve opened
10/26/2011	8:31:03 AM	SiCl4 pre valve opened
10/26/2011	8:31:03 AM	SiCl4 post valve opened
10/26/2011	8:31:03 AM	Bubbler valve opened
10/26/2011	8:31:03 AM	Helium MFC set to  0.000000
10/26/2011	8:31:03 AM	H2 MFC set to  500.000000
10/26/2011	8:31:03 AM	BCl3 MFC set to  2.000000
10/26/2011	8:31:03 AM	PHl3 MFC set to  0.000000
10/26/2011	8:31:03 AM	SiCl4 MFC set to  50.000000
10/26/2011	8:31:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	8:31:03 AM	Tube furnace set to 1048
10/26/2011	8:56:03 AM	Helium valve closed
10/26/2011	8:56:03 AM	BCl3 valve closed
10/26/2011	8:56:03 AM	PH3 valve closed
10/26/2011	8:56:03 AM	SiCl4 pre valve closed
10/26/2011	8:56:03 AM	SiCl4 post valve closed
10/26/2011	8:56:03 AM	Main Vac valve closed
10/26/2011	8:56:03 AM	Bypass valve closed
10/26/2011	8:56:03 AM	H2 valve opened
10/26/2011	8:56:03 AM	Bubbler valve opened
10/26/2011	8:56:03 AM	Helium MFC set to  0.000000
10/26/2011	8:56:03 AM	H2 MFC set to  500.000000
10/26/2011	8:56:03 AM	BCl3 MFC set to  0.000000
10/26/2011	8:56:03 AM	PHl3 MFC set to  0.000000
10/26/2011	8:56:03 AM	SiCl4 MFC set to  0.000000
10/26/2011	8:56:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	8:56:04 AM	Tube furnace set to 750
10/26/2011	9:06:04 AM	H2 valve closed
10/26/2011	9:06:04 AM	BCl3 valve closed
10/26/2011	9:06:04 AM	PH3 valve closed
10/26/2011	9:06:04 AM	SiCl4 pre valve closed
10/26/2011	9:06:04 AM	SiCl4 post valve closed
10/26/2011	9:06:04 AM	Main Vac valve closed
10/26/2011	9:06:04 AM	Bypass valve closed
10/26/2011	9:06:04 AM	Helium valve opened
10/26/2011	9:06:04 AM	Bubbler valve opened
10/26/2011	9:06:04 AM	Helium MFC set to  500.000000
10/26/2011	9:06:04 AM	H2 MFC set to  0.000000
10/26/2011	9:06:04 AM	BCl3 MFC set to  0.000000
10/26/2011	9:06:04 AM	PHl3 MFC set to  0.000000
10/26/2011	9:06:04 AM	SiCl4 MFC set to  0.000000
10/26/2011	9:06:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:06:04 AM	Tube furnace set to 0
10/26/2011	9:26:04 AM	Helium valve closed
10/26/2011	9:26:04 AM	H2 valve closed
10/26/2011	9:26:04 AM	BCl3 valve closed
10/26/2011	9:26:04 AM	PH3 valve closed
10/26/2011	9:26:04 AM	SiCl4 pre valve closed
10/26/2011	9:26:04 AM	SiCl4 post valve closed
10/26/2011	9:26:04 AM	Main Vac valve closed
10/26/2011	9:26:04 AM	Bypass valve closed
10/26/2011	9:26:04 AM	Bubbler valve closed
10/26/2011	9:26:04 AM	Helium MFC set to  0.000000
10/26/2011	9:26:04 AM	H2 MFC set to  0.000000
10/26/2011	9:26:04 AM	BCl3 MFC set to  0.000000
10/26/2011	9:26:04 AM	PHl3 MFC set to  0.000000
10/26/2011	9:26:04 AM	SiCl4 MFC set to  0.000000
10/26/2011	9:26:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:26:04 AM	Tube furnace set to 0
10/26/2011	9:26:05 AM	Run finished at 9:26 AM
10/26/2011	10:03:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	10:03:41 AM	Recipe started at 10:03 AM
10/26/2011	10:03:41 AM	Helium valve closed
10/26/2011	10:03:41 AM	H2 valve closed
10/26/2011	10:03:41 AM	BCl3 valve closed
10/26/2011	10:03:41 AM	PH3 valve closed
10/26/2011	10:03:41 AM	SiCl4 pre valve closed
10/26/2011	10:03:41 AM	SiCl4 post valve closed
10/26/2011	10:03:41 AM	Main Vac valve closed
10/26/2011	10:03:41 AM	Bypass valve closed
10/26/2011	10:03:41 AM	Bubbler valve closed
10/26/2011	10:03:41 AM	Helium MFC set to  0.000000
10/26/2011	10:03:41 AM	H2 MFC set to  0.000000
10/26/2011	10:03:41 AM	BCl3 MFC set to  0.000000
10/26/2011	10:03:41 AM	PHl3 MFC set to  0.000000
10/26/2011	10:03:41 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:03:41 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:03:42 AM	Tube furnace set to 0
10/26/2011	10:03:45 AM	H2 valve closed
10/26/2011	10:03:45 AM	BCl3 valve closed
10/26/2011	10:03:45 AM	PH3 valve closed
10/26/2011	10:03:45 AM	SiCl4 pre valve closed
10/26/2011	10:03:45 AM	SiCl4 post valve closed
10/26/2011	10:03:45 AM	Main Vac valve closed
10/26/2011	10:03:45 AM	Bypass valve closed
10/26/2011	10:03:45 AM	Bubbler valve closed
10/26/2011	10:03:45 AM	Helium valve opened
10/26/2011	10:03:45 AM	Helium MFC set to  500.000000
10/26/2011	10:03:45 AM	H2 MFC set to  0.000000
10/26/2011	10:03:45 AM	BCl3 MFC set to  0.000000
10/26/2011	10:03:45 AM	PHl3 MFC set to  0.000000
10/26/2011	10:03:45 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:03:45 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:03:45 AM	Tube furnace set to 0
10/26/2011	10:03:47 AM	Helium valve closed
10/26/2011	10:03:47 AM	H2 valve closed
10/26/2011	10:03:47 AM	BCl3 valve closed
10/26/2011	10:03:47 AM	PH3 valve closed
10/26/2011	10:03:47 AM	SiCl4 pre valve closed
10/26/2011	10:03:47 AM	SiCl4 post valve closed
10/26/2011	10:03:47 AM	Main Vac valve closed
10/26/2011	10:03:47 AM	Bypass valve closed
10/26/2011	10:03:47 AM	Bubbler valve closed
10/26/2011	10:03:47 AM	Helium MFC set to  0.000000
10/26/2011	10:03:47 AM	H2 MFC set to  0.000000
10/26/2011	10:03:47 AM	BCl3 MFC set to  0.000000
10/26/2011	10:03:47 AM	PHl3 MFC set to  0.000000
10/26/2011	10:03:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:03:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:03:47 AM	Tube furnace set to 0
10/26/2011	10:03:48 AM	Run finished at 10:03 AM
10/26/2011	10:03:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	10:12:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	10:12:19 AM	Recipe started at 10:12 AM
10/26/2011	10:12:19 AM	Helium valve closed
10/26/2011	10:12:19 AM	H2 valve closed
10/26/2011	10:12:19 AM	BCl3 valve closed
10/26/2011	10:12:19 AM	PH3 valve closed
10/26/2011	10:12:19 AM	SiCl4 pre valve closed
10/26/2011	10:12:19 AM	SiCl4 post valve closed
10/26/2011	10:12:19 AM	Main Vac valve closed
10/26/2011	10:12:19 AM	Bubbler valve closed
10/26/2011	10:12:19 AM	Bypass valve opened
10/26/2011	10:12:19 AM	Helium MFC set to  0.000000
10/26/2011	10:12:19 AM	H2 MFC set to  0.000000
10/26/2011	10:12:19 AM	BCl3 MFC set to  0.000000
10/26/2011	10:12:19 AM	PHl3 MFC set to  0.000000
10/26/2011	10:12:19 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:12:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:12:19 AM	Tube furnace set to 0
10/26/2011	10:13:26 AM	Helium valve closed
10/26/2011	10:13:26 AM	H2 valve closed
10/26/2011	10:13:26 AM	BCl3 valve closed
10/26/2011	10:13:26 AM	PH3 valve closed
10/26/2011	10:13:26 AM	SiCl4 pre valve closed
10/26/2011	10:13:26 AM	SiCl4 post valve closed
10/26/2011	10:13:26 AM	Main Vac valve closed
10/26/2011	10:13:26 AM	Bubbler valve closed
10/26/2011	10:13:26 AM	Bypass valve opened
10/26/2011	10:13:26 AM	Helium MFC set to  0.000000
10/26/2011	10:13:26 AM	H2 MFC set to  0.000000
10/26/2011	10:13:26 AM	BCl3 MFC set to  0.000000
10/26/2011	10:13:26 AM	PHl3 MFC set to  0.000000
10/26/2011	10:13:26 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:13:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:13:27 AM	Tube furnace set to 0
10/26/2011	10:14:27 AM	Helium valve closed
10/26/2011	10:14:27 AM	H2 valve closed
10/26/2011	10:14:27 AM	BCl3 valve closed
10/26/2011	10:14:27 AM	PH3 valve closed
10/26/2011	10:14:27 AM	SiCl4 pre valve closed
10/26/2011	10:14:27 AM	SiCl4 post valve closed
10/26/2011	10:14:27 AM	Bypass valve closed
10/26/2011	10:14:27 AM	Bubbler valve closed
10/26/2011	10:14:27 AM	Main Vac valve opened
10/26/2011	10:14:27 AM	Helium MFC set to  0.000000
10/26/2011	10:14:27 AM	H2 MFC set to  0.000000
10/26/2011	10:14:27 AM	BCl3 MFC set to  0.000000
10/26/2011	10:14:27 AM	PHl3 MFC set to  0.000000
10/26/2011	10:14:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:14:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:14:27 AM	Tube furnace set to 0
10/26/2011	10:14:28 AM	Run finished at 10:14 AM
10/26/2011	10:14:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	10:49:47 AM	Recipe started at 10:49 AM
10/26/2011	10:49:47 AM	Helium valve closed
10/26/2011	10:49:47 AM	H2 valve closed
10/26/2011	10:49:47 AM	BCl3 valve closed
10/26/2011	10:49:47 AM	PH3 valve closed
10/26/2011	10:49:47 AM	SiCl4 pre valve closed
10/26/2011	10:49:47 AM	SiCl4 post valve closed
10/26/2011	10:49:47 AM	Bypass valve closed
10/26/2011	10:49:47 AM	Bubbler valve closed
10/26/2011	10:49:47 AM	Main Vac valve opened
10/26/2011	10:49:47 AM	Helium MFC set to  0.000000
10/26/2011	10:49:47 AM	H2 MFC set to  0.000000
10/26/2011	10:49:47 AM	BCl3 MFC set to  0.000000
10/26/2011	10:49:47 AM	PHl3 MFC set to  0.000000
10/26/2011	10:49:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:49:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:49:47 AM	Tube furnace set to 150
10/26/2011	10:50:17 AM	H2 valve closed
10/26/2011	10:50:17 AM	BCl3 valve closed
10/26/2011	10:50:17 AM	PH3 valve closed
10/26/2011	10:50:17 AM	SiCl4 pre valve closed
10/26/2011	10:50:17 AM	SiCl4 post valve closed
10/26/2011	10:50:17 AM	Bypass valve closed
10/26/2011	10:50:17 AM	Bubbler valve closed
10/26/2011	10:50:17 AM	Helium valve opened
10/26/2011	10:50:17 AM	Main Vac valve opened
10/26/2011	10:50:17 AM	Helium MFC set to  20.000000
10/26/2011	10:50:17 AM	H2 MFC set to  0.000000
10/26/2011	10:50:17 AM	BCl3 MFC set to  0.000000
10/26/2011	10:50:17 AM	PHl3 MFC set to  0.000000
10/26/2011	10:50:17 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:50:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:50:18 AM	Tube furnace set to 150
10/26/2011	10:50:48 AM	Helium valve closed
10/26/2011	10:50:48 AM	H2 valve closed
10/26/2011	10:50:48 AM	BCl3 valve closed
10/26/2011	10:50:48 AM	PH3 valve closed
10/26/2011	10:50:48 AM	SiCl4 pre valve closed
10/26/2011	10:50:48 AM	SiCl4 post valve closed
10/26/2011	10:50:48 AM	Bypass valve closed
10/26/2011	10:50:48 AM	Bubbler valve closed
10/26/2011	10:50:48 AM	Main Vac valve opened
10/26/2011	10:50:48 AM	Helium MFC set to  0.000000
10/26/2011	10:50:48 AM	H2 MFC set to  0.000000
10/26/2011	10:50:48 AM	BCl3 MFC set to  0.000000
10/26/2011	10:50:48 AM	PHl3 MFC set to  0.000000
10/26/2011	10:50:48 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:50:48 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:50:48 AM	Tube furnace set to 150
10/26/2011	10:51:18 AM	H2 valve closed
10/26/2011	10:51:18 AM	BCl3 valve closed
10/26/2011	10:51:18 AM	PH3 valve closed
10/26/2011	10:51:18 AM	SiCl4 pre valve closed
10/26/2011	10:51:18 AM	SiCl4 post valve closed
10/26/2011	10:51:18 AM	Bypass valve closed
10/26/2011	10:51:18 AM	Bubbler valve closed
10/26/2011	10:51:18 AM	Helium valve opened
10/26/2011	10:51:18 AM	Main Vac valve opened
10/26/2011	10:51:18 AM	Helium MFC set to  20.000000
10/26/2011	10:51:18 AM	H2 MFC set to  0.000000
10/26/2011	10:51:18 AM	BCl3 MFC set to  0.000000
10/26/2011	10:51:18 AM	PHl3 MFC set to  0.000000
10/26/2011	10:51:18 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:51:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:51:18 AM	Tube furnace set to 150
10/26/2011	10:51:48 AM	Helium valve closed
10/26/2011	10:51:48 AM	H2 valve closed
10/26/2011	10:51:48 AM	BCl3 valve closed
10/26/2011	10:51:48 AM	PH3 valve closed
10/26/2011	10:51:48 AM	SiCl4 pre valve closed
10/26/2011	10:51:48 AM	SiCl4 post valve closed
10/26/2011	10:51:48 AM	Bypass valve closed
10/26/2011	10:51:48 AM	Bubbler valve closed
10/26/2011	10:51:48 AM	Main Vac valve opened
10/26/2011	10:51:48 AM	Helium MFC set to  0.000000
10/26/2011	10:51:48 AM	H2 MFC set to  0.000000
10/26/2011	10:51:48 AM	BCl3 MFC set to  0.000000
10/26/2011	10:51:48 AM	PHl3 MFC set to  0.000000
10/26/2011	10:51:48 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:51:48 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:51:48 AM	Tube furnace set to 150
10/26/2011	10:52:18 AM	H2 valve closed
10/26/2011	10:52:18 AM	BCl3 valve closed
10/26/2011	10:52:18 AM	PH3 valve closed
10/26/2011	10:52:18 AM	SiCl4 pre valve closed
10/26/2011	10:52:18 AM	SiCl4 post valve closed
10/26/2011	10:52:18 AM	Bypass valve closed
10/26/2011	10:52:18 AM	Bubbler valve closed
10/26/2011	10:52:18 AM	Helium valve opened
10/26/2011	10:52:18 AM	Main Vac valve opened
10/26/2011	10:52:18 AM	Helium MFC set to  20.000000
10/26/2011	10:52:18 AM	H2 MFC set to  0.000000
10/26/2011	10:52:18 AM	BCl3 MFC set to  0.000000
10/26/2011	10:52:18 AM	PHl3 MFC set to  0.000000
10/26/2011	10:52:18 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:52:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:52:18 AM	Tube furnace set to 150
10/26/2011	10:52:48 AM	Helium valve closed
10/26/2011	10:52:48 AM	H2 valve closed
10/26/2011	10:52:48 AM	BCl3 valve closed
10/26/2011	10:52:48 AM	PH3 valve closed
10/26/2011	10:52:48 AM	SiCl4 pre valve closed
10/26/2011	10:52:48 AM	SiCl4 post valve closed
10/26/2011	10:52:48 AM	Bypass valve closed
10/26/2011	10:52:48 AM	Bubbler valve closed
10/26/2011	10:52:48 AM	Main Vac valve opened
10/26/2011	10:52:48 AM	Helium MFC set to  0.000000
10/26/2011	10:52:48 AM	H2 MFC set to  0.000000
10/26/2011	10:52:48 AM	BCl3 MFC set to  0.000000
10/26/2011	10:52:48 AM	PHl3 MFC set to  0.000000
10/26/2011	10:52:48 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:52:48 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:52:49 AM	Tube furnace set to 150
10/26/2011	10:53:19 AM	H2 valve closed
10/26/2011	10:53:19 AM	BCl3 valve closed
10/26/2011	10:53:19 AM	PH3 valve closed
10/26/2011	10:53:19 AM	SiCl4 pre valve closed
10/26/2011	10:53:19 AM	SiCl4 post valve closed
10/26/2011	10:53:19 AM	Bypass valve closed
10/26/2011	10:53:19 AM	Bubbler valve closed
10/26/2011	10:53:19 AM	Helium valve opened
10/26/2011	10:53:19 AM	Main Vac valve opened
10/26/2011	10:53:19 AM	Helium MFC set to  20.000000
10/26/2011	10:53:19 AM	H2 MFC set to  0.000000
10/26/2011	10:53:19 AM	BCl3 MFC set to  0.000000
10/26/2011	10:53:19 AM	PHl3 MFC set to  0.000000
10/26/2011	10:53:19 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:53:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:53:19 AM	Tube furnace set to 150
10/26/2011	10:53:49 AM	Helium valve closed
10/26/2011	10:53:49 AM	H2 valve closed
10/26/2011	10:53:49 AM	BCl3 valve closed
10/26/2011	10:53:49 AM	PH3 valve closed
10/26/2011	10:53:49 AM	SiCl4 pre valve closed
10/26/2011	10:53:49 AM	SiCl4 post valve closed
10/26/2011	10:53:49 AM	Bypass valve closed
10/26/2011	10:53:49 AM	Bubbler valve closed
10/26/2011	10:53:49 AM	Main Vac valve opened
10/26/2011	10:53:49 AM	Helium MFC set to  0.000000
10/26/2011	10:53:49 AM	H2 MFC set to  0.000000
10/26/2011	10:53:49 AM	BCl3 MFC set to  0.000000
10/26/2011	10:53:49 AM	PHl3 MFC set to  0.000000
10/26/2011	10:53:49 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:53:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:53:49 AM	Tube furnace set to 150
10/26/2011	10:54:19 AM	H2 valve closed
10/26/2011	10:54:19 AM	BCl3 valve closed
10/26/2011	10:54:19 AM	PH3 valve closed
10/26/2011	10:54:19 AM	SiCl4 pre valve closed
10/26/2011	10:54:19 AM	SiCl4 post valve closed
10/26/2011	10:54:19 AM	Bypass valve closed
10/26/2011	10:54:19 AM	Bubbler valve closed
10/26/2011	10:54:19 AM	Helium valve opened
10/26/2011	10:54:19 AM	Main Vac valve opened
10/26/2011	10:54:19 AM	Helium MFC set to  20.000000
10/26/2011	10:54:19 AM	H2 MFC set to  0.000000
10/26/2011	10:54:19 AM	BCl3 MFC set to  0.000000
10/26/2011	10:54:19 AM	PHl3 MFC set to  0.000000
10/26/2011	10:54:19 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:54:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:54:19 AM	Tube furnace set to 150
10/26/2011	10:54:49 AM	Helium valve closed
10/26/2011	10:54:49 AM	H2 valve closed
10/26/2011	10:54:49 AM	BCl3 valve closed
10/26/2011	10:54:49 AM	PH3 valve closed
10/26/2011	10:54:49 AM	SiCl4 pre valve closed
10/26/2011	10:54:49 AM	SiCl4 post valve closed
10/26/2011	10:54:49 AM	Bypass valve closed
10/26/2011	10:54:49 AM	Bubbler valve closed
10/26/2011	10:54:49 AM	Main Vac valve opened
10/26/2011	10:54:49 AM	Helium MFC set to  0.000000
10/26/2011	10:54:49 AM	H2 MFC set to  0.000000
10/26/2011	10:54:49 AM	BCl3 MFC set to  0.000000
10/26/2011	10:54:49 AM	PHl3 MFC set to  0.000000
10/26/2011	10:54:49 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:54:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:54:49 AM	Tube furnace set to 150
10/26/2011	10:55:19 AM	H2 valve closed
10/26/2011	10:55:19 AM	BCl3 valve closed
10/26/2011	10:55:19 AM	PH3 valve closed
10/26/2011	10:55:19 AM	SiCl4 pre valve closed
10/26/2011	10:55:19 AM	SiCl4 post valve closed
10/26/2011	10:55:19 AM	Bypass valve closed
10/26/2011	10:55:19 AM	Bubbler valve closed
10/26/2011	10:55:19 AM	Helium valve opened
10/26/2011	10:55:19 AM	Main Vac valve opened
10/26/2011	10:55:19 AM	Helium MFC set to  20.000000
10/26/2011	10:55:19 AM	H2 MFC set to  0.000000
10/26/2011	10:55:19 AM	BCl3 MFC set to  0.000000
10/26/2011	10:55:19 AM	PHl3 MFC set to  0.000000
10/26/2011	10:55:19 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:55:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:55:20 AM	Tube furnace set to 150
10/26/2011	10:55:50 AM	Helium valve closed
10/26/2011	10:55:50 AM	H2 valve closed
10/26/2011	10:55:50 AM	BCl3 valve closed
10/26/2011	10:55:50 AM	PH3 valve closed
10/26/2011	10:55:50 AM	SiCl4 pre valve closed
10/26/2011	10:55:50 AM	SiCl4 post valve closed
10/26/2011	10:55:50 AM	Bypass valve closed
10/26/2011	10:55:50 AM	Bubbler valve closed
10/26/2011	10:55:50 AM	Main Vac valve opened
10/26/2011	10:55:50 AM	Helium MFC set to  0.000000
10/26/2011	10:55:50 AM	H2 MFC set to  0.000000
10/26/2011	10:55:50 AM	BCl3 MFC set to  0.000000
10/26/2011	10:55:50 AM	PHl3 MFC set to  0.000000
10/26/2011	10:55:50 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:55:50 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:55:50 AM	Tube furnace set to 150
10/26/2011	10:56:20 AM	H2 valve closed
10/26/2011	10:56:20 AM	BCl3 valve closed
10/26/2011	10:56:20 AM	PH3 valve closed
10/26/2011	10:56:20 AM	SiCl4 pre valve closed
10/26/2011	10:56:20 AM	SiCl4 post valve closed
10/26/2011	10:56:20 AM	Bypass valve closed
10/26/2011	10:56:20 AM	Bubbler valve closed
10/26/2011	10:56:20 AM	Helium valve opened
10/26/2011	10:56:20 AM	Main Vac valve opened
10/26/2011	10:56:20 AM	Helium MFC set to  20.000000
10/26/2011	10:56:20 AM	H2 MFC set to  0.000000
10/26/2011	10:56:20 AM	BCl3 MFC set to  0.000000
10/26/2011	10:56:20 AM	PHl3 MFC set to  0.000000
10/26/2011	10:56:20 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:56:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:56:20 AM	Tube furnace set to 150
10/26/2011	10:56:50 AM	Helium valve closed
10/26/2011	10:56:50 AM	H2 valve closed
10/26/2011	10:56:50 AM	BCl3 valve closed
10/26/2011	10:56:50 AM	PH3 valve closed
10/26/2011	10:56:50 AM	SiCl4 pre valve closed
10/26/2011	10:56:50 AM	SiCl4 post valve closed
10/26/2011	10:56:50 AM	Bypass valve closed
10/26/2011	10:56:50 AM	Bubbler valve closed
10/26/2011	10:56:50 AM	Main Vac valve opened
10/26/2011	10:56:50 AM	Helium MFC set to  0.000000
10/26/2011	10:56:50 AM	H2 MFC set to  0.000000
10/26/2011	10:56:50 AM	BCl3 MFC set to  0.000000
10/26/2011	10:56:50 AM	PHl3 MFC set to  0.000000
10/26/2011	10:56:50 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:56:50 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:56:50 AM	Tube furnace set to 150
10/26/2011	10:57:20 AM	H2 valve closed
10/26/2011	10:57:20 AM	BCl3 valve closed
10/26/2011	10:57:20 AM	PH3 valve closed
10/26/2011	10:57:20 AM	SiCl4 pre valve closed
10/26/2011	10:57:20 AM	SiCl4 post valve closed
10/26/2011	10:57:20 AM	Bypass valve closed
10/26/2011	10:57:20 AM	Bubbler valve closed
10/26/2011	10:57:20 AM	Helium valve opened
10/26/2011	10:57:20 AM	Main Vac valve opened
10/26/2011	10:57:20 AM	Helium MFC set to  20.000000
10/26/2011	10:57:20 AM	H2 MFC set to  0.000000
10/26/2011	10:57:20 AM	BCl3 MFC set to  0.000000
10/26/2011	10:57:20 AM	PHl3 MFC set to  0.000000
10/26/2011	10:57:20 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:57:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:57:21 AM	Tube furnace set to 150
10/26/2011	10:57:51 AM	Helium valve closed
10/26/2011	10:57:51 AM	H2 valve closed
10/26/2011	10:57:51 AM	BCl3 valve closed
10/26/2011	10:57:51 AM	PH3 valve closed
10/26/2011	10:57:51 AM	SiCl4 pre valve closed
10/26/2011	10:57:51 AM	SiCl4 post valve closed
10/26/2011	10:57:51 AM	Bypass valve closed
10/26/2011	10:57:51 AM	Bubbler valve closed
10/26/2011	10:57:51 AM	Main Vac valve opened
10/26/2011	10:57:51 AM	Helium MFC set to  0.000000
10/26/2011	10:57:51 AM	H2 MFC set to  0.000000
10/26/2011	10:57:51 AM	BCl3 MFC set to  0.000000
10/26/2011	10:57:51 AM	PHl3 MFC set to  0.000000
10/26/2011	10:57:51 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:57:51 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:57:51 AM	Tube furnace set to 150
10/26/2011	10:58:21 AM	H2 valve closed
10/26/2011	10:58:21 AM	BCl3 valve closed
10/26/2011	10:58:21 AM	PH3 valve closed
10/26/2011	10:58:21 AM	SiCl4 pre valve closed
10/26/2011	10:58:21 AM	SiCl4 post valve closed
10/26/2011	10:58:21 AM	Bypass valve closed
10/26/2011	10:58:21 AM	Bubbler valve closed
10/26/2011	10:58:21 AM	Helium valve opened
10/26/2011	10:58:21 AM	Main Vac valve opened
10/26/2011	10:58:21 AM	Helium MFC set to  20.000000
10/26/2011	10:58:21 AM	H2 MFC set to  0.000000
10/26/2011	10:58:21 AM	BCl3 MFC set to  0.000000
10/26/2011	10:58:21 AM	PHl3 MFC set to  0.000000
10/26/2011	10:58:21 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:58:21 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:58:21 AM	Tube furnace set to 150
10/26/2011	10:58:51 AM	Helium valve closed
10/26/2011	10:58:51 AM	H2 valve closed
10/26/2011	10:58:51 AM	BCl3 valve closed
10/26/2011	10:58:51 AM	PH3 valve closed
10/26/2011	10:58:51 AM	SiCl4 pre valve closed
10/26/2011	10:58:51 AM	SiCl4 post valve closed
10/26/2011	10:58:51 AM	Bypass valve closed
10/26/2011	10:58:51 AM	Bubbler valve closed
10/26/2011	10:58:51 AM	Main Vac valve opened
10/26/2011	10:58:51 AM	Helium MFC set to  0.000000
10/26/2011	10:58:51 AM	H2 MFC set to  0.000000
10/26/2011	10:58:51 AM	BCl3 MFC set to  0.000000
10/26/2011	10:58:51 AM	PHl3 MFC set to  0.000000
10/26/2011	10:58:51 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:58:51 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:58:51 AM	Tube furnace set to 150
10/26/2011	10:59:21 AM	H2 valve closed
10/26/2011	10:59:21 AM	BCl3 valve closed
10/26/2011	10:59:21 AM	PH3 valve closed
10/26/2011	10:59:21 AM	SiCl4 pre valve closed
10/26/2011	10:59:21 AM	SiCl4 post valve closed
10/26/2011	10:59:21 AM	Bypass valve closed
10/26/2011	10:59:21 AM	Bubbler valve closed
10/26/2011	10:59:21 AM	Helium valve opened
10/26/2011	10:59:21 AM	Main Vac valve opened
10/26/2011	10:59:21 AM	Helium MFC set to  20.000000
10/26/2011	10:59:21 AM	H2 MFC set to  0.000000
10/26/2011	10:59:21 AM	BCl3 MFC set to  0.000000
10/26/2011	10:59:21 AM	PHl3 MFC set to  0.000000
10/26/2011	10:59:21 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:59:21 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:59:21 AM	Tube furnace set to 150
10/26/2011	10:59:51 AM	Helium valve closed
10/26/2011	10:59:51 AM	H2 valve closed
10/26/2011	10:59:51 AM	BCl3 valve closed
10/26/2011	10:59:51 AM	PH3 valve closed
10/26/2011	10:59:51 AM	SiCl4 pre valve closed
10/26/2011	10:59:51 AM	SiCl4 post valve closed
10/26/2011	10:59:51 AM	Bypass valve closed
10/26/2011	10:59:51 AM	Bubbler valve closed
10/26/2011	10:59:51 AM	Main Vac valve opened
10/26/2011	10:59:51 AM	Helium MFC set to  0.000000
10/26/2011	10:59:51 AM	H2 MFC set to  0.000000
10/26/2011	10:59:51 AM	BCl3 MFC set to  0.000000
10/26/2011	10:59:51 AM	PHl3 MFC set to  0.000000
10/26/2011	10:59:51 AM	SiCl4 MFC set to  0.000000
10/26/2011	10:59:51 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:59:52 AM	Tube furnace set to 150
10/26/2011	10:59:53 AM	Run finished at 10:59 AM
10/26/2011	11:02:14 AM	Recipe started at 11:02 AM
10/26/2011	11:02:14 AM	Helium valve closed
10/26/2011	11:02:14 AM	H2 valve closed
10/26/2011	11:02:14 AM	BCl3 valve closed
10/26/2011	11:02:14 AM	PH3 valve closed
10/26/2011	11:02:14 AM	SiCl4 pre valve closed
10/26/2011	11:02:14 AM	SiCl4 post valve closed
10/26/2011	11:02:14 AM	Bypass valve closed
10/26/2011	11:02:14 AM	Bubbler valve closed
10/26/2011	11:02:14 AM	Main Vac valve opened
10/26/2011	11:02:14 AM	Helium MFC set to  0.000000
10/26/2011	11:02:14 AM	H2 MFC set to  0.000000
10/26/2011	11:02:14 AM	BCl3 MFC set to  0.000000
10/26/2011	11:02:14 AM	PHl3 MFC set to  0.000000
10/26/2011	11:02:14 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:02:14 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:02:14 AM	Tube furnace set to 150
10/26/2011	11:02:44 AM	H2 valve closed
10/26/2011	11:02:44 AM	BCl3 valve closed
10/26/2011	11:02:44 AM	PH3 valve closed
10/26/2011	11:02:44 AM	SiCl4 pre valve closed
10/26/2011	11:02:44 AM	SiCl4 post valve closed
10/26/2011	11:02:44 AM	Bypass valve closed
10/26/2011	11:02:44 AM	Bubbler valve closed
10/26/2011	11:02:44 AM	Helium valve opened
10/26/2011	11:02:44 AM	Main Vac valve opened
10/26/2011	11:02:44 AM	Helium MFC set to  20.000000
10/26/2011	11:02:44 AM	H2 MFC set to  0.000000
10/26/2011	11:02:44 AM	BCl3 MFC set to  0.000000
10/26/2011	11:02:44 AM	PHl3 MFC set to  0.000000
10/26/2011	11:02:44 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:02:44 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:02:44 AM	Tube furnace set to 150
10/26/2011	11:03:14 AM	Helium valve closed
10/26/2011	11:03:14 AM	H2 valve closed
10/26/2011	11:03:14 AM	BCl3 valve closed
10/26/2011	11:03:14 AM	PH3 valve closed
10/26/2011	11:03:14 AM	SiCl4 pre valve closed
10/26/2011	11:03:14 AM	SiCl4 post valve closed
10/26/2011	11:03:14 AM	Bypass valve closed
10/26/2011	11:03:14 AM	Bubbler valve closed
10/26/2011	11:03:14 AM	Main Vac valve opened
10/26/2011	11:03:14 AM	Helium MFC set to  0.000000
10/26/2011	11:03:14 AM	H2 MFC set to  0.000000
10/26/2011	11:03:14 AM	BCl3 MFC set to  0.000000
10/26/2011	11:03:14 AM	PHl3 MFC set to  0.000000
10/26/2011	11:03:14 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:03:14 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:03:14 AM	Tube furnace set to 150
10/26/2011	11:03:44 AM	H2 valve closed
10/26/2011	11:03:44 AM	BCl3 valve closed
10/26/2011	11:03:44 AM	PH3 valve closed
10/26/2011	11:03:44 AM	SiCl4 pre valve closed
10/26/2011	11:03:44 AM	SiCl4 post valve closed
10/26/2011	11:03:44 AM	Bypass valve closed
10/26/2011	11:03:44 AM	Bubbler valve closed
10/26/2011	11:03:44 AM	Helium valve opened
10/26/2011	11:03:44 AM	Main Vac valve opened
10/26/2011	11:03:44 AM	Helium MFC set to  20.000000
10/26/2011	11:03:44 AM	H2 MFC set to  0.000000
10/26/2011	11:03:44 AM	BCl3 MFC set to  0.000000
10/26/2011	11:03:44 AM	PHl3 MFC set to  0.000000
10/26/2011	11:03:44 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:03:44 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:03:44 AM	Tube furnace set to 150
10/26/2011	11:04:14 AM	Helium valve closed
10/26/2011	11:04:14 AM	H2 valve closed
10/26/2011	11:04:14 AM	BCl3 valve closed
10/26/2011	11:04:14 AM	PH3 valve closed
10/26/2011	11:04:14 AM	SiCl4 pre valve closed
10/26/2011	11:04:14 AM	SiCl4 post valve closed
10/26/2011	11:04:14 AM	Bypass valve closed
10/26/2011	11:04:14 AM	Bubbler valve closed
10/26/2011	11:04:14 AM	Main Vac valve opened
10/26/2011	11:04:14 AM	Helium MFC set to  0.000000
10/26/2011	11:04:14 AM	H2 MFC set to  0.000000
10/26/2011	11:04:14 AM	BCl3 MFC set to  0.000000
10/26/2011	11:04:14 AM	PHl3 MFC set to  0.000000
10/26/2011	11:04:14 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:04:14 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:04:15 AM	Tube furnace set to 150
10/26/2011	11:04:45 AM	H2 valve closed
10/26/2011	11:04:45 AM	BCl3 valve closed
10/26/2011	11:04:45 AM	PH3 valve closed
10/26/2011	11:04:45 AM	SiCl4 pre valve closed
10/26/2011	11:04:45 AM	SiCl4 post valve closed
10/26/2011	11:04:45 AM	Bypass valve closed
10/26/2011	11:04:45 AM	Bubbler valve closed
10/26/2011	11:04:45 AM	Helium valve opened
10/26/2011	11:04:45 AM	Main Vac valve opened
10/26/2011	11:04:45 AM	Helium MFC set to  20.000000
10/26/2011	11:04:45 AM	H2 MFC set to  0.000000
10/26/2011	11:04:45 AM	BCl3 MFC set to  0.000000
10/26/2011	11:04:45 AM	PHl3 MFC set to  0.000000
10/26/2011	11:04:45 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:04:45 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:04:45 AM	Tube furnace set to 150
10/26/2011	11:05:15 AM	Helium valve closed
10/26/2011	11:05:15 AM	H2 valve closed
10/26/2011	11:05:15 AM	BCl3 valve closed
10/26/2011	11:05:15 AM	PH3 valve closed
10/26/2011	11:05:15 AM	SiCl4 pre valve closed
10/26/2011	11:05:15 AM	SiCl4 post valve closed
10/26/2011	11:05:15 AM	Bypass valve closed
10/26/2011	11:05:15 AM	Bubbler valve closed
10/26/2011	11:05:15 AM	Main Vac valve opened
10/26/2011	11:05:15 AM	Helium MFC set to  0.000000
10/26/2011	11:05:15 AM	H2 MFC set to  0.000000
10/26/2011	11:05:15 AM	BCl3 MFC set to  0.000000
10/26/2011	11:05:15 AM	PHl3 MFC set to  0.000000
10/26/2011	11:05:15 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:05:15 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:05:15 AM	Tube furnace set to 150
10/26/2011	11:05:45 AM	H2 valve closed
10/26/2011	11:05:45 AM	BCl3 valve closed
10/26/2011	11:05:45 AM	PH3 valve closed
10/26/2011	11:05:45 AM	SiCl4 pre valve closed
10/26/2011	11:05:45 AM	SiCl4 post valve closed
10/26/2011	11:05:45 AM	Bypass valve closed
10/26/2011	11:05:45 AM	Bubbler valve closed
10/26/2011	11:05:45 AM	Helium valve opened
10/26/2011	11:05:45 AM	Main Vac valve opened
10/26/2011	11:05:45 AM	Helium MFC set to  20.000000
10/26/2011	11:05:45 AM	H2 MFC set to  0.000000
10/26/2011	11:05:45 AM	BCl3 MFC set to  0.000000
10/26/2011	11:05:45 AM	PHl3 MFC set to  0.000000
10/26/2011	11:05:45 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:05:45 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:05:45 AM	Tube furnace set to 150
10/26/2011	11:06:15 AM	Helium valve closed
10/26/2011	11:06:15 AM	H2 valve closed
10/26/2011	11:06:15 AM	BCl3 valve closed
10/26/2011	11:06:15 AM	PH3 valve closed
10/26/2011	11:06:15 AM	SiCl4 pre valve closed
10/26/2011	11:06:15 AM	SiCl4 post valve closed
10/26/2011	11:06:15 AM	Bypass valve closed
10/26/2011	11:06:15 AM	Bubbler valve closed
10/26/2011	11:06:15 AM	Main Vac valve opened
10/26/2011	11:06:15 AM	Helium MFC set to  0.000000
10/26/2011	11:06:15 AM	H2 MFC set to  0.000000
10/26/2011	11:06:15 AM	BCl3 MFC set to  0.000000
10/26/2011	11:06:15 AM	PHl3 MFC set to  0.000000
10/26/2011	11:06:15 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:06:15 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:06:15 AM	Tube furnace set to 150
10/26/2011	11:06:45 AM	H2 valve closed
10/26/2011	11:06:45 AM	BCl3 valve closed
10/26/2011	11:06:46 AM	PH3 valve closed
10/26/2011	11:06:46 AM	SiCl4 pre valve closed
10/26/2011	11:06:46 AM	SiCl4 post valve closed
10/26/2011	11:06:46 AM	Bypass valve closed
10/26/2011	11:06:46 AM	Bubbler valve closed
10/26/2011	11:06:46 AM	Helium valve opened
10/26/2011	11:06:46 AM	Main Vac valve opened
10/26/2011	11:06:46 AM	Helium MFC set to  20.000000
10/26/2011	11:06:46 AM	H2 MFC set to  0.000000
10/26/2011	11:06:46 AM	BCl3 MFC set to  0.000000
10/26/2011	11:06:46 AM	PHl3 MFC set to  0.000000
10/26/2011	11:06:46 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:06:46 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:06:46 AM	Tube furnace set to 150
10/26/2011	11:07:16 AM	Helium valve closed
10/26/2011	11:07:16 AM	H2 valve closed
10/26/2011	11:07:16 AM	BCl3 valve closed
10/26/2011	11:07:16 AM	PH3 valve closed
10/26/2011	11:07:16 AM	SiCl4 pre valve closed
10/26/2011	11:07:16 AM	SiCl4 post valve closed
10/26/2011	11:07:16 AM	Bypass valve closed
10/26/2011	11:07:16 AM	Bubbler valve closed
10/26/2011	11:07:16 AM	Main Vac valve opened
10/26/2011	11:07:16 AM	Helium MFC set to  0.000000
10/26/2011	11:07:16 AM	H2 MFC set to  0.000000
10/26/2011	11:07:16 AM	BCl3 MFC set to  0.000000
10/26/2011	11:07:16 AM	PHl3 MFC set to  0.000000
10/26/2011	11:07:16 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:07:16 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:07:16 AM	Tube furnace set to 150
10/26/2011	11:07:46 AM	H2 valve closed
10/26/2011	11:07:46 AM	BCl3 valve closed
10/26/2011	11:07:46 AM	PH3 valve closed
10/26/2011	11:07:46 AM	SiCl4 pre valve closed
10/26/2011	11:07:46 AM	SiCl4 post valve closed
10/26/2011	11:07:46 AM	Bypass valve closed
10/26/2011	11:07:46 AM	Bubbler valve closed
10/26/2011	11:07:46 AM	Helium valve opened
10/26/2011	11:07:46 AM	Main Vac valve opened
10/26/2011	11:07:46 AM	Helium MFC set to  20.000000
10/26/2011	11:07:46 AM	H2 MFC set to  0.000000
10/26/2011	11:07:46 AM	BCl3 MFC set to  0.000000
10/26/2011	11:07:46 AM	PHl3 MFC set to  0.000000
10/26/2011	11:07:46 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:07:46 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:07:46 AM	Tube furnace set to 150
10/26/2011	11:08:16 AM	Helium valve closed
10/26/2011	11:08:16 AM	H2 valve closed
10/26/2011	11:08:16 AM	BCl3 valve closed
10/26/2011	11:08:16 AM	PH3 valve closed
10/26/2011	11:08:16 AM	SiCl4 pre valve closed
10/26/2011	11:08:16 AM	SiCl4 post valve closed
10/26/2011	11:08:16 AM	Bypass valve closed
10/26/2011	11:08:16 AM	Bubbler valve closed
10/26/2011	11:08:16 AM	Main Vac valve opened
10/26/2011	11:08:16 AM	Helium MFC set to  0.000000
10/26/2011	11:08:16 AM	H2 MFC set to  0.000000
10/26/2011	11:08:16 AM	BCl3 MFC set to  0.000000
10/26/2011	11:08:16 AM	PHl3 MFC set to  0.000000
10/26/2011	11:08:16 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:08:16 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:08:16 AM	Tube furnace set to 150
10/26/2011	11:08:46 AM	H2 valve closed
10/26/2011	11:08:46 AM	BCl3 valve closed
10/26/2011	11:08:46 AM	PH3 valve closed
10/26/2011	11:08:46 AM	SiCl4 pre valve closed
10/26/2011	11:08:46 AM	SiCl4 post valve closed
10/26/2011	11:08:46 AM	Bypass valve closed
10/26/2011	11:08:46 AM	Bubbler valve closed
10/26/2011	11:08:46 AM	Helium valve opened
10/26/2011	11:08:46 AM	Main Vac valve opened
10/26/2011	11:08:46 AM	Helium MFC set to  20.000000
10/26/2011	11:08:46 AM	H2 MFC set to  0.000000
10/26/2011	11:08:46 AM	BCl3 MFC set to  0.000000
10/26/2011	11:08:46 AM	PHl3 MFC set to  0.000000
10/26/2011	11:08:46 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:08:46 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:08:47 AM	Tube furnace set to 150
10/26/2011	11:09:17 AM	Helium valve closed
10/26/2011	11:09:17 AM	H2 valve closed
10/26/2011	11:09:17 AM	BCl3 valve closed
10/26/2011	11:09:17 AM	PH3 valve closed
10/26/2011	11:09:17 AM	SiCl4 pre valve closed
10/26/2011	11:09:17 AM	SiCl4 post valve closed
10/26/2011	11:09:17 AM	Bypass valve closed
10/26/2011	11:09:17 AM	Bubbler valve closed
10/26/2011	11:09:17 AM	Main Vac valve opened
10/26/2011	11:09:17 AM	Helium MFC set to  0.000000
10/26/2011	11:09:17 AM	H2 MFC set to  0.000000
10/26/2011	11:09:17 AM	BCl3 MFC set to  0.000000
10/26/2011	11:09:17 AM	PHl3 MFC set to  0.000000
10/26/2011	11:09:17 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:09:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:09:17 AM	Tube furnace set to 150
10/26/2011	11:09:47 AM	H2 valve closed
10/26/2011	11:09:47 AM	BCl3 valve closed
10/26/2011	11:09:47 AM	PH3 valve closed
10/26/2011	11:09:47 AM	SiCl4 pre valve closed
10/26/2011	11:09:47 AM	SiCl4 post valve closed
10/26/2011	11:09:47 AM	Bypass valve closed
10/26/2011	11:09:47 AM	Bubbler valve closed
10/26/2011	11:09:47 AM	Helium valve opened
10/26/2011	11:09:47 AM	Main Vac valve opened
10/26/2011	11:09:47 AM	Helium MFC set to  20.000000
10/26/2011	11:09:47 AM	H2 MFC set to  0.000000
10/26/2011	11:09:47 AM	BCl3 MFC set to  0.000000
10/26/2011	11:09:47 AM	PHl3 MFC set to  0.000000
10/26/2011	11:09:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:09:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:09:47 AM	Tube furnace set to 150
10/26/2011	11:10:17 AM	Helium valve closed
10/26/2011	11:10:17 AM	H2 valve closed
10/26/2011	11:10:17 AM	BCl3 valve closed
10/26/2011	11:10:17 AM	PH3 valve closed
10/26/2011	11:10:17 AM	SiCl4 pre valve closed
10/26/2011	11:10:17 AM	SiCl4 post valve closed
10/26/2011	11:10:17 AM	Bypass valve closed
10/26/2011	11:10:17 AM	Bubbler valve closed
10/26/2011	11:10:17 AM	Main Vac valve opened
10/26/2011	11:10:17 AM	Helium MFC set to  0.000000
10/26/2011	11:10:17 AM	H2 MFC set to  0.000000
10/26/2011	11:10:17 AM	BCl3 MFC set to  0.000000
10/26/2011	11:10:17 AM	PHl3 MFC set to  0.000000
10/26/2011	11:10:17 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:10:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:10:17 AM	Tube furnace set to 150
10/26/2011	11:10:47 AM	H2 valve closed
10/26/2011	11:10:47 AM	BCl3 valve closed
10/26/2011	11:10:47 AM	PH3 valve closed
10/26/2011	11:10:47 AM	SiCl4 pre valve closed
10/26/2011	11:10:47 AM	SiCl4 post valve closed
10/26/2011	11:10:47 AM	Bypass valve closed
10/26/2011	11:10:47 AM	Bubbler valve closed
10/26/2011	11:10:47 AM	Helium valve opened
10/26/2011	11:10:47 AM	Main Vac valve opened
10/26/2011	11:10:47 AM	Helium MFC set to  20.000000
10/26/2011	11:10:47 AM	H2 MFC set to  0.000000
10/26/2011	11:10:47 AM	BCl3 MFC set to  0.000000
10/26/2011	11:10:47 AM	PHl3 MFC set to  0.000000
10/26/2011	11:10:47 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:10:47 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:10:47 AM	Tube furnace set to 150
10/26/2011	11:11:17 AM	Helium valve closed
10/26/2011	11:11:17 AM	H2 valve closed
10/26/2011	11:11:17 AM	BCl3 valve closed
10/26/2011	11:11:17 AM	PH3 valve closed
10/26/2011	11:11:17 AM	SiCl4 pre valve closed
10/26/2011	11:11:17 AM	SiCl4 post valve closed
10/26/2011	11:11:17 AM	Bypass valve closed
10/26/2011	11:11:17 AM	Bubbler valve closed
10/26/2011	11:11:17 AM	Main Vac valve opened
10/26/2011	11:11:17 AM	Helium MFC set to  0.000000
10/26/2011	11:11:17 AM	H2 MFC set to  0.000000
10/26/2011	11:11:17 AM	BCl3 MFC set to  0.000000
10/26/2011	11:11:17 AM	PHl3 MFC set to  0.000000
10/26/2011	11:11:17 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:11:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:11:18 AM	Tube furnace set to 150
10/26/2011	11:11:48 AM	H2 valve closed
10/26/2011	11:11:48 AM	BCl3 valve closed
10/26/2011	11:11:48 AM	PH3 valve closed
10/26/2011	11:11:48 AM	SiCl4 pre valve closed
10/26/2011	11:11:48 AM	SiCl4 post valve closed
10/26/2011	11:11:48 AM	Bypass valve closed
10/26/2011	11:11:48 AM	Bubbler valve closed
10/26/2011	11:11:48 AM	Helium valve opened
10/26/2011	11:11:48 AM	Main Vac valve opened
10/26/2011	11:11:48 AM	Helium MFC set to  20.000000
10/26/2011	11:11:48 AM	H2 MFC set to  0.000000
10/26/2011	11:11:48 AM	BCl3 MFC set to  0.000000
10/26/2011	11:11:48 AM	PHl3 MFC set to  0.000000
10/26/2011	11:11:48 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:11:48 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:11:48 AM	Tube furnace set to 150
10/26/2011	11:12:18 AM	Helium valve closed
10/26/2011	11:12:18 AM	H2 valve closed
10/26/2011	11:12:18 AM	BCl3 valve closed
10/26/2011	11:12:18 AM	PH3 valve closed
10/26/2011	11:12:18 AM	SiCl4 pre valve closed
10/26/2011	11:12:18 AM	SiCl4 post valve closed
10/26/2011	11:12:18 AM	Bypass valve closed
10/26/2011	11:12:18 AM	Bubbler valve closed
10/26/2011	11:12:18 AM	Main Vac valve opened
10/26/2011	11:12:18 AM	Helium MFC set to  0.000000
10/26/2011	11:12:18 AM	H2 MFC set to  0.000000
10/26/2011	11:12:18 AM	BCl3 MFC set to  0.000000
10/26/2011	11:12:18 AM	PHl3 MFC set to  0.000000
10/26/2011	11:12:18 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:12:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:12:18 AM	Tube furnace set to 150
10/26/2011	11:12:19 AM	Run finished at 11:12 AM
10/26/2011	11:14:07 AM	Recipe started at 11:14 AM
10/26/2011	11:14:07 AM	Helium valve closed
10/26/2011	11:14:07 AM	H2 valve closed
10/26/2011	11:14:07 AM	BCl3 valve closed
10/26/2011	11:14:07 AM	PH3 valve closed
10/26/2011	11:14:07 AM	SiCl4 pre valve closed
10/26/2011	11:14:07 AM	SiCl4 post valve closed
10/26/2011	11:14:07 AM	Bypass valve closed
10/26/2011	11:14:07 AM	Bubbler valve closed
10/26/2011	11:14:07 AM	Main Vac valve opened
10/26/2011	11:14:07 AM	Helium MFC set to  0.000000
10/26/2011	11:14:07 AM	H2 MFC set to  0.000000
10/26/2011	11:14:07 AM	BCl3 MFC set to  0.000000
10/26/2011	11:14:07 AM	PHl3 MFC set to  0.000000
10/26/2011	11:14:07 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:14:07 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:14:08 AM	Tube furnace set to 150
10/26/2011	11:14:38 AM	H2 valve closed
10/26/2011	11:14:38 AM	BCl3 valve closed
10/26/2011	11:14:38 AM	PH3 valve closed
10/26/2011	11:14:38 AM	SiCl4 pre valve closed
10/26/2011	11:14:38 AM	SiCl4 post valve closed
10/26/2011	11:14:38 AM	Bypass valve closed
10/26/2011	11:14:38 AM	Bubbler valve closed
10/26/2011	11:14:38 AM	Helium valve opened
10/26/2011	11:14:38 AM	Main Vac valve opened
10/26/2011	11:14:38 AM	Helium MFC set to  20.000000
10/26/2011	11:14:38 AM	H2 MFC set to  0.000000
10/26/2011	11:14:38 AM	BCl3 MFC set to  0.000000
10/26/2011	11:14:38 AM	PHl3 MFC set to  0.000000
10/26/2011	11:14:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:14:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:14:38 AM	Tube furnace set to 150
10/26/2011	11:15:08 AM	Helium valve closed
10/26/2011	11:15:08 AM	H2 valve closed
10/26/2011	11:15:08 AM	BCl3 valve closed
10/26/2011	11:15:08 AM	PH3 valve closed
10/26/2011	11:15:08 AM	SiCl4 pre valve closed
10/26/2011	11:15:08 AM	SiCl4 post valve closed
10/26/2011	11:15:08 AM	Bypass valve closed
10/26/2011	11:15:08 AM	Bubbler valve closed
10/26/2011	11:15:08 AM	Main Vac valve opened
10/26/2011	11:15:08 AM	Helium MFC set to  0.000000
10/26/2011	11:15:08 AM	H2 MFC set to  0.000000
10/26/2011	11:15:08 AM	BCl3 MFC set to  0.000000
10/26/2011	11:15:08 AM	PHl3 MFC set to  0.000000
10/26/2011	11:15:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:15:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:15:08 AM	Tube furnace set to 150
10/26/2011	11:15:38 AM	H2 valve closed
10/26/2011	11:15:38 AM	BCl3 valve closed
10/26/2011	11:15:38 AM	PH3 valve closed
10/26/2011	11:15:38 AM	SiCl4 pre valve closed
10/26/2011	11:15:38 AM	SiCl4 post valve closed
10/26/2011	11:15:38 AM	Bypass valve closed
10/26/2011	11:15:38 AM	Bubbler valve closed
10/26/2011	11:15:38 AM	Helium valve opened
10/26/2011	11:15:38 AM	Main Vac valve opened
10/26/2011	11:15:38 AM	Helium MFC set to  20.000000
10/26/2011	11:15:38 AM	H2 MFC set to  0.000000
10/26/2011	11:15:38 AM	BCl3 MFC set to  0.000000
10/26/2011	11:15:38 AM	PHl3 MFC set to  0.000000
10/26/2011	11:15:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:15:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:15:38 AM	Tube furnace set to 150
10/26/2011	11:16:08 AM	Helium valve closed
10/26/2011	11:16:08 AM	H2 valve closed
10/26/2011	11:16:08 AM	BCl3 valve closed
10/26/2011	11:16:08 AM	PH3 valve closed
10/26/2011	11:16:08 AM	SiCl4 pre valve closed
10/26/2011	11:16:08 AM	SiCl4 post valve closed
10/26/2011	11:16:08 AM	Bypass valve closed
10/26/2011	11:16:08 AM	Bubbler valve closed
10/26/2011	11:16:08 AM	Main Vac valve opened
10/26/2011	11:16:08 AM	Helium MFC set to  0.000000
10/26/2011	11:16:08 AM	H2 MFC set to  0.000000
10/26/2011	11:16:08 AM	BCl3 MFC set to  0.000000
10/26/2011	11:16:08 AM	PHl3 MFC set to  0.000000
10/26/2011	11:16:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:16:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:16:08 AM	Tube furnace set to 150
10/26/2011	11:16:38 AM	H2 valve closed
10/26/2011	11:16:38 AM	BCl3 valve closed
10/26/2011	11:16:38 AM	PH3 valve closed
10/26/2011	11:16:38 AM	SiCl4 pre valve closed
10/26/2011	11:16:38 AM	SiCl4 post valve closed
10/26/2011	11:16:38 AM	Bypass valve closed
10/26/2011	11:16:38 AM	Bubbler valve closed
10/26/2011	11:16:38 AM	Helium valve opened
10/26/2011	11:16:38 AM	Main Vac valve opened
10/26/2011	11:16:38 AM	Helium MFC set to  20.000000
10/26/2011	11:16:38 AM	H2 MFC set to  0.000000
10/26/2011	11:16:38 AM	BCl3 MFC set to  0.000000
10/26/2011	11:16:38 AM	PHl3 MFC set to  0.000000
10/26/2011	11:16:38 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:16:38 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:16:39 AM	Tube furnace set to 150
10/26/2011	11:17:09 AM	Helium valve closed
10/26/2011	11:17:09 AM	H2 valve closed
10/26/2011	11:17:09 AM	BCl3 valve closed
10/26/2011	11:17:09 AM	PH3 valve closed
10/26/2011	11:17:09 AM	SiCl4 pre valve closed
10/26/2011	11:17:09 AM	SiCl4 post valve closed
10/26/2011	11:17:09 AM	Bypass valve closed
10/26/2011	11:17:09 AM	Bubbler valve closed
10/26/2011	11:17:09 AM	Main Vac valve opened
10/26/2011	11:17:09 AM	Helium MFC set to  0.000000
10/26/2011	11:17:09 AM	H2 MFC set to  0.000000
10/26/2011	11:17:09 AM	BCl3 MFC set to  0.000000
10/26/2011	11:17:09 AM	PHl3 MFC set to  0.000000
10/26/2011	11:17:09 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:17:09 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:17:09 AM	Tube furnace set to 150
10/26/2011	11:17:39 AM	H2 valve closed
10/26/2011	11:17:39 AM	BCl3 valve closed
10/26/2011	11:17:39 AM	PH3 valve closed
10/26/2011	11:17:39 AM	SiCl4 pre valve closed
10/26/2011	11:17:39 AM	SiCl4 post valve closed
10/26/2011	11:17:39 AM	Bypass valve closed
10/26/2011	11:17:39 AM	Bubbler valve closed
10/26/2011	11:17:39 AM	Helium valve opened
10/26/2011	11:17:39 AM	Main Vac valve opened
10/26/2011	11:17:39 AM	Helium MFC set to  20.000000
10/26/2011	11:17:39 AM	H2 MFC set to  0.000000
10/26/2011	11:17:39 AM	BCl3 MFC set to  0.000000
10/26/2011	11:17:39 AM	PHl3 MFC set to  0.000000
10/26/2011	11:17:39 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:17:39 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:17:39 AM	Tube furnace set to 150
10/26/2011	11:18:09 AM	Helium valve closed
10/26/2011	11:18:09 AM	H2 valve closed
10/26/2011	11:18:09 AM	BCl3 valve closed
10/26/2011	11:18:09 AM	PH3 valve closed
10/26/2011	11:18:09 AM	SiCl4 pre valve closed
10/26/2011	11:18:09 AM	SiCl4 post valve closed
10/26/2011	11:18:09 AM	Bypass valve closed
10/26/2011	11:18:09 AM	Bubbler valve closed
10/26/2011	11:18:09 AM	Main Vac valve opened
10/26/2011	11:18:09 AM	Helium MFC set to  0.000000
10/26/2011	11:18:09 AM	H2 MFC set to  0.000000
10/26/2011	11:18:09 AM	BCl3 MFC set to  0.000000
10/26/2011	11:18:09 AM	PHl3 MFC set to  0.000000
10/26/2011	11:18:09 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:18:09 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:18:09 AM	Tube furnace set to 150
10/26/2011	11:18:39 AM	H2 valve closed
10/26/2011	11:18:39 AM	BCl3 valve closed
10/26/2011	11:18:39 AM	PH3 valve closed
10/26/2011	11:18:39 AM	SiCl4 pre valve closed
10/26/2011	11:18:39 AM	SiCl4 post valve closed
10/26/2011	11:18:39 AM	Bypass valve closed
10/26/2011	11:18:39 AM	Bubbler valve closed
10/26/2011	11:18:39 AM	Helium valve opened
10/26/2011	11:18:39 AM	Main Vac valve opened
10/26/2011	11:18:39 AM	Helium MFC set to  20.000000
10/26/2011	11:18:39 AM	H2 MFC set to  0.000000
10/26/2011	11:18:39 AM	BCl3 MFC set to  0.000000
10/26/2011	11:18:39 AM	PHl3 MFC set to  0.000000
10/26/2011	11:18:39 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:18:39 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:18:39 AM	Tube furnace set to 150
10/26/2011	11:19:09 AM	Helium valve closed
10/26/2011	11:19:10 AM	H2 valve closed
10/26/2011	11:19:10 AM	BCl3 valve closed
10/26/2011	11:19:10 AM	PH3 valve closed
10/26/2011	11:19:10 AM	SiCl4 pre valve closed
10/26/2011	11:19:10 AM	SiCl4 post valve closed
10/26/2011	11:19:10 AM	Bypass valve closed
10/26/2011	11:19:10 AM	Bubbler valve closed
10/26/2011	11:19:10 AM	Main Vac valve opened
10/26/2011	11:19:10 AM	Helium MFC set to  0.000000
10/26/2011	11:19:10 AM	H2 MFC set to  0.000000
10/26/2011	11:19:10 AM	BCl3 MFC set to  0.000000
10/26/2011	11:19:10 AM	PHl3 MFC set to  0.000000
10/26/2011	11:19:10 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:19:10 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:19:10 AM	Tube furnace set to 150
10/26/2011	11:19:40 AM	H2 valve closed
10/26/2011	11:19:40 AM	BCl3 valve closed
10/26/2011	11:19:40 AM	PH3 valve closed
10/26/2011	11:19:40 AM	SiCl4 pre valve closed
10/26/2011	11:19:40 AM	SiCl4 post valve closed
10/26/2011	11:19:40 AM	Bypass valve closed
10/26/2011	11:19:40 AM	Bubbler valve closed
10/26/2011	11:19:40 AM	Helium valve opened
10/26/2011	11:19:40 AM	Main Vac valve opened
10/26/2011	11:19:40 AM	Helium MFC set to  20.000000
10/26/2011	11:19:40 AM	H2 MFC set to  0.000000
10/26/2011	11:19:40 AM	BCl3 MFC set to  0.000000
10/26/2011	11:19:40 AM	PHl3 MFC set to  0.000000
10/26/2011	11:19:40 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:19:40 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:19:40 AM	Tube furnace set to 150
10/26/2011	11:20:10 AM	Helium valve closed
10/26/2011	11:20:10 AM	H2 valve closed
10/26/2011	11:20:10 AM	BCl3 valve closed
10/26/2011	11:20:10 AM	PH3 valve closed
10/26/2011	11:20:10 AM	SiCl4 pre valve closed
10/26/2011	11:20:10 AM	SiCl4 post valve closed
10/26/2011	11:20:10 AM	Bypass valve closed
10/26/2011	11:20:10 AM	Bubbler valve closed
10/26/2011	11:20:10 AM	Main Vac valve opened
10/26/2011	11:20:10 AM	Helium MFC set to  0.000000
10/26/2011	11:20:10 AM	H2 MFC set to  0.000000
10/26/2011	11:20:10 AM	BCl3 MFC set to  0.000000
10/26/2011	11:20:10 AM	PHl3 MFC set to  0.000000
10/26/2011	11:20:10 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:20:10 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:20:10 AM	Tube furnace set to 150
10/26/2011	11:20:40 AM	H2 valve closed
10/26/2011	11:20:40 AM	BCl3 valve closed
10/26/2011	11:20:40 AM	PH3 valve closed
10/26/2011	11:20:40 AM	SiCl4 pre valve closed
10/26/2011	11:20:40 AM	SiCl4 post valve closed
10/26/2011	11:20:40 AM	Bypass valve closed
10/26/2011	11:20:40 AM	Bubbler valve closed
10/26/2011	11:20:40 AM	Helium valve opened
10/26/2011	11:20:40 AM	Main Vac valve opened
10/26/2011	11:20:40 AM	Helium MFC set to  20.000000
10/26/2011	11:20:40 AM	H2 MFC set to  0.000000
10/26/2011	11:20:40 AM	BCl3 MFC set to  0.000000
10/26/2011	11:20:40 AM	PHl3 MFC set to  0.000000
10/26/2011	11:20:40 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:20:40 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:20:40 AM	Tube furnace set to 150
10/26/2011	11:21:10 AM	Helium valve closed
10/26/2011	11:21:10 AM	H2 valve closed
10/26/2011	11:21:10 AM	BCl3 valve closed
10/26/2011	11:21:10 AM	PH3 valve closed
10/26/2011	11:21:10 AM	SiCl4 pre valve closed
10/26/2011	11:21:10 AM	SiCl4 post valve closed
10/26/2011	11:21:10 AM	Bypass valve closed
10/26/2011	11:21:10 AM	Bubbler valve closed
10/26/2011	11:21:10 AM	Main Vac valve opened
10/26/2011	11:21:10 AM	Helium MFC set to  0.000000
10/26/2011	11:21:10 AM	H2 MFC set to  0.000000
10/26/2011	11:21:10 AM	BCl3 MFC set to  0.000000
10/26/2011	11:21:10 AM	PHl3 MFC set to  0.000000
10/26/2011	11:21:10 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:21:10 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:21:11 AM	Tube furnace set to 150
10/26/2011	11:21:41 AM	H2 valve closed
10/26/2011	11:21:41 AM	BCl3 valve closed
10/26/2011	11:21:41 AM	PH3 valve closed
10/26/2011	11:21:41 AM	SiCl4 pre valve closed
10/26/2011	11:21:41 AM	SiCl4 post valve closed
10/26/2011	11:21:41 AM	Bypass valve closed
10/26/2011	11:21:41 AM	Bubbler valve closed
10/26/2011	11:21:41 AM	Helium valve opened
10/26/2011	11:21:41 AM	Main Vac valve opened
10/26/2011	11:21:41 AM	Helium MFC set to  20.000000
10/26/2011	11:21:41 AM	H2 MFC set to  0.000000
10/26/2011	11:21:41 AM	BCl3 MFC set to  0.000000
10/26/2011	11:21:41 AM	PHl3 MFC set to  0.000000
10/26/2011	11:21:41 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:21:41 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:21:41 AM	Tube furnace set to 150
10/26/2011	11:22:11 AM	Helium valve closed
10/26/2011	11:22:11 AM	H2 valve closed
10/26/2011	11:22:11 AM	BCl3 valve closed
10/26/2011	11:22:11 AM	PH3 valve closed
10/26/2011	11:22:11 AM	SiCl4 pre valve closed
10/26/2011	11:22:11 AM	SiCl4 post valve closed
10/26/2011	11:22:11 AM	Bypass valve closed
10/26/2011	11:22:11 AM	Bubbler valve closed
10/26/2011	11:22:11 AM	Main Vac valve opened
10/26/2011	11:22:11 AM	Helium MFC set to  0.000000
10/26/2011	11:22:11 AM	H2 MFC set to  0.000000
10/26/2011	11:22:11 AM	BCl3 MFC set to  0.000000
10/26/2011	11:22:11 AM	PHl3 MFC set to  0.000000
10/26/2011	11:22:11 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:22:11 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:22:11 AM	Tube furnace set to 150
10/26/2011	11:22:41 AM	H2 valve closed
10/26/2011	11:22:41 AM	BCl3 valve closed
10/26/2011	11:22:41 AM	PH3 valve closed
10/26/2011	11:22:41 AM	SiCl4 pre valve closed
10/26/2011	11:22:41 AM	SiCl4 post valve closed
10/26/2011	11:22:41 AM	Bypass valve closed
10/26/2011	11:22:41 AM	Bubbler valve closed
10/26/2011	11:22:41 AM	Helium valve opened
10/26/2011	11:22:41 AM	Main Vac valve opened
10/26/2011	11:22:41 AM	Helium MFC set to  20.000000
10/26/2011	11:22:41 AM	H2 MFC set to  0.000000
10/26/2011	11:22:41 AM	BCl3 MFC set to  0.000000
10/26/2011	11:22:41 AM	PHl3 MFC set to  0.000000
10/26/2011	11:22:41 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:22:41 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:22:41 AM	Tube furnace set to 150
10/26/2011	11:23:11 AM	Helium valve closed
10/26/2011	11:23:11 AM	H2 valve closed
10/26/2011	11:23:11 AM	BCl3 valve closed
10/26/2011	11:23:11 AM	PH3 valve closed
10/26/2011	11:23:11 AM	SiCl4 pre valve closed
10/26/2011	11:23:11 AM	SiCl4 post valve closed
10/26/2011	11:23:11 AM	Bypass valve closed
10/26/2011	11:23:11 AM	Bubbler valve closed
10/26/2011	11:23:11 AM	Main Vac valve opened
10/26/2011	11:23:11 AM	Helium MFC set to  0.000000
10/26/2011	11:23:11 AM	H2 MFC set to  0.000000
10/26/2011	11:23:11 AM	BCl3 MFC set to  0.000000
10/26/2011	11:23:11 AM	PHl3 MFC set to  0.000000
10/26/2011	11:23:11 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:23:11 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:23:11 AM	Tube furnace set to 150
10/26/2011	11:23:41 AM	H2 valve closed
10/26/2011	11:23:41 AM	BCl3 valve closed
10/26/2011	11:23:41 AM	PH3 valve closed
10/26/2011	11:23:41 AM	SiCl4 pre valve closed
10/26/2011	11:23:41 AM	SiCl4 post valve closed
10/26/2011	11:23:41 AM	Bypass valve closed
10/26/2011	11:23:41 AM	Bubbler valve closed
10/26/2011	11:23:41 AM	Helium valve opened
10/26/2011	11:23:41 AM	Main Vac valve opened
10/26/2011	11:23:41 AM	Helium MFC set to  20.000000
10/26/2011	11:23:41 AM	H2 MFC set to  0.000000
10/26/2011	11:23:41 AM	BCl3 MFC set to  0.000000
10/26/2011	11:23:41 AM	PHl3 MFC set to  0.000000
10/26/2011	11:23:41 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:23:41 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:23:42 AM	Tube furnace set to 150
10/26/2011	11:24:12 AM	Helium valve closed
10/26/2011	11:24:12 AM	H2 valve closed
10/26/2011	11:24:12 AM	BCl3 valve closed
10/26/2011	11:24:12 AM	PH3 valve closed
10/26/2011	11:24:12 AM	SiCl4 pre valve closed
10/26/2011	11:24:12 AM	SiCl4 post valve closed
10/26/2011	11:24:12 AM	Bypass valve closed
10/26/2011	11:24:12 AM	Bubbler valve closed
10/26/2011	11:24:12 AM	Main Vac valve opened
10/26/2011	11:24:12 AM	Helium MFC set to  0.000000
10/26/2011	11:24:12 AM	H2 MFC set to  0.000000
10/26/2011	11:24:12 AM	BCl3 MFC set to  0.000000
10/26/2011	11:24:12 AM	PHl3 MFC set to  0.000000
10/26/2011	11:24:12 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:24:12 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:24:12 AM	Tube furnace set to 150
10/26/2011	11:24:13 AM	Run finished at 11:24 AM
10/26/2011	11:25:50 AM	Recipe started at 11:25 AM
10/26/2011	11:25:50 AM	Helium valve closed
10/26/2011	11:25:50 AM	H2 valve closed
10/26/2011	11:25:50 AM	BCl3 valve closed
10/26/2011	11:25:50 AM	PH3 valve closed
10/26/2011	11:25:50 AM	SiCl4 pre valve closed
10/26/2011	11:25:50 AM	SiCl4 post valve closed
10/26/2011	11:25:50 AM	Bypass valve closed
10/26/2011	11:25:50 AM	Bubbler valve closed
10/26/2011	11:25:50 AM	Main Vac valve opened
10/26/2011	11:25:50 AM	Helium MFC set to  0.000000
10/26/2011	11:25:50 AM	H2 MFC set to  0.000000
10/26/2011	11:25:50 AM	BCl3 MFC set to  0.000000
10/26/2011	11:25:50 AM	PHl3 MFC set to  0.000000
10/26/2011	11:25:50 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:25:50 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:25:51 AM	Tube furnace set to 150
10/26/2011	11:26:00 AM	H2 valve closed
10/26/2011	11:26:00 AM	BCl3 valve closed
10/26/2011	11:26:00 AM	PH3 valve closed
10/26/2011	11:26:00 AM	SiCl4 pre valve closed
10/26/2011	11:26:00 AM	SiCl4 post valve closed
10/26/2011	11:26:00 AM	Bypass valve closed
10/26/2011	11:26:00 AM	Bubbler valve closed
10/26/2011	11:26:00 AM	Helium valve opened
10/26/2011	11:26:00 AM	Main Vac valve opened
10/26/2011	11:26:00 AM	Helium MFC set to  20.000000
10/26/2011	11:26:00 AM	H2 MFC set to  0.000000
10/26/2011	11:26:00 AM	BCl3 MFC set to  0.000000
10/26/2011	11:26:00 AM	PHl3 MFC set to  0.000000
10/26/2011	11:26:00 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:26:00 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:26:00 AM	Tube furnace set to 150
10/26/2011	11:26:30 AM	Helium valve closed
10/26/2011	11:26:30 AM	H2 valve closed
10/26/2011	11:26:30 AM	BCl3 valve closed
10/26/2011	11:26:30 AM	PH3 valve closed
10/26/2011	11:26:30 AM	SiCl4 pre valve closed
10/26/2011	11:26:30 AM	SiCl4 post valve closed
10/26/2011	11:26:30 AM	Bypass valve closed
10/26/2011	11:26:30 AM	Bubbler valve closed
10/26/2011	11:26:30 AM	Main Vac valve opened
10/26/2011	11:26:30 AM	Helium MFC set to  0.000000
10/26/2011	11:26:30 AM	H2 MFC set to  0.000000
10/26/2011	11:26:30 AM	BCl3 MFC set to  0.000000
10/26/2011	11:26:30 AM	PHl3 MFC set to  0.000000
10/26/2011	11:26:30 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:26:30 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:26:30 AM	Tube furnace set to 150
10/26/2011	11:27:00 AM	H2 valve closed
10/26/2011	11:27:00 AM	BCl3 valve closed
10/26/2011	11:27:00 AM	PH3 valve closed
10/26/2011	11:27:00 AM	SiCl4 pre valve closed
10/26/2011	11:27:00 AM	SiCl4 post valve closed
10/26/2011	11:27:00 AM	Bypass valve closed
10/26/2011	11:27:00 AM	Bubbler valve closed
10/26/2011	11:27:01 AM	Helium valve opened
10/26/2011	11:27:01 AM	Main Vac valve opened
10/26/2011	11:27:01 AM	Helium MFC set to  20.000000
10/26/2011	11:27:01 AM	H2 MFC set to  0.000000
10/26/2011	11:27:01 AM	BCl3 MFC set to  0.000000
10/26/2011	11:27:01 AM	PHl3 MFC set to  0.000000
10/26/2011	11:27:01 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:27:01 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:27:01 AM	Tube furnace set to 150
10/26/2011	11:27:31 AM	Helium valve closed
10/26/2011	11:27:31 AM	H2 valve closed
10/26/2011	11:27:31 AM	BCl3 valve closed
10/26/2011	11:27:31 AM	PH3 valve closed
10/26/2011	11:27:31 AM	SiCl4 pre valve closed
10/26/2011	11:27:31 AM	SiCl4 post valve closed
10/26/2011	11:27:31 AM	Bypass valve closed
10/26/2011	11:27:31 AM	Bubbler valve closed
10/26/2011	11:27:31 AM	Main Vac valve opened
10/26/2011	11:27:31 AM	Helium MFC set to  0.000000
10/26/2011	11:27:31 AM	H2 MFC set to  0.000000
10/26/2011	11:27:31 AM	BCl3 MFC set to  0.000000
10/26/2011	11:27:31 AM	PHl3 MFC set to  0.000000
10/26/2011	11:27:31 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:27:31 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:27:31 AM	Tube furnace set to 150
10/26/2011	11:28:01 AM	H2 valve closed
10/26/2011	11:28:01 AM	BCl3 valve closed
10/26/2011	11:28:01 AM	PH3 valve closed
10/26/2011	11:28:01 AM	SiCl4 pre valve closed
10/26/2011	11:28:01 AM	SiCl4 post valve closed
10/26/2011	11:28:01 AM	Bypass valve closed
10/26/2011	11:28:01 AM	Bubbler valve closed
10/26/2011	11:28:01 AM	Helium valve opened
10/26/2011	11:28:01 AM	Main Vac valve opened
10/26/2011	11:28:01 AM	Helium MFC set to  20.000000
10/26/2011	11:28:01 AM	H2 MFC set to  0.000000
10/26/2011	11:28:01 AM	BCl3 MFC set to  0.000000
10/26/2011	11:28:01 AM	PHl3 MFC set to  0.000000
10/26/2011	11:28:01 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:28:01 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:28:01 AM	Tube furnace set to 150
10/26/2011	11:28:31 AM	Helium valve closed
10/26/2011	11:28:31 AM	H2 valve closed
10/26/2011	11:28:31 AM	BCl3 valve closed
10/26/2011	11:28:31 AM	PH3 valve closed
10/26/2011	11:28:31 AM	SiCl4 pre valve closed
10/26/2011	11:28:31 AM	SiCl4 post valve closed
10/26/2011	11:28:31 AM	Bypass valve closed
10/26/2011	11:28:31 AM	Bubbler valve closed
10/26/2011	11:28:31 AM	Main Vac valve opened
10/26/2011	11:28:31 AM	Helium MFC set to  0.000000
10/26/2011	11:28:31 AM	H2 MFC set to  0.000000
10/26/2011	11:28:31 AM	BCl3 MFC set to  0.000000
10/26/2011	11:28:31 AM	PHl3 MFC set to  0.000000
10/26/2011	11:28:31 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:28:31 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:28:31 AM	Tube furnace set to 150
10/26/2011	11:29:01 AM	H2 valve closed
10/26/2011	11:29:01 AM	BCl3 valve closed
10/26/2011	11:29:01 AM	PH3 valve closed
10/26/2011	11:29:01 AM	SiCl4 pre valve closed
10/26/2011	11:29:01 AM	SiCl4 post valve closed
10/26/2011	11:29:01 AM	Bypass valve closed
10/26/2011	11:29:01 AM	Bubbler valve closed
10/26/2011	11:29:01 AM	Helium valve opened
10/26/2011	11:29:01 AM	Main Vac valve opened
10/26/2011	11:29:01 AM	Helium MFC set to  20.000000
10/26/2011	11:29:01 AM	H2 MFC set to  0.000000
10/26/2011	11:29:01 AM	BCl3 MFC set to  0.000000
10/26/2011	11:29:01 AM	PHl3 MFC set to  0.000000
10/26/2011	11:29:01 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:29:01 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:29:01 AM	Tube furnace set to 150
10/26/2011	11:29:31 AM	Helium valve closed
10/26/2011	11:29:31 AM	H2 valve closed
10/26/2011	11:29:31 AM	BCl3 valve closed
10/26/2011	11:29:31 AM	PH3 valve closed
10/26/2011	11:29:31 AM	SiCl4 pre valve closed
10/26/2011	11:29:31 AM	SiCl4 post valve closed
10/26/2011	11:29:31 AM	Bypass valve closed
10/26/2011	11:29:31 AM	Bubbler valve closed
10/26/2011	11:29:31 AM	Main Vac valve opened
10/26/2011	11:29:31 AM	Helium MFC set to  0.000000
10/26/2011	11:29:31 AM	H2 MFC set to  0.000000
10/26/2011	11:29:31 AM	BCl3 MFC set to  0.000000
10/26/2011	11:29:31 AM	PHl3 MFC set to  0.000000
10/26/2011	11:29:31 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:29:31 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:29:32 AM	Tube furnace set to 150
10/26/2011	11:30:02 AM	H2 valve closed
10/26/2011	11:30:02 AM	BCl3 valve closed
10/26/2011	11:30:02 AM	PH3 valve closed
10/26/2011	11:30:02 AM	SiCl4 pre valve closed
10/26/2011	11:30:02 AM	SiCl4 post valve closed
10/26/2011	11:30:02 AM	Bypass valve closed
10/26/2011	11:30:02 AM	Bubbler valve closed
10/26/2011	11:30:02 AM	Helium valve opened
10/26/2011	11:30:02 AM	Main Vac valve opened
10/26/2011	11:30:02 AM	Helium MFC set to  20.000000
10/26/2011	11:30:02 AM	H2 MFC set to  0.000000
10/26/2011	11:30:02 AM	BCl3 MFC set to  0.000000
10/26/2011	11:30:02 AM	PHl3 MFC set to  0.000000
10/26/2011	11:30:02 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:30:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:30:02 AM	Tube furnace set to 150
10/26/2011	11:30:32 AM	Helium valve closed
10/26/2011	11:30:32 AM	H2 valve closed
10/26/2011	11:30:32 AM	BCl3 valve closed
10/26/2011	11:30:32 AM	PH3 valve closed
10/26/2011	11:30:32 AM	SiCl4 pre valve closed
10/26/2011	11:30:32 AM	SiCl4 post valve closed
10/26/2011	11:30:32 AM	Bypass valve closed
10/26/2011	11:30:32 AM	Bubbler valve closed
10/26/2011	11:30:32 AM	Main Vac valve opened
10/26/2011	11:30:32 AM	Helium MFC set to  0.000000
10/26/2011	11:30:32 AM	H2 MFC set to  0.000000
10/26/2011	11:30:32 AM	BCl3 MFC set to  0.000000
10/26/2011	11:30:32 AM	PHl3 MFC set to  0.000000
10/26/2011	11:30:32 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:30:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:30:32 AM	Tube furnace set to 150
10/26/2011	11:31:02 AM	H2 valve closed
10/26/2011	11:31:02 AM	BCl3 valve closed
10/26/2011	11:31:02 AM	PH3 valve closed
10/26/2011	11:31:02 AM	SiCl4 pre valve closed
10/26/2011	11:31:02 AM	SiCl4 post valve closed
10/26/2011	11:31:02 AM	Bypass valve closed
10/26/2011	11:31:02 AM	Bubbler valve closed
10/26/2011	11:31:02 AM	Helium valve opened
10/26/2011	11:31:02 AM	Main Vac valve opened
10/26/2011	11:31:02 AM	Helium MFC set to  20.000000
10/26/2011	11:31:02 AM	H2 MFC set to  0.000000
10/26/2011	11:31:02 AM	BCl3 MFC set to  0.000000
10/26/2011	11:31:02 AM	PHl3 MFC set to  0.000000
10/26/2011	11:31:02 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:31:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:31:02 AM	Tube furnace set to 150
10/26/2011	11:31:32 AM	Helium valve closed
10/26/2011	11:31:32 AM	H2 valve closed
10/26/2011	11:31:32 AM	BCl3 valve closed
10/26/2011	11:31:32 AM	PH3 valve closed
10/26/2011	11:31:32 AM	SiCl4 pre valve closed
10/26/2011	11:31:32 AM	SiCl4 post valve closed
10/26/2011	11:31:32 AM	Bypass valve closed
10/26/2011	11:31:32 AM	Bubbler valve closed
10/26/2011	11:31:32 AM	Main Vac valve opened
10/26/2011	11:31:32 AM	Helium MFC set to  0.000000
10/26/2011	11:31:32 AM	H2 MFC set to  0.000000
10/26/2011	11:31:32 AM	BCl3 MFC set to  0.000000
10/26/2011	11:31:32 AM	PHl3 MFC set to  0.000000
10/26/2011	11:31:32 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:31:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:31:32 AM	Tube furnace set to 150
10/26/2011	11:32:02 AM	H2 valve closed
10/26/2011	11:32:02 AM	BCl3 valve closed
10/26/2011	11:32:02 AM	PH3 valve closed
10/26/2011	11:32:02 AM	SiCl4 pre valve closed
10/26/2011	11:32:02 AM	SiCl4 post valve closed
10/26/2011	11:32:02 AM	Bypass valve closed
10/26/2011	11:32:02 AM	Bubbler valve closed
10/26/2011	11:32:02 AM	Helium valve opened
10/26/2011	11:32:02 AM	Main Vac valve opened
10/26/2011	11:32:02 AM	Helium MFC set to  20.000000
10/26/2011	11:32:02 AM	H2 MFC set to  0.000000
10/26/2011	11:32:02 AM	BCl3 MFC set to  0.000000
10/26/2011	11:32:02 AM	PHl3 MFC set to  0.000000
10/26/2011	11:32:02 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:32:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:32:03 AM	Tube furnace set to 150
10/26/2011	11:32:33 AM	Helium valve closed
10/26/2011	11:32:33 AM	H2 valve closed
10/26/2011	11:32:33 AM	BCl3 valve closed
10/26/2011	11:32:33 AM	PH3 valve closed
10/26/2011	11:32:33 AM	SiCl4 pre valve closed
10/26/2011	11:32:33 AM	SiCl4 post valve closed
10/26/2011	11:32:33 AM	Bypass valve closed
10/26/2011	11:32:33 AM	Bubbler valve closed
10/26/2011	11:32:33 AM	Main Vac valve opened
10/26/2011	11:32:33 AM	Helium MFC set to  0.000000
10/26/2011	11:32:33 AM	H2 MFC set to  0.000000
10/26/2011	11:32:33 AM	BCl3 MFC set to  0.000000
10/26/2011	11:32:33 AM	PHl3 MFC set to  0.000000
10/26/2011	11:32:33 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:32:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:32:33 AM	Tube furnace set to 150
10/26/2011	11:33:03 AM	H2 valve closed
10/26/2011	11:33:03 AM	BCl3 valve closed
10/26/2011	11:33:03 AM	PH3 valve closed
10/26/2011	11:33:03 AM	SiCl4 pre valve closed
10/26/2011	11:33:03 AM	SiCl4 post valve closed
10/26/2011	11:33:03 AM	Bypass valve closed
10/26/2011	11:33:03 AM	Bubbler valve closed
10/26/2011	11:33:03 AM	Helium valve opened
10/26/2011	11:33:03 AM	Main Vac valve opened
10/26/2011	11:33:03 AM	Helium MFC set to  20.000000
10/26/2011	11:33:03 AM	H2 MFC set to  0.000000
10/26/2011	11:33:03 AM	BCl3 MFC set to  0.000000
10/26/2011	11:33:03 AM	PHl3 MFC set to  0.000000
10/26/2011	11:33:03 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:33:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:33:03 AM	Tube furnace set to 150
10/26/2011	11:33:33 AM	Helium valve closed
10/26/2011	11:33:33 AM	H2 valve closed
10/26/2011	11:33:33 AM	BCl3 valve closed
10/26/2011	11:33:33 AM	PH3 valve closed
10/26/2011	11:33:33 AM	SiCl4 pre valve closed
10/26/2011	11:33:33 AM	SiCl4 post valve closed
10/26/2011	11:33:33 AM	Bypass valve closed
10/26/2011	11:33:33 AM	Bubbler valve closed
10/26/2011	11:33:33 AM	Main Vac valve opened
10/26/2011	11:33:33 AM	Helium MFC set to  0.000000
10/26/2011	11:33:33 AM	H2 MFC set to  0.000000
10/26/2011	11:33:33 AM	BCl3 MFC set to  0.000000
10/26/2011	11:33:33 AM	PHl3 MFC set to  0.000000
10/26/2011	11:33:33 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:33:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:33:33 AM	Tube furnace set to 150
10/26/2011	11:34:03 AM	H2 valve closed
10/26/2011	11:34:03 AM	BCl3 valve closed
10/26/2011	11:34:03 AM	PH3 valve closed
10/26/2011	11:34:03 AM	SiCl4 pre valve closed
10/26/2011	11:34:03 AM	SiCl4 post valve closed
10/26/2011	11:34:03 AM	Bypass valve closed
10/26/2011	11:34:03 AM	Bubbler valve closed
10/26/2011	11:34:03 AM	Helium valve opened
10/26/2011	11:34:03 AM	Main Vac valve opened
10/26/2011	11:34:03 AM	Helium MFC set to  20.000000
10/26/2011	11:34:03 AM	H2 MFC set to  0.000000
10/26/2011	11:34:03 AM	BCl3 MFC set to  0.000000
10/26/2011	11:34:03 AM	PHl3 MFC set to  0.000000
10/26/2011	11:34:03 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:34:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:34:03 AM	Tube furnace set to 150
10/26/2011	11:34:33 AM	Helium valve closed
10/26/2011	11:34:33 AM	H2 valve closed
10/26/2011	11:34:33 AM	BCl3 valve closed
10/26/2011	11:34:33 AM	PH3 valve closed
10/26/2011	11:34:33 AM	SiCl4 pre valve closed
10/26/2011	11:34:33 AM	SiCl4 post valve closed
10/26/2011	11:34:33 AM	Bypass valve closed
10/26/2011	11:34:33 AM	Bubbler valve closed
10/26/2011	11:34:33 AM	Main Vac valve opened
10/26/2011	11:34:33 AM	Helium MFC set to  0.000000
10/26/2011	11:34:33 AM	H2 MFC set to  0.000000
10/26/2011	11:34:33 AM	BCl3 MFC set to  0.000000
10/26/2011	11:34:33 AM	PHl3 MFC set to  0.000000
10/26/2011	11:34:33 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:34:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:34:34 AM	Tube furnace set to 150
10/26/2011	11:35:04 AM	H2 valve closed
10/26/2011	11:35:04 AM	BCl3 valve closed
10/26/2011	11:35:04 AM	PH3 valve closed
10/26/2011	11:35:04 AM	SiCl4 pre valve closed
10/26/2011	11:35:04 AM	SiCl4 post valve closed
10/26/2011	11:35:04 AM	Bypass valve closed
10/26/2011	11:35:04 AM	Bubbler valve closed
10/26/2011	11:35:04 AM	Helium valve opened
10/26/2011	11:35:04 AM	Main Vac valve opened
10/26/2011	11:35:04 AM	Helium MFC set to  20.000000
10/26/2011	11:35:04 AM	H2 MFC set to  0.000000
10/26/2011	11:35:04 AM	BCl3 MFC set to  0.000000
10/26/2011	11:35:04 AM	PHl3 MFC set to  0.000000
10/26/2011	11:35:04 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:35:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:35:04 AM	Tube furnace set to 150
10/26/2011	11:35:34 AM	Helium valve closed
10/26/2011	11:35:34 AM	H2 valve closed
10/26/2011	11:35:34 AM	BCl3 valve closed
10/26/2011	11:35:34 AM	PH3 valve closed
10/26/2011	11:35:34 AM	SiCl4 pre valve closed
10/26/2011	11:35:34 AM	SiCl4 post valve closed
10/26/2011	11:35:34 AM	Bypass valve closed
10/26/2011	11:35:34 AM	Bubbler valve closed
10/26/2011	11:35:34 AM	Main Vac valve opened
10/26/2011	11:35:34 AM	Helium MFC set to  0.000000
10/26/2011	11:35:34 AM	H2 MFC set to  0.000000
10/26/2011	11:35:34 AM	BCl3 MFC set to  0.000000
10/26/2011	11:35:34 AM	PHl3 MFC set to  0.000000
10/26/2011	11:35:34 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:35:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:35:34 AM	Tube furnace set to 150
10/26/2011	11:35:35 AM	Run finished at 11:35 AM
10/26/2011	11:36:26 AM	Recipe started at 11:36 AM
10/26/2011	11:36:26 AM	Helium valve closed
10/26/2011	11:36:26 AM	H2 valve closed
10/26/2011	11:36:26 AM	BCl3 valve closed
10/26/2011	11:36:26 AM	PH3 valve closed
10/26/2011	11:36:26 AM	SiCl4 pre valve closed
10/26/2011	11:36:26 AM	SiCl4 post valve closed
10/26/2011	11:36:26 AM	Bypass valve closed
10/26/2011	11:36:26 AM	Bubbler valve closed
10/26/2011	11:36:26 AM	Main Vac valve opened
10/26/2011	11:36:26 AM	Helium MFC set to  0.000000
10/26/2011	11:36:26 AM	H2 MFC set to  0.000000
10/26/2011	11:36:26 AM	BCl3 MFC set to  0.000000
10/26/2011	11:36:26 AM	PHl3 MFC set to  0.000000
10/26/2011	11:36:26 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:36:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:36:26 AM	Tube furnace set to 150
10/26/2011	11:36:56 AM	H2 valve closed
10/26/2011	11:36:56 AM	BCl3 valve closed
10/26/2011	11:36:56 AM	PH3 valve closed
10/26/2011	11:36:56 AM	SiCl4 pre valve closed
10/26/2011	11:36:56 AM	SiCl4 post valve closed
10/26/2011	11:36:56 AM	Bypass valve closed
10/26/2011	11:36:56 AM	Bubbler valve closed
10/26/2011	11:36:56 AM	Helium valve opened
10/26/2011	11:36:56 AM	Main Vac valve opened
10/26/2011	11:36:56 AM	Helium MFC set to  20.000000
10/26/2011	11:36:56 AM	H2 MFC set to  0.000000
10/26/2011	11:36:56 AM	BCl3 MFC set to  0.000000
10/26/2011	11:36:56 AM	PHl3 MFC set to  0.000000
10/26/2011	11:36:56 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:36:56 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:36:56 AM	Tube furnace set to 150
10/26/2011	11:37:26 AM	Helium valve closed
10/26/2011	11:37:26 AM	H2 valve closed
10/26/2011	11:37:26 AM	BCl3 valve closed
10/26/2011	11:37:27 AM	PH3 valve closed
10/26/2011	11:37:27 AM	SiCl4 pre valve closed
10/26/2011	11:37:27 AM	SiCl4 post valve closed
10/26/2011	11:37:27 AM	Bypass valve closed
10/26/2011	11:37:27 AM	Bubbler valve closed
10/26/2011	11:37:27 AM	Main Vac valve opened
10/26/2011	11:37:27 AM	Helium MFC set to  0.000000
10/26/2011	11:37:27 AM	H2 MFC set to  0.000000
10/26/2011	11:37:27 AM	BCl3 MFC set to  0.000000
10/26/2011	11:37:27 AM	PHl3 MFC set to  0.000000
10/26/2011	11:37:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:37:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:37:27 AM	Tube furnace set to 150
10/26/2011	11:37:57 AM	H2 valve closed
10/26/2011	11:37:57 AM	BCl3 valve closed
10/26/2011	11:37:57 AM	PH3 valve closed
10/26/2011	11:37:57 AM	SiCl4 pre valve closed
10/26/2011	11:37:57 AM	SiCl4 post valve closed
10/26/2011	11:37:57 AM	Bypass valve closed
10/26/2011	11:37:57 AM	Bubbler valve closed
10/26/2011	11:37:57 AM	Helium valve opened
10/26/2011	11:37:57 AM	Main Vac valve opened
10/26/2011	11:37:57 AM	Helium MFC set to  20.000000
10/26/2011	11:37:57 AM	H2 MFC set to  0.000000
10/26/2011	11:37:57 AM	BCl3 MFC set to  0.000000
10/26/2011	11:37:57 AM	PHl3 MFC set to  0.000000
10/26/2011	11:37:57 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:37:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:37:57 AM	Tube furnace set to 150
10/26/2011	11:38:27 AM	Helium valve closed
10/26/2011	11:38:27 AM	H2 valve closed
10/26/2011	11:38:27 AM	BCl3 valve closed
10/26/2011	11:38:27 AM	PH3 valve closed
10/26/2011	11:38:27 AM	SiCl4 pre valve closed
10/26/2011	11:38:27 AM	SiCl4 post valve closed
10/26/2011	11:38:27 AM	Bypass valve closed
10/26/2011	11:38:27 AM	Bubbler valve closed
10/26/2011	11:38:27 AM	Main Vac valve opened
10/26/2011	11:38:27 AM	Helium MFC set to  0.000000
10/26/2011	11:38:27 AM	H2 MFC set to  0.000000
10/26/2011	11:38:27 AM	BCl3 MFC set to  0.000000
10/26/2011	11:38:27 AM	PHl3 MFC set to  0.000000
10/26/2011	11:38:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:38:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:38:27 AM	Tube furnace set to 150
10/26/2011	11:38:57 AM	H2 valve closed
10/26/2011	11:38:57 AM	BCl3 valve closed
10/26/2011	11:38:57 AM	PH3 valve closed
10/26/2011	11:38:57 AM	SiCl4 pre valve closed
10/26/2011	11:38:57 AM	SiCl4 post valve closed
10/26/2011	11:38:57 AM	Bypass valve closed
10/26/2011	11:38:57 AM	Bubbler valve closed
10/26/2011	11:38:57 AM	Helium valve opened
10/26/2011	11:38:57 AM	Main Vac valve opened
10/26/2011	11:38:57 AM	Helium MFC set to  20.000000
10/26/2011	11:38:57 AM	H2 MFC set to  0.000000
10/26/2011	11:38:57 AM	BCl3 MFC set to  0.000000
10/26/2011	11:38:57 AM	PHl3 MFC set to  0.000000
10/26/2011	11:38:57 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:38:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:38:57 AM	Tube furnace set to 150
10/26/2011	11:39:27 AM	Helium valve closed
10/26/2011	11:39:27 AM	H2 valve closed
10/26/2011	11:39:27 AM	BCl3 valve closed
10/26/2011	11:39:27 AM	PH3 valve closed
10/26/2011	11:39:27 AM	SiCl4 pre valve closed
10/26/2011	11:39:27 AM	SiCl4 post valve closed
10/26/2011	11:39:27 AM	Bypass valve closed
10/26/2011	11:39:27 AM	Bubbler valve closed
10/26/2011	11:39:27 AM	Main Vac valve opened
10/26/2011	11:39:27 AM	Helium MFC set to  0.000000
10/26/2011	11:39:27 AM	H2 MFC set to  0.000000
10/26/2011	11:39:27 AM	BCl3 MFC set to  0.000000
10/26/2011	11:39:27 AM	PHl3 MFC set to  0.000000
10/26/2011	11:39:27 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:39:27 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:39:27 AM	Tube furnace set to 150
10/26/2011	11:39:57 AM	H2 valve closed
10/26/2011	11:39:57 AM	BCl3 valve closed
10/26/2011	11:39:57 AM	PH3 valve closed
10/26/2011	11:39:57 AM	SiCl4 pre valve closed
10/26/2011	11:39:57 AM	SiCl4 post valve closed
10/26/2011	11:39:57 AM	Bypass valve closed
10/26/2011	11:39:57 AM	Bubbler valve closed
10/26/2011	11:39:57 AM	Helium valve opened
10/26/2011	11:39:57 AM	Main Vac valve opened
10/26/2011	11:39:57 AM	Helium MFC set to  20.000000
10/26/2011	11:39:57 AM	H2 MFC set to  0.000000
10/26/2011	11:39:58 AM	BCl3 MFC set to  0.000000
10/26/2011	11:39:58 AM	PHl3 MFC set to  0.000000
10/26/2011	11:39:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:39:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:39:58 AM	Tube furnace set to 150
10/26/2011	11:40:28 AM	Helium valve closed
10/26/2011	11:40:28 AM	H2 valve closed
10/26/2011	11:40:28 AM	BCl3 valve closed
10/26/2011	11:40:28 AM	PH3 valve closed
10/26/2011	11:40:28 AM	SiCl4 pre valve closed
10/26/2011	11:40:28 AM	SiCl4 post valve closed
10/26/2011	11:40:28 AM	Bypass valve closed
10/26/2011	11:40:28 AM	Bubbler valve closed
10/26/2011	11:40:28 AM	Main Vac valve opened
10/26/2011	11:40:28 AM	Helium MFC set to  0.000000
10/26/2011	11:40:28 AM	H2 MFC set to  0.000000
10/26/2011	11:40:28 AM	BCl3 MFC set to  0.000000
10/26/2011	11:40:28 AM	PHl3 MFC set to  0.000000
10/26/2011	11:40:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:40:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:40:28 AM	Tube furnace set to 150
10/26/2011	11:40:58 AM	H2 valve closed
10/26/2011	11:40:58 AM	BCl3 valve closed
10/26/2011	11:40:58 AM	PH3 valve closed
10/26/2011	11:40:58 AM	SiCl4 pre valve closed
10/26/2011	11:40:58 AM	SiCl4 post valve closed
10/26/2011	11:40:58 AM	Bypass valve closed
10/26/2011	11:40:58 AM	Bubbler valve closed
10/26/2011	11:40:58 AM	Helium valve opened
10/26/2011	11:40:58 AM	Main Vac valve opened
10/26/2011	11:40:58 AM	Helium MFC set to  20.000000
10/26/2011	11:40:58 AM	H2 MFC set to  0.000000
10/26/2011	11:40:58 AM	BCl3 MFC set to  0.000000
10/26/2011	11:40:58 AM	PHl3 MFC set to  0.000000
10/26/2011	11:40:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:40:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:40:58 AM	Tube furnace set to 150
10/26/2011	11:41:28 AM	Helium valve closed
10/26/2011	11:41:28 AM	H2 valve closed
10/26/2011	11:41:28 AM	BCl3 valve closed
10/26/2011	11:41:28 AM	PH3 valve closed
10/26/2011	11:41:28 AM	SiCl4 pre valve closed
10/26/2011	11:41:28 AM	SiCl4 post valve closed
10/26/2011	11:41:28 AM	Bypass valve closed
10/26/2011	11:41:28 AM	Bubbler valve closed
10/26/2011	11:41:28 AM	Main Vac valve opened
10/26/2011	11:41:28 AM	Helium MFC set to  0.000000
10/26/2011	11:41:28 AM	H2 MFC set to  0.000000
10/26/2011	11:41:28 AM	BCl3 MFC set to  0.000000
10/26/2011	11:41:28 AM	PHl3 MFC set to  0.000000
10/26/2011	11:41:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:41:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:41:28 AM	Tube furnace set to 150
10/26/2011	11:41:58 AM	H2 valve closed
10/26/2011	11:41:58 AM	BCl3 valve closed
10/26/2011	11:41:58 AM	PH3 valve closed
10/26/2011	11:41:58 AM	SiCl4 pre valve closed
10/26/2011	11:41:58 AM	SiCl4 post valve closed
10/26/2011	11:41:58 AM	Bypass valve closed
10/26/2011	11:41:58 AM	Bubbler valve closed
10/26/2011	11:41:58 AM	Helium valve opened
10/26/2011	11:41:58 AM	Main Vac valve opened
10/26/2011	11:41:58 AM	Helium MFC set to  20.000000
10/26/2011	11:41:58 AM	H2 MFC set to  0.000000
10/26/2011	11:41:58 AM	BCl3 MFC set to  0.000000
10/26/2011	11:41:58 AM	PHl3 MFC set to  0.000000
10/26/2011	11:41:58 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:41:58 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:41:58 AM	Tube furnace set to 150
10/26/2011	11:42:28 AM	Helium valve closed
10/26/2011	11:42:28 AM	H2 valve closed
10/26/2011	11:42:28 AM	BCl3 valve closed
10/26/2011	11:42:28 AM	PH3 valve closed
10/26/2011	11:42:28 AM	SiCl4 pre valve closed
10/26/2011	11:42:28 AM	SiCl4 post valve closed
10/26/2011	11:42:28 AM	Bypass valve closed
10/26/2011	11:42:28 AM	Bubbler valve closed
10/26/2011	11:42:28 AM	Main Vac valve opened
10/26/2011	11:42:28 AM	Helium MFC set to  0.000000
10/26/2011	11:42:28 AM	H2 MFC set to  0.000000
10/26/2011	11:42:28 AM	BCl3 MFC set to  0.000000
10/26/2011	11:42:28 AM	PHl3 MFC set to  0.000000
10/26/2011	11:42:28 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:42:28 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:42:29 AM	Tube furnace set to 150
10/26/2011	11:42:59 AM	H2 valve closed
10/26/2011	11:42:59 AM	BCl3 valve closed
10/26/2011	11:42:59 AM	PH3 valve closed
10/26/2011	11:42:59 AM	SiCl4 pre valve closed
10/26/2011	11:42:59 AM	SiCl4 post valve closed
10/26/2011	11:42:59 AM	Bypass valve closed
10/26/2011	11:42:59 AM	Bubbler valve closed
10/26/2011	11:42:59 AM	Helium valve opened
10/26/2011	11:42:59 AM	Main Vac valve opened
10/26/2011	11:42:59 AM	Helium MFC set to  20.000000
10/26/2011	11:42:59 AM	H2 MFC set to  0.000000
10/26/2011	11:42:59 AM	BCl3 MFC set to  0.000000
10/26/2011	11:42:59 AM	PHl3 MFC set to  0.000000
10/26/2011	11:42:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:42:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:42:59 AM	Tube furnace set to 150
10/26/2011	11:43:29 AM	Helium valve closed
10/26/2011	11:43:29 AM	H2 valve closed
10/26/2011	11:43:29 AM	BCl3 valve closed
10/26/2011	11:43:29 AM	PH3 valve closed
10/26/2011	11:43:29 AM	SiCl4 pre valve closed
10/26/2011	11:43:29 AM	SiCl4 post valve closed
10/26/2011	11:43:29 AM	Bypass valve closed
10/26/2011	11:43:29 AM	Bubbler valve closed
10/26/2011	11:43:29 AM	Main Vac valve opened
10/26/2011	11:43:29 AM	Helium MFC set to  0.000000
10/26/2011	11:43:29 AM	H2 MFC set to  0.000000
10/26/2011	11:43:29 AM	BCl3 MFC set to  0.000000
10/26/2011	11:43:29 AM	PHl3 MFC set to  0.000000
10/26/2011	11:43:29 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:43:29 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:43:29 AM	Tube furnace set to 150
10/26/2011	11:43:59 AM	H2 valve closed
10/26/2011	11:43:59 AM	BCl3 valve closed
10/26/2011	11:43:59 AM	PH3 valve closed
10/26/2011	11:43:59 AM	SiCl4 pre valve closed
10/26/2011	11:43:59 AM	SiCl4 post valve closed
10/26/2011	11:43:59 AM	Bypass valve closed
10/26/2011	11:43:59 AM	Bubbler valve closed
10/26/2011	11:43:59 AM	Helium valve opened
10/26/2011	11:43:59 AM	Main Vac valve opened
10/26/2011	11:43:59 AM	Helium MFC set to  20.000000
10/26/2011	11:43:59 AM	H2 MFC set to  0.000000
10/26/2011	11:43:59 AM	BCl3 MFC set to  0.000000
10/26/2011	11:43:59 AM	PHl3 MFC set to  0.000000
10/26/2011	11:43:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:43:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:43:59 AM	Tube furnace set to 150
10/26/2011	11:44:29 AM	Helium valve closed
10/26/2011	11:44:29 AM	H2 valve closed
10/26/2011	11:44:29 AM	BCl3 valve closed
10/26/2011	11:44:29 AM	PH3 valve closed
10/26/2011	11:44:29 AM	SiCl4 pre valve closed
10/26/2011	11:44:29 AM	SiCl4 post valve closed
10/26/2011	11:44:29 AM	Bypass valve closed
10/26/2011	11:44:29 AM	Bubbler valve closed
10/26/2011	11:44:29 AM	Main Vac valve opened
10/26/2011	11:44:29 AM	Helium MFC set to  0.000000
10/26/2011	11:44:29 AM	H2 MFC set to  0.000000
10/26/2011	11:44:29 AM	BCl3 MFC set to  0.000000
10/26/2011	11:44:29 AM	PHl3 MFC set to  0.000000
10/26/2011	11:44:29 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:44:29 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:44:29 AM	Tube furnace set to 150
10/26/2011	11:44:59 AM	H2 valve closed
10/26/2011	11:44:59 AM	BCl3 valve closed
10/26/2011	11:44:59 AM	PH3 valve closed
10/26/2011	11:44:59 AM	SiCl4 pre valve closed
10/26/2011	11:44:59 AM	SiCl4 post valve closed
10/26/2011	11:44:59 AM	Bypass valve closed
10/26/2011	11:44:59 AM	Bubbler valve closed
10/26/2011	11:44:59 AM	Helium valve opened
10/26/2011	11:44:59 AM	Main Vac valve opened
10/26/2011	11:44:59 AM	Helium MFC set to  20.000000
10/26/2011	11:44:59 AM	H2 MFC set to  0.000000
10/26/2011	11:44:59 AM	BCl3 MFC set to  0.000000
10/26/2011	11:44:59 AM	PHl3 MFC set to  0.000000
10/26/2011	11:44:59 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:44:59 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:45:00 AM	Tube furnace set to 150
10/26/2011	11:45:30 AM	Helium valve closed
10/26/2011	11:45:30 AM	H2 valve closed
10/26/2011	11:45:30 AM	BCl3 valve closed
10/26/2011	11:45:30 AM	PH3 valve closed
10/26/2011	11:45:30 AM	SiCl4 pre valve closed
10/26/2011	11:45:30 AM	SiCl4 post valve closed
10/26/2011	11:45:30 AM	Bypass valve closed
10/26/2011	11:45:30 AM	Bubbler valve closed
10/26/2011	11:45:30 AM	Main Vac valve opened
10/26/2011	11:45:30 AM	Helium MFC set to  0.000000
10/26/2011	11:45:30 AM	H2 MFC set to  0.000000
10/26/2011	11:45:30 AM	BCl3 MFC set to  0.000000
10/26/2011	11:45:30 AM	PHl3 MFC set to  0.000000
10/26/2011	11:45:30 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:45:30 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:45:30 AM	Tube furnace set to 150
10/26/2011	11:46:00 AM	H2 valve closed
10/26/2011	11:46:00 AM	BCl3 valve closed
10/26/2011	11:46:00 AM	PH3 valve closed
10/26/2011	11:46:00 AM	SiCl4 pre valve closed
10/26/2011	11:46:00 AM	SiCl4 post valve closed
10/26/2011	11:46:00 AM	Bypass valve closed
10/26/2011	11:46:00 AM	Bubbler valve closed
10/26/2011	11:46:00 AM	Helium valve opened
10/26/2011	11:46:00 AM	Main Vac valve opened
10/26/2011	11:46:00 AM	Helium MFC set to  20.000000
10/26/2011	11:46:00 AM	H2 MFC set to  0.000000
10/26/2011	11:46:00 AM	BCl3 MFC set to  0.000000
10/26/2011	11:46:00 AM	PHl3 MFC set to  0.000000
10/26/2011	11:46:00 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:46:00 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:46:00 AM	Tube furnace set to 150
10/26/2011	11:46:30 AM	Helium valve closed
10/26/2011	11:46:30 AM	H2 valve closed
10/26/2011	11:46:30 AM	BCl3 valve closed
10/26/2011	11:46:30 AM	PH3 valve closed
10/26/2011	11:46:30 AM	SiCl4 pre valve closed
10/26/2011	11:46:30 AM	SiCl4 post valve closed
10/26/2011	11:46:30 AM	Bypass valve closed
10/26/2011	11:46:30 AM	Bubbler valve closed
10/26/2011	11:46:30 AM	Main Vac valve opened
10/26/2011	11:46:30 AM	Helium MFC set to  0.000000
10/26/2011	11:46:30 AM	H2 MFC set to  0.000000
10/26/2011	11:46:30 AM	BCl3 MFC set to  0.000000
10/26/2011	11:46:30 AM	PHl3 MFC set to  0.000000
10/26/2011	11:46:30 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:46:30 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:46:30 AM	Tube furnace set to 150
10/26/2011	11:46:31 AM	Run finished at 11:46 AM
10/26/2011	11:47:02 AM	Main Vac valve closed
10/26/2011	11:47:16 AM	Main Vac valve opened
10/26/2011	11:48:00 AM	Recipe started at 11:47 AM
10/26/2011	11:48:00 AM	Helium valve closed
10/26/2011	11:48:00 AM	H2 valve closed
10/26/2011	11:48:00 AM	BCl3 valve closed
10/26/2011	11:48:00 AM	PH3 valve closed
10/26/2011	11:48:00 AM	SiCl4 pre valve closed
10/26/2011	11:48:00 AM	SiCl4 post valve closed
10/26/2011	11:48:00 AM	Main Vac valve closed
10/26/2011	11:48:00 AM	Bypass valve closed
10/26/2011	11:48:00 AM	Bubbler valve closed
10/26/2011	11:48:00 AM	Helium MFC set to  0.000000
10/26/2011	11:48:00 AM	H2 MFC set to  0.000000
10/26/2011	11:48:00 AM	BCl3 MFC set to  0.000000
10/26/2011	11:48:00 AM	PHl3 MFC set to  0.000000
10/26/2011	11:48:00 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:48:00 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:48:00 AM	Tube furnace set to 0
10/26/2011	11:48:03 AM	Helium valve closed
10/26/2011	11:48:03 AM	BCl3 valve closed
10/26/2011	11:48:04 AM	PH3 valve closed
10/26/2011	11:48:04 AM	SiCl4 pre valve closed
10/26/2011	11:48:04 AM	SiCl4 post valve closed
10/26/2011	11:48:04 AM	Main Vac valve closed
10/26/2011	11:48:04 AM	Bypass valve closed
10/26/2011	11:48:04 AM	Bubbler valve closed
10/26/2011	11:48:04 AM	H2 valve opened
10/26/2011	11:48:04 AM	Helium MFC set to  0.000000
10/26/2011	11:48:04 AM	H2 MFC set to  500.000000
10/26/2011	11:48:04 AM	BCl3 MFC set to  0.000000
10/26/2011	11:48:04 AM	PHl3 MFC set to  0.000000
10/26/2011	11:48:04 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:48:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:48:04 AM	Tube furnace set to 0
10/26/2011	11:49:08 AM	Helium valve closed
10/26/2011	11:49:08 AM	BCl3 valve closed
10/26/2011	11:49:08 AM	PH3 valve closed
10/26/2011	11:49:08 AM	SiCl4 pre valve closed
10/26/2011	11:49:08 AM	SiCl4 post valve closed
10/26/2011	11:49:08 AM	Main Vac valve closed
10/26/2011	11:49:08 AM	Bypass valve closed
10/26/2011	11:49:08 AM	H2 valve opened
10/26/2011	11:49:08 AM	Bubbler valve opened
10/26/2011	11:49:08 AM	Helium MFC set to  0.000000
10/26/2011	11:49:08 AM	H2 MFC set to  500.000000
10/26/2011	11:49:08 AM	BCl3 MFC set to  0.000000
10/26/2011	11:49:08 AM	PHl3 MFC set to  0.000000
10/26/2011	11:49:08 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:49:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:49:08 AM	Tube furnace set to 0
10/26/2011	11:49:09 AM	Helium valve closed
10/26/2011	11:49:09 AM	BCl3 valve closed
10/26/2011	11:49:09 AM	PH3 valve closed
10/26/2011	11:49:09 AM	SiCl4 pre valve closed
10/26/2011	11:49:09 AM	SiCl4 post valve closed
10/26/2011	11:49:09 AM	Main Vac valve closed
10/26/2011	11:49:09 AM	Bypass valve closed
10/26/2011	11:49:09 AM	H2 valve opened
10/26/2011	11:49:09 AM	Bubbler valve opened
10/26/2011	11:49:09 AM	Helium MFC set to  0.000000
10/26/2011	11:49:09 AM	H2 MFC set to  500.000000
10/26/2011	11:49:09 AM	BCl3 MFC set to  0.000000
10/26/2011	11:49:09 AM	PHl3 MFC set to  0.000000
10/26/2011	11:49:09 AM	SiCl4 MFC set to  0.000000
10/26/2011	11:49:09 AM	Bypass solenoid MFC set to  0.000000
10/26/2011	11:49:09 AM	Tube furnace set to 1048
10/26/2011	12:19:09 PM	Helium valve closed
10/26/2011	12:19:09 PM	PH3 valve closed
10/26/2011	12:19:09 PM	Main Vac valve closed
10/26/2011	12:19:09 PM	Bypass valve closed
10/26/2011	12:19:09 PM	H2 valve opened
10/26/2011	12:19:09 PM	BCl3 valve opened
10/26/2011	12:19:09 PM	SiCl4 pre valve opened
10/26/2011	12:19:09 PM	SiCl4 post valve opened
10/26/2011	12:19:09 PM	Bubbler valve opened
10/26/2011	12:19:09 PM	Helium MFC set to  0.000000
10/26/2011	12:19:09 PM	H2 MFC set to  500.000000
10/26/2011	12:19:09 PM	BCl3 MFC set to  2.000000
10/26/2011	12:19:09 PM	PHl3 MFC set to  0.000000
10/26/2011	12:19:09 PM	SiCl4 MFC set to  50.000000
10/26/2011	12:19:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:19:09 PM	Tube furnace set to 1048
10/26/2011	12:44:09 PM	Helium valve closed
10/26/2011	12:44:09 PM	BCl3 valve closed
10/26/2011	12:44:09 PM	PH3 valve closed
10/26/2011	12:44:09 PM	SiCl4 pre valve closed
10/26/2011	12:44:09 PM	SiCl4 post valve closed
10/26/2011	12:44:09 PM	Main Vac valve closed
10/26/2011	12:44:09 PM	Bypass valve closed
10/26/2011	12:44:09 PM	H2 valve opened
10/26/2011	12:44:09 PM	Bubbler valve opened
10/26/2011	12:44:09 PM	Helium MFC set to  0.000000
10/26/2011	12:44:09 PM	H2 MFC set to  500.000000
10/26/2011	12:44:09 PM	BCl3 MFC set to  0.000000
10/26/2011	12:44:09 PM	PHl3 MFC set to  0.000000
10/26/2011	12:44:09 PM	SiCl4 MFC set to  0.000000
10/26/2011	12:44:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:44:10 PM	Tube furnace set to 750
10/26/2011	12:54:10 PM	H2 valve closed
10/26/2011	12:54:10 PM	BCl3 valve closed
10/26/2011	12:54:10 PM	PH3 valve closed
10/26/2011	12:54:10 PM	SiCl4 pre valve closed
10/26/2011	12:54:10 PM	SiCl4 post valve closed
10/26/2011	12:54:10 PM	Main Vac valve closed
10/26/2011	12:54:10 PM	Bypass valve closed
10/26/2011	12:54:10 PM	Helium valve opened
10/26/2011	12:54:10 PM	Bubbler valve opened
10/26/2011	12:54:10 PM	Helium MFC set to  500.000000
10/26/2011	12:54:10 PM	H2 MFC set to  0.000000
10/26/2011	12:54:10 PM	BCl3 MFC set to  0.000000
10/26/2011	12:54:10 PM	PHl3 MFC set to  0.000000
10/26/2011	12:54:10 PM	SiCl4 MFC set to  0.000000
10/26/2011	12:54:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	12:54:10 PM	Tube furnace set to 0
10/26/2011	1:14:10 PM	Helium valve closed
10/26/2011	1:14:10 PM	H2 valve closed
10/26/2011	1:14:10 PM	BCl3 valve closed
10/26/2011	1:14:10 PM	PH3 valve closed
10/26/2011	1:14:10 PM	SiCl4 pre valve closed
10/26/2011	1:14:10 PM	SiCl4 post valve closed
10/26/2011	1:14:10 PM	Main Vac valve closed
10/26/2011	1:14:10 PM	Bypass valve closed
10/26/2011	1:14:10 PM	Bubbler valve closed
10/26/2011	1:14:10 PM	Helium MFC set to  0.000000
10/26/2011	1:14:10 PM	H2 MFC set to  0.000000
10/26/2011	1:14:10 PM	BCl3 MFC set to  0.000000
10/26/2011	1:14:10 PM	PHl3 MFC set to  0.000000
10/26/2011	1:14:10 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:14:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:14:10 PM	Tube furnace set to 0
10/26/2011	1:14:11 PM	Run finished at 1:14 PM
10/26/2011	1:31:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	1:31:00 PM	Recipe started at 1:31 PM
10/26/2011	1:31:00 PM	Helium valve closed
10/26/2011	1:31:00 PM	H2 valve closed
10/26/2011	1:31:00 PM	BCl3 valve closed
10/26/2011	1:31:00 PM	PH3 valve closed
10/26/2011	1:31:00 PM	SiCl4 pre valve closed
10/26/2011	1:31:00 PM	SiCl4 post valve closed
10/26/2011	1:31:00 PM	Main Vac valve closed
10/26/2011	1:31:00 PM	Bypass valve closed
10/26/2011	1:31:00 PM	Bubbler valve closed
10/26/2011	1:31:00 PM	Helium MFC set to  0.000000
10/26/2011	1:31:00 PM	H2 MFC set to  0.000000
10/26/2011	1:31:00 PM	BCl3 MFC set to  0.000000
10/26/2011	1:31:00 PM	PHl3 MFC set to  0.000000
10/26/2011	1:31:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:31:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:31:01 PM	Tube furnace set to 0
10/26/2011	1:31:04 PM	H2 valve closed
10/26/2011	1:31:04 PM	BCl3 valve closed
10/26/2011	1:31:04 PM	PH3 valve closed
10/26/2011	1:31:04 PM	SiCl4 pre valve closed
10/26/2011	1:31:04 PM	SiCl4 post valve closed
10/26/2011	1:31:04 PM	Main Vac valve closed
10/26/2011	1:31:04 PM	Bypass valve closed
10/26/2011	1:31:04 PM	Bubbler valve closed
10/26/2011	1:31:04 PM	Helium valve opened
10/26/2011	1:31:04 PM	Helium MFC set to  500.000000
10/26/2011	1:31:04 PM	H2 MFC set to  0.000000
10/26/2011	1:31:04 PM	BCl3 MFC set to  0.000000
10/26/2011	1:31:04 PM	PHl3 MFC set to  0.000000
10/26/2011	1:31:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:31:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:31:04 PM	Tube furnace set to 0
10/26/2011	1:31:04 PM	Helium valve closed
10/26/2011	1:31:04 PM	H2 valve closed
10/26/2011	1:31:04 PM	BCl3 valve closed
10/26/2011	1:31:04 PM	PH3 valve closed
10/26/2011	1:31:04 PM	SiCl4 pre valve closed
10/26/2011	1:31:04 PM	SiCl4 post valve closed
10/26/2011	1:31:04 PM	Main Vac valve closed
10/26/2011	1:31:04 PM	Bypass valve closed
10/26/2011	1:31:04 PM	Bubbler valve closed
10/26/2011	1:31:04 PM	Helium MFC set to  0.000000
10/26/2011	1:31:04 PM	H2 MFC set to  0.000000
10/26/2011	1:31:04 PM	BCl3 MFC set to  0.000000
10/26/2011	1:31:04 PM	PHl3 MFC set to  0.000000
10/26/2011	1:31:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:31:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:31:04 PM	Tube furnace set to 0
10/26/2011	1:31:05 PM	Run finished at 1:31 PM
10/26/2011	1:31:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	1:41:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	1:41:50 PM	Recipe started at 1:41 PM
10/26/2011	1:41:50 PM	Helium valve closed
10/26/2011	1:41:50 PM	H2 valve closed
10/26/2011	1:41:50 PM	BCl3 valve closed
10/26/2011	1:41:50 PM	PH3 valve closed
10/26/2011	1:41:50 PM	SiCl4 pre valve closed
10/26/2011	1:41:50 PM	SiCl4 post valve closed
10/26/2011	1:41:50 PM	Main Vac valve closed
10/26/2011	1:41:50 PM	Bubbler valve closed
10/26/2011	1:41:50 PM	Bypass valve opened
10/26/2011	1:41:50 PM	Helium MFC set to  0.000000
10/26/2011	1:41:50 PM	H2 MFC set to  0.000000
10/26/2011	1:41:50 PM	BCl3 MFC set to  0.000000
10/26/2011	1:41:50 PM	PHl3 MFC set to  0.000000
10/26/2011	1:41:50 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:41:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:41:50 PM	Tube furnace set to 0
10/26/2011	1:42:57 PM	Helium valve closed
10/26/2011	1:42:57 PM	H2 valve closed
10/26/2011	1:42:57 PM	BCl3 valve closed
10/26/2011	1:42:57 PM	PH3 valve closed
10/26/2011	1:42:57 PM	SiCl4 pre valve closed
10/26/2011	1:42:57 PM	SiCl4 post valve closed
10/26/2011	1:42:57 PM	Main Vac valve closed
10/26/2011	1:42:57 PM	Bubbler valve closed
10/26/2011	1:42:57 PM	Bypass valve opened
10/26/2011	1:42:57 PM	Helium MFC set to  0.000000
10/26/2011	1:42:57 PM	H2 MFC set to  0.000000
10/26/2011	1:42:57 PM	BCl3 MFC set to  0.000000
10/26/2011	1:42:57 PM	PHl3 MFC set to  0.000000
10/26/2011	1:42:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:42:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:42:58 PM	Tube furnace set to 0
10/26/2011	1:43:58 PM	Helium valve closed
10/26/2011	1:43:58 PM	H2 valve closed
10/26/2011	1:43:58 PM	BCl3 valve closed
10/26/2011	1:43:58 PM	PH3 valve closed
10/26/2011	1:43:58 PM	SiCl4 pre valve closed
10/26/2011	1:43:58 PM	SiCl4 post valve closed
10/26/2011	1:43:58 PM	Bypass valve closed
10/26/2011	1:43:58 PM	Bubbler valve closed
10/26/2011	1:43:58 PM	Main Vac valve opened
10/26/2011	1:43:58 PM	Helium MFC set to  0.000000
10/26/2011	1:43:58 PM	H2 MFC set to  0.000000
10/26/2011	1:43:58 PM	BCl3 MFC set to  0.000000
10/26/2011	1:43:58 PM	PHl3 MFC set to  0.000000
10/26/2011	1:43:58 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:43:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:43:58 PM	Tube furnace set to 0
10/26/2011	1:43:59 PM	Run finished at 1:43 PM
10/26/2011	1:43:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	1:49:22 PM	Recipe started at 1:49 PM
10/26/2011	1:49:22 PM	Helium valve closed
10/26/2011	1:49:22 PM	H2 valve closed
10/26/2011	1:49:22 PM	BCl3 valve closed
10/26/2011	1:49:22 PM	PH3 valve closed
10/26/2011	1:49:22 PM	SiCl4 pre valve closed
10/26/2011	1:49:22 PM	SiCl4 post valve closed
10/26/2011	1:49:22 PM	Bypass valve closed
10/26/2011	1:49:22 PM	Bubbler valve closed
10/26/2011	1:49:22 PM	Main Vac valve opened
10/26/2011	1:49:22 PM	Helium MFC set to  0.000000
10/26/2011	1:49:22 PM	H2 MFC set to  0.000000
10/26/2011	1:49:22 PM	BCl3 MFC set to  0.000000
10/26/2011	1:49:22 PM	PHl3 MFC set to  0.000000
10/26/2011	1:49:22 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:49:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:49:22 PM	Tube furnace set to 150
10/26/2011	1:49:52 PM	H2 valve closed
10/26/2011	1:49:52 PM	BCl3 valve closed
10/26/2011	1:49:52 PM	PH3 valve closed
10/26/2011	1:49:52 PM	SiCl4 pre valve closed
10/26/2011	1:49:52 PM	SiCl4 post valve closed
10/26/2011	1:49:52 PM	Bypass valve closed
10/26/2011	1:49:52 PM	Bubbler valve closed
10/26/2011	1:49:52 PM	Helium valve opened
10/26/2011	1:49:52 PM	Main Vac valve opened
10/26/2011	1:49:52 PM	Helium MFC set to  20.000000
10/26/2011	1:49:52 PM	H2 MFC set to  0.000000
10/26/2011	1:49:52 PM	BCl3 MFC set to  0.000000
10/26/2011	1:49:52 PM	PHl3 MFC set to  0.000000
10/26/2011	1:49:52 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:49:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:49:53 PM	Tube furnace set to 150
10/26/2011	1:50:23 PM	Helium valve closed
10/26/2011	1:50:23 PM	H2 valve closed
10/26/2011	1:50:23 PM	BCl3 valve closed
10/26/2011	1:50:23 PM	PH3 valve closed
10/26/2011	1:50:23 PM	SiCl4 pre valve closed
10/26/2011	1:50:23 PM	SiCl4 post valve closed
10/26/2011	1:50:23 PM	Bypass valve closed
10/26/2011	1:50:23 PM	Bubbler valve closed
10/26/2011	1:50:23 PM	Main Vac valve opened
10/26/2011	1:50:23 PM	Helium MFC set to  0.000000
10/26/2011	1:50:23 PM	H2 MFC set to  0.000000
10/26/2011	1:50:23 PM	BCl3 MFC set to  0.000000
10/26/2011	1:50:23 PM	PHl3 MFC set to  0.000000
10/26/2011	1:50:23 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:50:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:50:23 PM	Tube furnace set to 150
10/26/2011	1:50:53 PM	H2 valve closed
10/26/2011	1:50:53 PM	BCl3 valve closed
10/26/2011	1:50:53 PM	PH3 valve closed
10/26/2011	1:50:53 PM	SiCl4 pre valve closed
10/26/2011	1:50:53 PM	SiCl4 post valve closed
10/26/2011	1:50:53 PM	Bypass valve closed
10/26/2011	1:50:53 PM	Bubbler valve closed
10/26/2011	1:50:53 PM	Helium valve opened
10/26/2011	1:50:53 PM	Main Vac valve opened
10/26/2011	1:50:53 PM	Helium MFC set to  20.000000
10/26/2011	1:50:53 PM	H2 MFC set to  0.000000
10/26/2011	1:50:53 PM	BCl3 MFC set to  0.000000
10/26/2011	1:50:53 PM	PHl3 MFC set to  0.000000
10/26/2011	1:50:53 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:50:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:50:53 PM	Tube furnace set to 150
10/26/2011	1:51:23 PM	Helium valve closed
10/26/2011	1:51:23 PM	H2 valve closed
10/26/2011	1:51:23 PM	BCl3 valve closed
10/26/2011	1:51:23 PM	PH3 valve closed
10/26/2011	1:51:23 PM	SiCl4 pre valve closed
10/26/2011	1:51:23 PM	SiCl4 post valve closed
10/26/2011	1:51:23 PM	Bypass valve closed
10/26/2011	1:51:23 PM	Bubbler valve closed
10/26/2011	1:51:23 PM	Main Vac valve opened
10/26/2011	1:51:23 PM	Helium MFC set to  0.000000
10/26/2011	1:51:23 PM	H2 MFC set to  0.000000
10/26/2011	1:51:23 PM	BCl3 MFC set to  0.000000
10/26/2011	1:51:23 PM	PHl3 MFC set to  0.000000
10/26/2011	1:51:23 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:51:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:51:23 PM	Tube furnace set to 150
10/26/2011	1:51:53 PM	H2 valve closed
10/26/2011	1:51:53 PM	BCl3 valve closed
10/26/2011	1:51:53 PM	PH3 valve closed
10/26/2011	1:51:53 PM	SiCl4 pre valve closed
10/26/2011	1:51:53 PM	SiCl4 post valve closed
10/26/2011	1:51:53 PM	Bypass valve closed
10/26/2011	1:51:53 PM	Bubbler valve closed
10/26/2011	1:51:53 PM	Helium valve opened
10/26/2011	1:51:53 PM	Main Vac valve opened
10/26/2011	1:51:53 PM	Helium MFC set to  20.000000
10/26/2011	1:51:53 PM	H2 MFC set to  0.000000
10/26/2011	1:51:53 PM	BCl3 MFC set to  0.000000
10/26/2011	1:51:53 PM	PHl3 MFC set to  0.000000
10/26/2011	1:51:53 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:51:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:51:54 PM	Tube furnace set to 150
10/26/2011	1:52:24 PM	Helium valve closed
10/26/2011	1:52:24 PM	H2 valve closed
10/26/2011	1:52:24 PM	BCl3 valve closed
10/26/2011	1:52:24 PM	PH3 valve closed
10/26/2011	1:52:24 PM	SiCl4 pre valve closed
10/26/2011	1:52:24 PM	SiCl4 post valve closed
10/26/2011	1:52:24 PM	Bypass valve closed
10/26/2011	1:52:24 PM	Bubbler valve closed
10/26/2011	1:52:24 PM	Main Vac valve opened
10/26/2011	1:52:24 PM	Helium MFC set to  0.000000
10/26/2011	1:52:24 PM	H2 MFC set to  0.000000
10/26/2011	1:52:24 PM	BCl3 MFC set to  0.000000
10/26/2011	1:52:24 PM	PHl3 MFC set to  0.000000
10/26/2011	1:52:24 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:52:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:52:24 PM	Tube furnace set to 150
10/26/2011	1:52:54 PM	H2 valve closed
10/26/2011	1:52:54 PM	BCl3 valve closed
10/26/2011	1:52:54 PM	PH3 valve closed
10/26/2011	1:52:54 PM	SiCl4 pre valve closed
10/26/2011	1:52:54 PM	SiCl4 post valve closed
10/26/2011	1:52:54 PM	Bypass valve closed
10/26/2011	1:52:54 PM	Bubbler valve closed
10/26/2011	1:52:54 PM	Helium valve opened
10/26/2011	1:52:54 PM	Main Vac valve opened
10/26/2011	1:52:54 PM	Helium MFC set to  20.000000
10/26/2011	1:52:54 PM	H2 MFC set to  0.000000
10/26/2011	1:52:54 PM	BCl3 MFC set to  0.000000
10/26/2011	1:52:54 PM	PHl3 MFC set to  0.000000
10/26/2011	1:52:54 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:52:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:52:54 PM	Tube furnace set to 150
10/26/2011	1:53:24 PM	Helium valve closed
10/26/2011	1:53:24 PM	H2 valve closed
10/26/2011	1:53:24 PM	BCl3 valve closed
10/26/2011	1:53:24 PM	PH3 valve closed
10/26/2011	1:53:24 PM	SiCl4 pre valve closed
10/26/2011	1:53:24 PM	SiCl4 post valve closed
10/26/2011	1:53:24 PM	Bypass valve closed
10/26/2011	1:53:24 PM	Bubbler valve closed
10/26/2011	1:53:24 PM	Main Vac valve opened
10/26/2011	1:53:24 PM	Helium MFC set to  0.000000
10/26/2011	1:53:24 PM	H2 MFC set to  0.000000
10/26/2011	1:53:24 PM	BCl3 MFC set to  0.000000
10/26/2011	1:53:24 PM	PHl3 MFC set to  0.000000
10/26/2011	1:53:24 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:53:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:53:24 PM	Tube furnace set to 150
10/26/2011	1:53:54 PM	H2 valve closed
10/26/2011	1:53:54 PM	BCl3 valve closed
10/26/2011	1:53:54 PM	PH3 valve closed
10/26/2011	1:53:54 PM	SiCl4 pre valve closed
10/26/2011	1:53:54 PM	SiCl4 post valve closed
10/26/2011	1:53:54 PM	Bypass valve closed
10/26/2011	1:53:54 PM	Bubbler valve closed
10/26/2011	1:53:54 PM	Helium valve opened
10/26/2011	1:53:54 PM	Main Vac valve opened
10/26/2011	1:53:54 PM	Helium MFC set to  20.000000
10/26/2011	1:53:54 PM	H2 MFC set to  0.000000
10/26/2011	1:53:54 PM	BCl3 MFC set to  0.000000
10/26/2011	1:53:54 PM	PHl3 MFC set to  0.000000
10/26/2011	1:53:54 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:53:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:53:54 PM	Tube furnace set to 150
10/26/2011	1:54:24 PM	Helium valve closed
10/26/2011	1:54:24 PM	H2 valve closed
10/26/2011	1:54:24 PM	BCl3 valve closed
10/26/2011	1:54:24 PM	PH3 valve closed
10/26/2011	1:54:24 PM	SiCl4 pre valve closed
10/26/2011	1:54:24 PM	SiCl4 post valve closed
10/26/2011	1:54:24 PM	Bypass valve closed
10/26/2011	1:54:24 PM	Bubbler valve closed
10/26/2011	1:54:24 PM	Main Vac valve opened
10/26/2011	1:54:24 PM	Helium MFC set to  0.000000
10/26/2011	1:54:24 PM	H2 MFC set to  0.000000
10/26/2011	1:54:24 PM	BCl3 MFC set to  0.000000
10/26/2011	1:54:24 PM	PHl3 MFC set to  0.000000
10/26/2011	1:54:24 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:54:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:54:25 PM	Tube furnace set to 150
10/26/2011	1:54:55 PM	H2 valve closed
10/26/2011	1:54:55 PM	BCl3 valve closed
10/26/2011	1:54:55 PM	PH3 valve closed
10/26/2011	1:54:55 PM	SiCl4 pre valve closed
10/26/2011	1:54:55 PM	SiCl4 post valve closed
10/26/2011	1:54:55 PM	Bypass valve closed
10/26/2011	1:54:55 PM	Bubbler valve closed
10/26/2011	1:54:55 PM	Helium valve opened
10/26/2011	1:54:55 PM	Main Vac valve opened
10/26/2011	1:54:55 PM	Helium MFC set to  20.000000
10/26/2011	1:54:55 PM	H2 MFC set to  0.000000
10/26/2011	1:54:55 PM	BCl3 MFC set to  0.000000
10/26/2011	1:54:55 PM	PHl3 MFC set to  0.000000
10/26/2011	1:54:55 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:54:55 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:54:55 PM	Tube furnace set to 150
10/26/2011	1:55:25 PM	Helium valve closed
10/26/2011	1:55:25 PM	H2 valve closed
10/26/2011	1:55:25 PM	BCl3 valve closed
10/26/2011	1:55:25 PM	PH3 valve closed
10/26/2011	1:55:25 PM	SiCl4 pre valve closed
10/26/2011	1:55:25 PM	SiCl4 post valve closed
10/26/2011	1:55:25 PM	Bypass valve closed
10/26/2011	1:55:25 PM	Bubbler valve closed
10/26/2011	1:55:25 PM	Main Vac valve opened
10/26/2011	1:55:25 PM	Helium MFC set to  0.000000
10/26/2011	1:55:25 PM	H2 MFC set to  0.000000
10/26/2011	1:55:25 PM	BCl3 MFC set to  0.000000
10/26/2011	1:55:25 PM	PHl3 MFC set to  0.000000
10/26/2011	1:55:25 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:55:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:55:25 PM	Tube furnace set to 150
10/26/2011	1:55:55 PM	H2 valve closed
10/26/2011	1:55:55 PM	BCl3 valve closed
10/26/2011	1:55:55 PM	PH3 valve closed
10/26/2011	1:55:55 PM	SiCl4 pre valve closed
10/26/2011	1:55:55 PM	SiCl4 post valve closed
10/26/2011	1:55:55 PM	Bypass valve closed
10/26/2011	1:55:55 PM	Bubbler valve closed
10/26/2011	1:55:55 PM	Helium valve opened
10/26/2011	1:55:55 PM	Main Vac valve opened
10/26/2011	1:55:55 PM	Helium MFC set to  20.000000
10/26/2011	1:55:55 PM	H2 MFC set to  0.000000
10/26/2011	1:55:55 PM	BCl3 MFC set to  0.000000
10/26/2011	1:55:55 PM	PHl3 MFC set to  0.000000
10/26/2011	1:55:55 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:55:55 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:55:55 PM	Tube furnace set to 150
10/26/2011	1:56:25 PM	Helium valve closed
10/26/2011	1:56:25 PM	H2 valve closed
10/26/2011	1:56:25 PM	BCl3 valve closed
10/26/2011	1:56:25 PM	PH3 valve closed
10/26/2011	1:56:25 PM	SiCl4 pre valve closed
10/26/2011	1:56:25 PM	SiCl4 post valve closed
10/26/2011	1:56:25 PM	Bypass valve closed
10/26/2011	1:56:25 PM	Bubbler valve closed
10/26/2011	1:56:25 PM	Main Vac valve opened
10/26/2011	1:56:25 PM	Helium MFC set to  0.000000
10/26/2011	1:56:25 PM	H2 MFC set to  0.000000
10/26/2011	1:56:25 PM	BCl3 MFC set to  0.000000
10/26/2011	1:56:25 PM	PHl3 MFC set to  0.000000
10/26/2011	1:56:25 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:56:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:56:25 PM	Tube furnace set to 150
10/26/2011	1:56:55 PM	H2 valve closed
10/26/2011	1:56:55 PM	BCl3 valve closed
10/26/2011	1:56:55 PM	PH3 valve closed
10/26/2011	1:56:55 PM	SiCl4 pre valve closed
10/26/2011	1:56:55 PM	SiCl4 post valve closed
10/26/2011	1:56:55 PM	Bypass valve closed
10/26/2011	1:56:55 PM	Bubbler valve closed
10/26/2011	1:56:55 PM	Helium valve opened
10/26/2011	1:56:55 PM	Main Vac valve opened
10/26/2011	1:56:55 PM	Helium MFC set to  20.000000
10/26/2011	1:56:55 PM	H2 MFC set to  0.000000
10/26/2011	1:56:55 PM	BCl3 MFC set to  0.000000
10/26/2011	1:56:55 PM	PHl3 MFC set to  0.000000
10/26/2011	1:56:55 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:56:55 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:56:56 PM	Tube furnace set to 150
10/26/2011	1:57:26 PM	Helium valve closed
10/26/2011	1:57:26 PM	H2 valve closed
10/26/2011	1:57:26 PM	BCl3 valve closed
10/26/2011	1:57:26 PM	PH3 valve closed
10/26/2011	1:57:26 PM	SiCl4 pre valve closed
10/26/2011	1:57:26 PM	SiCl4 post valve closed
10/26/2011	1:57:26 PM	Bypass valve closed
10/26/2011	1:57:26 PM	Bubbler valve closed
10/26/2011	1:57:26 PM	Main Vac valve opened
10/26/2011	1:57:26 PM	Helium MFC set to  0.000000
10/26/2011	1:57:26 PM	H2 MFC set to  0.000000
10/26/2011	1:57:26 PM	BCl3 MFC set to  0.000000
10/26/2011	1:57:26 PM	PHl3 MFC set to  0.000000
10/26/2011	1:57:26 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:57:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:57:26 PM	Tube furnace set to 150
10/26/2011	1:57:56 PM	H2 valve closed
10/26/2011	1:57:56 PM	BCl3 valve closed
10/26/2011	1:57:56 PM	PH3 valve closed
10/26/2011	1:57:56 PM	SiCl4 pre valve closed
10/26/2011	1:57:56 PM	SiCl4 post valve closed
10/26/2011	1:57:56 PM	Bypass valve closed
10/26/2011	1:57:56 PM	Bubbler valve closed
10/26/2011	1:57:56 PM	Helium valve opened
10/26/2011	1:57:56 PM	Main Vac valve opened
10/26/2011	1:57:56 PM	Helium MFC set to  20.000000
10/26/2011	1:57:56 PM	H2 MFC set to  0.000000
10/26/2011	1:57:56 PM	BCl3 MFC set to  0.000000
10/26/2011	1:57:56 PM	PHl3 MFC set to  0.000000
10/26/2011	1:57:56 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:57:56 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:57:56 PM	Tube furnace set to 150
10/26/2011	1:58:26 PM	Helium valve closed
10/26/2011	1:58:26 PM	H2 valve closed
10/26/2011	1:58:26 PM	BCl3 valve closed
10/26/2011	1:58:26 PM	PH3 valve closed
10/26/2011	1:58:26 PM	SiCl4 pre valve closed
10/26/2011	1:58:26 PM	SiCl4 post valve closed
10/26/2011	1:58:26 PM	Bypass valve closed
10/26/2011	1:58:26 PM	Bubbler valve closed
10/26/2011	1:58:26 PM	Main Vac valve opened
10/26/2011	1:58:26 PM	Helium MFC set to  0.000000
10/26/2011	1:58:26 PM	H2 MFC set to  0.000000
10/26/2011	1:58:26 PM	BCl3 MFC set to  0.000000
10/26/2011	1:58:26 PM	PHl3 MFC set to  0.000000
10/26/2011	1:58:26 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:58:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:58:26 PM	Tube furnace set to 150
10/26/2011	1:58:56 PM	H2 valve closed
10/26/2011	1:58:56 PM	BCl3 valve closed
10/26/2011	1:58:56 PM	PH3 valve closed
10/26/2011	1:58:56 PM	SiCl4 pre valve closed
10/26/2011	1:58:56 PM	SiCl4 post valve closed
10/26/2011	1:58:56 PM	Bypass valve closed
10/26/2011	1:58:56 PM	Bubbler valve closed
10/26/2011	1:58:56 PM	Helium valve opened
10/26/2011	1:58:56 PM	Main Vac valve opened
10/26/2011	1:58:56 PM	Helium MFC set to  20.000000
10/26/2011	1:58:56 PM	H2 MFC set to  0.000000
10/26/2011	1:58:56 PM	BCl3 MFC set to  0.000000
10/26/2011	1:58:56 PM	PHl3 MFC set to  0.000000
10/26/2011	1:58:56 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:58:56 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:58:57 PM	Tube furnace set to 150
10/26/2011	1:59:27 PM	Helium valve closed
10/26/2011	1:59:27 PM	H2 valve closed
10/26/2011	1:59:27 PM	BCl3 valve closed
10/26/2011	1:59:27 PM	PH3 valve closed
10/26/2011	1:59:27 PM	SiCl4 pre valve closed
10/26/2011	1:59:27 PM	SiCl4 post valve closed
10/26/2011	1:59:27 PM	Bypass valve closed
10/26/2011	1:59:27 PM	Bubbler valve closed
10/26/2011	1:59:27 PM	Main Vac valve opened
10/26/2011	1:59:27 PM	Helium MFC set to  0.000000
10/26/2011	1:59:27 PM	H2 MFC set to  0.000000
10/26/2011	1:59:27 PM	BCl3 MFC set to  0.000000
10/26/2011	1:59:27 PM	PHl3 MFC set to  0.000000
10/26/2011	1:59:27 PM	SiCl4 MFC set to  0.000000
10/26/2011	1:59:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	1:59:27 PM	Tube furnace set to 150
10/26/2011	1:59:28 PM	Run finished at 1:59 PM
10/26/2011	3:30:31 PM	Recipe started at 3:30 PM
10/26/2011	3:30:31 PM	Helium valve closed
10/26/2011	3:30:31 PM	H2 valve closed
10/26/2011	3:30:31 PM	BCl3 valve closed
10/26/2011	3:30:31 PM	PH3 valve closed
10/26/2011	3:30:31 PM	SiCl4 pre valve closed
10/26/2011	3:30:31 PM	SiCl4 post valve closed
10/26/2011	3:30:31 PM	Bypass valve closed
10/26/2011	3:30:31 PM	Bubbler valve closed
10/26/2011	3:30:31 PM	Main Vac valve opened
10/26/2011	3:30:31 PM	Helium MFC set to  0.000000
10/26/2011	3:30:31 PM	H2 MFC set to  0.000000
10/26/2011	3:30:31 PM	BCl3 MFC set to  0.000000
10/26/2011	3:30:31 PM	PHl3 MFC set to  0.000000
10/26/2011	3:30:31 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:30:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:30:31 PM	Tube furnace set to 150
10/26/2011	3:31:01 PM	H2 valve closed
10/26/2011	3:31:01 PM	BCl3 valve closed
10/26/2011	3:31:01 PM	PH3 valve closed
10/26/2011	3:31:01 PM	SiCl4 pre valve closed
10/26/2011	3:31:01 PM	SiCl4 post valve closed
10/26/2011	3:31:01 PM	Bypass valve closed
10/26/2011	3:31:01 PM	Bubbler valve closed
10/26/2011	3:31:01 PM	Helium valve opened
10/26/2011	3:31:01 PM	Main Vac valve opened
10/26/2011	3:31:01 PM	Helium MFC set to  20.000000
10/26/2011	3:31:01 PM	H2 MFC set to  0.000000
10/26/2011	3:31:01 PM	BCl3 MFC set to  0.000000
10/26/2011	3:31:01 PM	PHl3 MFC set to  0.000000
10/26/2011	3:31:01 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:31:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:31:02 PM	Tube furnace set to 150
10/26/2011	3:31:32 PM	Helium valve closed
10/26/2011	3:31:32 PM	H2 valve closed
10/26/2011	3:31:32 PM	BCl3 valve closed
10/26/2011	3:31:32 PM	PH3 valve closed
10/26/2011	3:31:32 PM	SiCl4 pre valve closed
10/26/2011	3:31:32 PM	SiCl4 post valve closed
10/26/2011	3:31:32 PM	Bypass valve closed
10/26/2011	3:31:32 PM	Bubbler valve closed
10/26/2011	3:31:32 PM	Main Vac valve opened
10/26/2011	3:31:32 PM	Helium MFC set to  0.000000
10/26/2011	3:31:32 PM	H2 MFC set to  0.000000
10/26/2011	3:31:32 PM	BCl3 MFC set to  0.000000
10/26/2011	3:31:32 PM	PHl3 MFC set to  0.000000
10/26/2011	3:31:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:31:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:31:32 PM	Tube furnace set to 150
10/26/2011	3:32:02 PM	H2 valve closed
10/26/2011	3:32:02 PM	BCl3 valve closed
10/26/2011	3:32:02 PM	PH3 valve closed
10/26/2011	3:32:02 PM	SiCl4 pre valve closed
10/26/2011	3:32:02 PM	SiCl4 post valve closed
10/26/2011	3:32:02 PM	Bypass valve closed
10/26/2011	3:32:02 PM	Bubbler valve closed
10/26/2011	3:32:02 PM	Helium valve opened
10/26/2011	3:32:02 PM	Main Vac valve opened
10/26/2011	3:32:02 PM	Helium MFC set to  20.000000
10/26/2011	3:32:02 PM	H2 MFC set to  0.000000
10/26/2011	3:32:02 PM	BCl3 MFC set to  0.000000
10/26/2011	3:32:02 PM	PHl3 MFC set to  0.000000
10/26/2011	3:32:02 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:32:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:32:02 PM	Tube furnace set to 150
10/26/2011	3:32:32 PM	Helium valve closed
10/26/2011	3:32:32 PM	H2 valve closed
10/26/2011	3:32:32 PM	BCl3 valve closed
10/26/2011	3:32:32 PM	PH3 valve closed
10/26/2011	3:32:32 PM	SiCl4 pre valve closed
10/26/2011	3:32:32 PM	SiCl4 post valve closed
10/26/2011	3:32:32 PM	Bypass valve closed
10/26/2011	3:32:32 PM	Bubbler valve closed
10/26/2011	3:32:32 PM	Main Vac valve opened
10/26/2011	3:32:32 PM	Helium MFC set to  0.000000
10/26/2011	3:32:32 PM	H2 MFC set to  0.000000
10/26/2011	3:32:32 PM	BCl3 MFC set to  0.000000
10/26/2011	3:32:32 PM	PHl3 MFC set to  0.000000
10/26/2011	3:32:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:32:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:32:32 PM	Tube furnace set to 150
10/26/2011	3:33:02 PM	H2 valve closed
10/26/2011	3:33:02 PM	BCl3 valve closed
10/26/2011	3:33:02 PM	PH3 valve closed
10/26/2011	3:33:02 PM	SiCl4 pre valve closed
10/26/2011	3:33:02 PM	SiCl4 post valve closed
10/26/2011	3:33:02 PM	Bypass valve closed
10/26/2011	3:33:02 PM	Bubbler valve closed
10/26/2011	3:33:02 PM	Helium valve opened
10/26/2011	3:33:02 PM	Main Vac valve opened
10/26/2011	3:33:02 PM	Helium MFC set to  20.000000
10/26/2011	3:33:02 PM	H2 MFC set to  0.000000
10/26/2011	3:33:02 PM	BCl3 MFC set to  0.000000
10/26/2011	3:33:02 PM	PHl3 MFC set to  0.000000
10/26/2011	3:33:02 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:33:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:33:02 PM	Tube furnace set to 150
10/26/2011	3:33:32 PM	Helium valve closed
10/26/2011	3:33:32 PM	H2 valve closed
10/26/2011	3:33:32 PM	BCl3 valve closed
10/26/2011	3:33:32 PM	PH3 valve closed
10/26/2011	3:33:32 PM	SiCl4 pre valve closed
10/26/2011	3:33:32 PM	SiCl4 post valve closed
10/26/2011	3:33:32 PM	Bypass valve closed
10/26/2011	3:33:32 PM	Bubbler valve closed
10/26/2011	3:33:32 PM	Main Vac valve opened
10/26/2011	3:33:32 PM	Helium MFC set to  0.000000
10/26/2011	3:33:32 PM	H2 MFC set to  0.000000
10/26/2011	3:33:32 PM	BCl3 MFC set to  0.000000
10/26/2011	3:33:32 PM	PHl3 MFC set to  0.000000
10/26/2011	3:33:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:33:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:33:33 PM	Tube furnace set to 150
10/26/2011	3:34:03 PM	H2 valve closed
10/26/2011	3:34:03 PM	BCl3 valve closed
10/26/2011	3:34:03 PM	PH3 valve closed
10/26/2011	3:34:03 PM	SiCl4 pre valve closed
10/26/2011	3:34:03 PM	SiCl4 post valve closed
10/26/2011	3:34:03 PM	Bypass valve closed
10/26/2011	3:34:03 PM	Bubbler valve closed
10/26/2011	3:34:03 PM	Helium valve opened
10/26/2011	3:34:03 PM	Main Vac valve opened
10/26/2011	3:34:03 PM	Helium MFC set to  20.000000
10/26/2011	3:34:03 PM	H2 MFC set to  0.000000
10/26/2011	3:34:03 PM	BCl3 MFC set to  0.000000
10/26/2011	3:34:03 PM	PHl3 MFC set to  0.000000
10/26/2011	3:34:03 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:34:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:34:03 PM	Tube furnace set to 150
10/26/2011	3:34:33 PM	Helium valve closed
10/26/2011	3:34:33 PM	H2 valve closed
10/26/2011	3:34:33 PM	BCl3 valve closed
10/26/2011	3:34:33 PM	PH3 valve closed
10/26/2011	3:34:33 PM	SiCl4 pre valve closed
10/26/2011	3:34:33 PM	SiCl4 post valve closed
10/26/2011	3:34:33 PM	Bypass valve closed
10/26/2011	3:34:33 PM	Bubbler valve closed
10/26/2011	3:34:33 PM	Main Vac valve opened
10/26/2011	3:34:33 PM	Helium MFC set to  0.000000
10/26/2011	3:34:33 PM	H2 MFC set to  0.000000
10/26/2011	3:34:33 PM	BCl3 MFC set to  0.000000
10/26/2011	3:34:33 PM	PHl3 MFC set to  0.000000
10/26/2011	3:34:33 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:34:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:34:33 PM	Tube furnace set to 150
10/26/2011	3:35:03 PM	H2 valve closed
10/26/2011	3:35:03 PM	BCl3 valve closed
10/26/2011	3:35:03 PM	PH3 valve closed
10/26/2011	3:35:03 PM	SiCl4 pre valve closed
10/26/2011	3:35:03 PM	SiCl4 post valve closed
10/26/2011	3:35:03 PM	Bypass valve closed
10/26/2011	3:35:03 PM	Bubbler valve closed
10/26/2011	3:35:03 PM	Helium valve opened
10/26/2011	3:35:03 PM	Main Vac valve opened
10/26/2011	3:35:03 PM	Helium MFC set to  20.000000
10/26/2011	3:35:03 PM	H2 MFC set to  0.000000
10/26/2011	3:35:03 PM	BCl3 MFC set to  0.000000
10/26/2011	3:35:03 PM	PHl3 MFC set to  0.000000
10/26/2011	3:35:03 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:35:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:35:03 PM	Tube furnace set to 150
10/26/2011	3:35:33 PM	Helium valve closed
10/26/2011	3:35:33 PM	H2 valve closed
10/26/2011	3:35:33 PM	BCl3 valve closed
10/26/2011	3:35:33 PM	PH3 valve closed
10/26/2011	3:35:33 PM	SiCl4 pre valve closed
10/26/2011	3:35:33 PM	SiCl4 post valve closed
10/26/2011	3:35:33 PM	Bypass valve closed
10/26/2011	3:35:33 PM	Bubbler valve closed
10/26/2011	3:35:33 PM	Main Vac valve opened
10/26/2011	3:35:33 PM	Helium MFC set to  0.000000
10/26/2011	3:35:33 PM	H2 MFC set to  0.000000
10/26/2011	3:35:33 PM	BCl3 MFC set to  0.000000
10/26/2011	3:35:33 PM	PHl3 MFC set to  0.000000
10/26/2011	3:35:33 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:35:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:35:33 PM	Tube furnace set to 150
10/26/2011	3:36:03 PM	H2 valve closed
10/26/2011	3:36:04 PM	BCl3 valve closed
10/26/2011	3:36:04 PM	PH3 valve closed
10/26/2011	3:36:04 PM	SiCl4 pre valve closed
10/26/2011	3:36:04 PM	SiCl4 post valve closed
10/26/2011	3:36:04 PM	Bypass valve closed
10/26/2011	3:36:04 PM	Bubbler valve closed
10/26/2011	3:36:04 PM	Helium valve opened
10/26/2011	3:36:04 PM	Main Vac valve opened
10/26/2011	3:36:04 PM	Helium MFC set to  20.000000
10/26/2011	3:36:04 PM	H2 MFC set to  0.000000
10/26/2011	3:36:04 PM	BCl3 MFC set to  0.000000
10/26/2011	3:36:04 PM	PHl3 MFC set to  0.000000
10/26/2011	3:36:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:36:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:36:04 PM	Tube furnace set to 150
10/26/2011	3:36:34 PM	Helium valve closed
10/26/2011	3:36:34 PM	H2 valve closed
10/26/2011	3:36:34 PM	BCl3 valve closed
10/26/2011	3:36:34 PM	PH3 valve closed
10/26/2011	3:36:34 PM	SiCl4 pre valve closed
10/26/2011	3:36:34 PM	SiCl4 post valve closed
10/26/2011	3:36:34 PM	Bypass valve closed
10/26/2011	3:36:34 PM	Bubbler valve closed
10/26/2011	3:36:34 PM	Main Vac valve opened
10/26/2011	3:36:34 PM	Helium MFC set to  0.000000
10/26/2011	3:36:34 PM	H2 MFC set to  0.000000
10/26/2011	3:36:34 PM	BCl3 MFC set to  0.000000
10/26/2011	3:36:34 PM	PHl3 MFC set to  0.000000
10/26/2011	3:36:34 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:36:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:36:34 PM	Tube furnace set to 150
10/26/2011	3:37:04 PM	H2 valve closed
10/26/2011	3:37:04 PM	BCl3 valve closed
10/26/2011	3:37:04 PM	PH3 valve closed
10/26/2011	3:37:04 PM	SiCl4 pre valve closed
10/26/2011	3:37:04 PM	SiCl4 post valve closed
10/26/2011	3:37:04 PM	Bypass valve closed
10/26/2011	3:37:04 PM	Bubbler valve closed
10/26/2011	3:37:04 PM	Helium valve opened
10/26/2011	3:37:04 PM	Main Vac valve opened
10/26/2011	3:37:04 PM	Helium MFC set to  20.000000
10/26/2011	3:37:04 PM	H2 MFC set to  0.000000
10/26/2011	3:37:04 PM	BCl3 MFC set to  0.000000
10/26/2011	3:37:04 PM	PHl3 MFC set to  0.000000
10/26/2011	3:37:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:37:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:37:04 PM	Tube furnace set to 150
10/26/2011	3:37:34 PM	Helium valve closed
10/26/2011	3:37:34 PM	H2 valve closed
10/26/2011	3:37:34 PM	BCl3 valve closed
10/26/2011	3:37:34 PM	PH3 valve closed
10/26/2011	3:37:34 PM	SiCl4 pre valve closed
10/26/2011	3:37:34 PM	SiCl4 post valve closed
10/26/2011	3:37:34 PM	Bypass valve closed
10/26/2011	3:37:34 PM	Bubbler valve closed
10/26/2011	3:37:34 PM	Main Vac valve opened
10/26/2011	3:37:34 PM	Helium MFC set to  0.000000
10/26/2011	3:37:34 PM	H2 MFC set to  0.000000
10/26/2011	3:37:34 PM	BCl3 MFC set to  0.000000
10/26/2011	3:37:34 PM	PHl3 MFC set to  0.000000
10/26/2011	3:37:34 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:37:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:37:34 PM	Tube furnace set to 150
10/26/2011	3:38:04 PM	H2 valve closed
10/26/2011	3:38:04 PM	BCl3 valve closed
10/26/2011	3:38:04 PM	PH3 valve closed
10/26/2011	3:38:04 PM	SiCl4 pre valve closed
10/26/2011	3:38:04 PM	SiCl4 post valve closed
10/26/2011	3:38:04 PM	Bypass valve closed
10/26/2011	3:38:04 PM	Bubbler valve closed
10/26/2011	3:38:04 PM	Helium valve opened
10/26/2011	3:38:04 PM	Main Vac valve opened
10/26/2011	3:38:04 PM	Helium MFC set to  20.000000
10/26/2011	3:38:04 PM	H2 MFC set to  0.000000
10/26/2011	3:38:04 PM	BCl3 MFC set to  0.000000
10/26/2011	3:38:04 PM	PHl3 MFC set to  0.000000
10/26/2011	3:38:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:38:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:38:05 PM	Tube furnace set to 150
10/26/2011	3:38:35 PM	Helium valve closed
10/26/2011	3:38:35 PM	H2 valve closed
10/26/2011	3:38:35 PM	BCl3 valve closed
10/26/2011	3:38:35 PM	PH3 valve closed
10/26/2011	3:38:35 PM	SiCl4 pre valve closed
10/26/2011	3:38:35 PM	SiCl4 post valve closed
10/26/2011	3:38:35 PM	Bypass valve closed
10/26/2011	3:38:35 PM	Bubbler valve closed
10/26/2011	3:38:35 PM	Main Vac valve opened
10/26/2011	3:38:35 PM	Helium MFC set to  0.000000
10/26/2011	3:38:35 PM	H2 MFC set to  0.000000
10/26/2011	3:38:35 PM	BCl3 MFC set to  0.000000
10/26/2011	3:38:35 PM	PHl3 MFC set to  0.000000
10/26/2011	3:38:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:38:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:38:35 PM	Tube furnace set to 150
10/26/2011	3:39:05 PM	H2 valve closed
10/26/2011	3:39:05 PM	BCl3 valve closed
10/26/2011	3:39:05 PM	PH3 valve closed
10/26/2011	3:39:05 PM	SiCl4 pre valve closed
10/26/2011	3:39:05 PM	SiCl4 post valve closed
10/26/2011	3:39:05 PM	Bypass valve closed
10/26/2011	3:39:05 PM	Bubbler valve closed
10/26/2011	3:39:05 PM	Helium valve opened
10/26/2011	3:39:05 PM	Main Vac valve opened
10/26/2011	3:39:05 PM	Helium MFC set to  20.000000
10/26/2011	3:39:05 PM	H2 MFC set to  0.000000
10/26/2011	3:39:05 PM	BCl3 MFC set to  0.000000
10/26/2011	3:39:05 PM	PHl3 MFC set to  0.000000
10/26/2011	3:39:05 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:39:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:39:05 PM	Tube furnace set to 150
10/26/2011	3:39:35 PM	Helium valve closed
10/26/2011	3:39:35 PM	H2 valve closed
10/26/2011	3:39:35 PM	BCl3 valve closed
10/26/2011	3:39:35 PM	PH3 valve closed
10/26/2011	3:39:35 PM	SiCl4 pre valve closed
10/26/2011	3:39:35 PM	SiCl4 post valve closed
10/26/2011	3:39:35 PM	Bypass valve closed
10/26/2011	3:39:35 PM	Bubbler valve closed
10/26/2011	3:39:35 PM	Main Vac valve opened
10/26/2011	3:39:35 PM	Helium MFC set to  0.000000
10/26/2011	3:39:35 PM	H2 MFC set to  0.000000
10/26/2011	3:39:35 PM	BCl3 MFC set to  0.000000
10/26/2011	3:39:35 PM	PHl3 MFC set to  0.000000
10/26/2011	3:39:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:39:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:39:35 PM	Tube furnace set to 150
10/26/2011	3:40:05 PM	H2 valve closed
10/26/2011	3:40:05 PM	BCl3 valve closed
10/26/2011	3:40:05 PM	PH3 valve closed
10/26/2011	3:40:05 PM	SiCl4 pre valve closed
10/26/2011	3:40:05 PM	SiCl4 post valve closed
10/26/2011	3:40:05 PM	Bypass valve closed
10/26/2011	3:40:05 PM	Bubbler valve closed
10/26/2011	3:40:05 PM	Helium valve opened
10/26/2011	3:40:05 PM	Main Vac valve opened
10/26/2011	3:40:05 PM	Helium MFC set to  20.000000
10/26/2011	3:40:05 PM	H2 MFC set to  0.000000
10/26/2011	3:40:05 PM	BCl3 MFC set to  0.000000
10/26/2011	3:40:05 PM	PHl3 MFC set to  0.000000
10/26/2011	3:40:05 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:40:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:40:05 PM	Tube furnace set to 150
10/26/2011	3:40:35 PM	Helium valve closed
10/26/2011	3:40:35 PM	H2 valve closed
10/26/2011	3:40:35 PM	BCl3 valve closed
10/26/2011	3:40:35 PM	PH3 valve closed
10/26/2011	3:40:35 PM	SiCl4 pre valve closed
10/26/2011	3:40:35 PM	SiCl4 post valve closed
10/26/2011	3:40:35 PM	Bypass valve closed
10/26/2011	3:40:35 PM	Bubbler valve closed
10/26/2011	3:40:35 PM	Main Vac valve opened
10/26/2011	3:40:35 PM	Helium MFC set to  0.000000
10/26/2011	3:40:35 PM	H2 MFC set to  0.000000
10/26/2011	3:40:35 PM	BCl3 MFC set to  0.000000
10/26/2011	3:40:35 PM	PHl3 MFC set to  0.000000
10/26/2011	3:40:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:40:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:40:36 PM	Tube furnace set to 150
10/26/2011	3:40:37 PM	Run finished at 3:40 PM
10/26/2011	3:41:07 PM	Main Vac valve closed
10/26/2011	3:41:21 PM	Main Vac valve opened
10/26/2011	3:43:05 PM	Recipe started at 3:43 PM
10/26/2011	3:43:05 PM	Helium valve closed
10/26/2011	3:43:05 PM	H2 valve closed
10/26/2011	3:43:05 PM	BCl3 valve closed
10/26/2011	3:43:05 PM	PH3 valve closed
10/26/2011	3:43:05 PM	SiCl4 pre valve closed
10/26/2011	3:43:05 PM	SiCl4 post valve closed
10/26/2011	3:43:05 PM	Main Vac valve closed
10/26/2011	3:43:05 PM	Bypass valve closed
10/26/2011	3:43:05 PM	Bubbler valve closed
10/26/2011	3:43:05 PM	Helium MFC set to  0.000000
10/26/2011	3:43:05 PM	H2 MFC set to  0.000000
10/26/2011	3:43:05 PM	BCl3 MFC set to  0.000000
10/26/2011	3:43:05 PM	PHl3 MFC set to  0.000000
10/26/2011	3:43:05 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:43:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:43:05 PM	Tube furnace set to 0
10/26/2011	3:43:08 PM	Helium valve closed
10/26/2011	3:43:08 PM	BCl3 valve closed
10/26/2011	3:43:08 PM	PH3 valve closed
10/26/2011	3:43:08 PM	SiCl4 pre valve closed
10/26/2011	3:43:08 PM	SiCl4 post valve closed
10/26/2011	3:43:08 PM	Main Vac valve closed
10/26/2011	3:43:08 PM	Bypass valve closed
10/26/2011	3:43:08 PM	Bubbler valve closed
10/26/2011	3:43:08 PM	H2 valve opened
10/26/2011	3:43:08 PM	Helium MFC set to  0.000000
10/26/2011	3:43:08 PM	H2 MFC set to  500.000000
10/26/2011	3:43:08 PM	BCl3 MFC set to  0.000000
10/26/2011	3:43:08 PM	PHl3 MFC set to  0.000000
10/26/2011	3:43:08 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:43:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:43:09 PM	Tube furnace set to 0
10/26/2011	3:44:13 PM	Helium valve closed
10/26/2011	3:44:13 PM	BCl3 valve closed
10/26/2011	3:44:13 PM	PH3 valve closed
10/26/2011	3:44:13 PM	SiCl4 pre valve closed
10/26/2011	3:44:13 PM	SiCl4 post valve closed
10/26/2011	3:44:13 PM	Main Vac valve closed
10/26/2011	3:44:13 PM	Bypass valve closed
10/26/2011	3:44:13 PM	H2 valve opened
10/26/2011	3:44:13 PM	Bubbler valve opened
10/26/2011	3:44:13 PM	Helium MFC set to  0.000000
10/26/2011	3:44:13 PM	H2 MFC set to  500.000000
10/26/2011	3:44:13 PM	BCl3 MFC set to  0.000000
10/26/2011	3:44:13 PM	PHl3 MFC set to  0.000000
10/26/2011	3:44:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:44:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:44:13 PM	Tube furnace set to 0
10/26/2011	3:44:14 PM	Helium valve closed
10/26/2011	3:44:14 PM	BCl3 valve closed
10/26/2011	3:44:14 PM	PH3 valve closed
10/26/2011	3:44:14 PM	SiCl4 pre valve closed
10/26/2011	3:44:14 PM	SiCl4 post valve closed
10/26/2011	3:44:14 PM	Main Vac valve closed
10/26/2011	3:44:14 PM	Bypass valve closed
10/26/2011	3:44:14 PM	H2 valve opened
10/26/2011	3:44:14 PM	Bubbler valve opened
10/26/2011	3:44:14 PM	Helium MFC set to  0.000000
10/26/2011	3:44:14 PM	H2 MFC set to  500.000000
10/26/2011	3:44:14 PM	BCl3 MFC set to  0.000000
10/26/2011	3:44:14 PM	PHl3 MFC set to  0.000000
10/26/2011	3:44:14 PM	SiCl4 MFC set to  0.000000
10/26/2011	3:44:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	3:44:14 PM	Tube furnace set to 1050
10/26/2011	4:14:14 PM	Helium valve closed
10/26/2011	4:14:14 PM	PH3 valve closed
10/26/2011	4:14:14 PM	Main Vac valve closed
10/26/2011	4:14:14 PM	Bypass valve closed
10/26/2011	4:14:14 PM	H2 valve opened
10/26/2011	4:14:14 PM	BCl3 valve opened
10/26/2011	4:14:14 PM	SiCl4 pre valve opened
10/26/2011	4:14:14 PM	SiCl4 post valve opened
10/26/2011	4:14:14 PM	Bubbler valve opened
10/26/2011	4:14:14 PM	Helium MFC set to  0.000000
10/26/2011	4:14:14 PM	H2 MFC set to  500.000000
10/26/2011	4:14:14 PM	BCl3 MFC set to  2.000000
10/26/2011	4:14:14 PM	PHl3 MFC set to  0.000000
10/26/2011	4:14:14 PM	SiCl4 MFC set to  50.000000
10/26/2011	4:14:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	4:14:14 PM	Tube furnace set to 1050
10/26/2011	4:39:14 PM	Helium valve closed
10/26/2011	4:39:14 PM	BCl3 valve closed
10/26/2011	4:39:14 PM	PH3 valve closed
10/26/2011	4:39:14 PM	SiCl4 pre valve closed
10/26/2011	4:39:14 PM	SiCl4 post valve closed
10/26/2011	4:39:14 PM	Main Vac valve closed
10/26/2011	4:39:14 PM	Bypass valve closed
10/26/2011	4:39:14 PM	H2 valve opened
10/26/2011	4:39:14 PM	Bubbler valve opened
10/26/2011	4:39:14 PM	Helium MFC set to  0.000000
10/26/2011	4:39:14 PM	H2 MFC set to  500.000000
10/26/2011	4:39:14 PM	BCl3 MFC set to  0.000000
10/26/2011	4:39:14 PM	PHl3 MFC set to  0.000000
10/26/2011	4:39:14 PM	SiCl4 MFC set to  0.000000
10/26/2011	4:39:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	4:39:14 PM	Tube furnace set to 750
10/26/2011	4:49:14 PM	H2 valve closed
10/26/2011	4:49:14 PM	BCl3 valve closed
10/26/2011	4:49:14 PM	PH3 valve closed
10/26/2011	4:49:14 PM	SiCl4 pre valve closed
10/26/2011	4:49:14 PM	SiCl4 post valve closed
10/26/2011	4:49:14 PM	Main Vac valve closed
10/26/2011	4:49:14 PM	Bypass valve closed
10/26/2011	4:49:14 PM	Helium valve opened
10/26/2011	4:49:14 PM	Bubbler valve opened
10/26/2011	4:49:14 PM	Helium MFC set to  500.000000
10/26/2011	4:49:14 PM	H2 MFC set to  0.000000
10/26/2011	4:49:14 PM	BCl3 MFC set to  0.000000
10/26/2011	4:49:14 PM	PHl3 MFC set to  0.000000
10/26/2011	4:49:14 PM	SiCl4 MFC set to  0.000000
10/26/2011	4:49:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	4:49:15 PM	Tube furnace set to 0
10/26/2011	5:09:15 PM	Helium valve closed
10/26/2011	5:09:15 PM	H2 valve closed
10/26/2011	5:09:15 PM	BCl3 valve closed
10/26/2011	5:09:15 PM	PH3 valve closed
10/26/2011	5:09:15 PM	SiCl4 pre valve closed
10/26/2011	5:09:15 PM	SiCl4 post valve closed
10/26/2011	5:09:15 PM	Main Vac valve closed
10/26/2011	5:09:15 PM	Bypass valve closed
10/26/2011	5:09:15 PM	Bubbler valve closed
10/26/2011	5:09:15 PM	Helium MFC set to  0.000000
10/26/2011	5:09:15 PM	H2 MFC set to  0.000000
10/26/2011	5:09:15 PM	BCl3 MFC set to  0.000000
10/26/2011	5:09:15 PM	PHl3 MFC set to  0.000000
10/26/2011	5:09:15 PM	SiCl4 MFC set to  0.000000
10/26/2011	5:09:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	5:09:15 PM	Tube furnace set to 0
10/26/2011	5:09:16 PM	Run finished at 5:09 PM
10/26/2011	6:32:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	6:32:51 PM	Recipe started at 6:32 PM
10/26/2011	6:32:51 PM	Helium valve closed
10/26/2011	6:32:51 PM	H2 valve closed
10/26/2011	6:32:51 PM	BCl3 valve closed
10/26/2011	6:32:51 PM	PH3 valve closed
10/26/2011	6:32:51 PM	SiCl4 pre valve closed
10/26/2011	6:32:51 PM	SiCl4 post valve closed
10/26/2011	6:32:51 PM	Main Vac valve closed
10/26/2011	6:32:51 PM	Bypass valve closed
10/26/2011	6:32:51 PM	Bubbler valve closed
10/26/2011	6:32:51 PM	Helium MFC set to  0.000000
10/26/2011	6:32:51 PM	H2 MFC set to  0.000000
10/26/2011	6:32:51 PM	BCl3 MFC set to  0.000000
10/26/2011	6:32:51 PM	PHl3 MFC set to  0.000000
10/26/2011	6:32:51 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:32:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:32:51 PM	Tube furnace set to 0
10/26/2011	6:32:54 PM	H2 valve closed
10/26/2011	6:32:54 PM	BCl3 valve closed
10/26/2011	6:32:54 PM	PH3 valve closed
10/26/2011	6:32:54 PM	SiCl4 pre valve closed
10/26/2011	6:32:54 PM	SiCl4 post valve closed
10/26/2011	6:32:54 PM	Main Vac valve closed
10/26/2011	6:32:54 PM	Bypass valve closed
10/26/2011	6:32:54 PM	Bubbler valve closed
10/26/2011	6:32:54 PM	Helium valve opened
10/26/2011	6:32:54 PM	Helium MFC set to  500.000000
10/26/2011	6:32:54 PM	H2 MFC set to  0.000000
10/26/2011	6:32:54 PM	BCl3 MFC set to  0.000000
10/26/2011	6:32:54 PM	PHl3 MFC set to  0.000000
10/26/2011	6:32:54 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:32:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:32:54 PM	Tube furnace set to 0
10/26/2011	6:32:57 PM	Helium valve closed
10/26/2011	6:32:57 PM	H2 valve closed
10/26/2011	6:32:57 PM	BCl3 valve closed
10/26/2011	6:32:57 PM	PH3 valve closed
10/26/2011	6:32:57 PM	SiCl4 pre valve closed
10/26/2011	6:32:57 PM	SiCl4 post valve closed
10/26/2011	6:32:57 PM	Main Vac valve closed
10/26/2011	6:32:57 PM	Bypass valve closed
10/26/2011	6:32:57 PM	Bubbler valve closed
10/26/2011	6:32:57 PM	Helium MFC set to  0.000000
10/26/2011	6:32:57 PM	H2 MFC set to  0.000000
10/26/2011	6:32:57 PM	BCl3 MFC set to  0.000000
10/26/2011	6:32:57 PM	PHl3 MFC set to  0.000000
10/26/2011	6:32:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:32:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:32:57 PM	Tube furnace set to 0
10/26/2011	6:32:58 PM	Run finished at 6:32 PM
10/26/2011	6:32:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	6:39:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	6:39:44 PM	Recipe started at 6:39 PM
10/26/2011	6:39:44 PM	Helium valve closed
10/26/2011	6:39:44 PM	H2 valve closed
10/26/2011	6:39:44 PM	BCl3 valve closed
10/26/2011	6:39:44 PM	PH3 valve closed
10/26/2011	6:39:44 PM	SiCl4 pre valve closed
10/26/2011	6:39:44 PM	SiCl4 post valve closed
10/26/2011	6:39:44 PM	Main Vac valve closed
10/26/2011	6:39:44 PM	Bubbler valve closed
10/26/2011	6:39:44 PM	Bypass valve opened
10/26/2011	6:39:44 PM	Helium MFC set to  0.000000
10/26/2011	6:39:44 PM	H2 MFC set to  0.000000
10/26/2011	6:39:44 PM	BCl3 MFC set to  0.000000
10/26/2011	6:39:44 PM	PHl3 MFC set to  0.000000
10/26/2011	6:39:44 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:39:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:39:44 PM	Tube furnace set to 0
10/26/2011	6:40:57 PM	Helium valve closed
10/26/2011	6:40:57 PM	H2 valve closed
10/26/2011	6:40:57 PM	BCl3 valve closed
10/26/2011	6:40:57 PM	PH3 valve closed
10/26/2011	6:40:57 PM	SiCl4 pre valve closed
10/26/2011	6:40:57 PM	SiCl4 post valve closed
10/26/2011	6:40:57 PM	Main Vac valve closed
10/26/2011	6:40:57 PM	Bubbler valve closed
10/26/2011	6:40:57 PM	Bypass valve opened
10/26/2011	6:40:57 PM	Helium MFC set to  0.000000
10/26/2011	6:40:57 PM	H2 MFC set to  0.000000
10/26/2011	6:40:57 PM	BCl3 MFC set to  0.000000
10/26/2011	6:40:57 PM	PHl3 MFC set to  0.000000
10/26/2011	6:40:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:40:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:40:57 PM	Tube furnace set to 0
10/26/2011	6:41:57 PM	Helium valve closed
10/26/2011	6:41:57 PM	H2 valve closed
10/26/2011	6:41:57 PM	BCl3 valve closed
10/26/2011	6:41:57 PM	PH3 valve closed
10/26/2011	6:41:57 PM	SiCl4 pre valve closed
10/26/2011	6:41:57 PM	SiCl4 post valve closed
10/26/2011	6:41:57 PM	Bypass valve closed
10/26/2011	6:41:57 PM	Bubbler valve closed
10/26/2011	6:41:57 PM	Main Vac valve opened
10/26/2011	6:41:57 PM	Helium MFC set to  0.000000
10/26/2011	6:41:57 PM	H2 MFC set to  0.000000
10/26/2011	6:41:57 PM	BCl3 MFC set to  0.000000
10/26/2011	6:41:57 PM	PHl3 MFC set to  0.000000
10/26/2011	6:41:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:41:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:41:58 PM	Tube furnace set to 0
10/26/2011	6:41:59 PM	Run finished at 6:41 PM
10/26/2011	6:41:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	6:42:41 PM	Tube furnace set to 150
10/26/2011	6:54:28 PM	Recipe started at 6:54 PM
10/26/2011	6:54:28 PM	Helium valve closed
10/26/2011	6:54:28 PM	H2 valve closed
10/26/2011	6:54:28 PM	BCl3 valve closed
10/26/2011	6:54:28 PM	PH3 valve closed
10/26/2011	6:54:28 PM	SiCl4 pre valve closed
10/26/2011	6:54:28 PM	SiCl4 post valve closed
10/26/2011	6:54:28 PM	Bypass valve closed
10/26/2011	6:54:28 PM	Bubbler valve closed
10/26/2011	6:54:28 PM	Main Vac valve opened
10/26/2011	6:54:28 PM	Helium MFC set to  0.000000
10/26/2011	6:54:28 PM	H2 MFC set to  0.000000
10/26/2011	6:54:28 PM	BCl3 MFC set to  0.000000
10/26/2011	6:54:28 PM	PHl3 MFC set to  0.000000
10/26/2011	6:54:28 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:54:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:54:29 PM	Tube furnace set to 150
10/26/2011	6:54:59 PM	H2 valve closed
10/26/2011	6:54:59 PM	BCl3 valve closed
10/26/2011	6:54:59 PM	PH3 valve closed
10/26/2011	6:54:59 PM	SiCl4 pre valve closed
10/26/2011	6:54:59 PM	SiCl4 post valve closed
10/26/2011	6:54:59 PM	Bypass valve closed
10/26/2011	6:54:59 PM	Bubbler valve closed
10/26/2011	6:54:59 PM	Helium valve opened
10/26/2011	6:54:59 PM	Main Vac valve opened
10/26/2011	6:54:59 PM	Helium MFC set to  20.000000
10/26/2011	6:54:59 PM	H2 MFC set to  0.000000
10/26/2011	6:54:59 PM	BCl3 MFC set to  0.000000
10/26/2011	6:54:59 PM	PHl3 MFC set to  0.000000
10/26/2011	6:54:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:54:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:54:59 PM	Tube furnace set to 150
10/26/2011	6:55:29 PM	Helium valve closed
10/26/2011	6:55:29 PM	H2 valve closed
10/26/2011	6:55:29 PM	BCl3 valve closed
10/26/2011	6:55:29 PM	PH3 valve closed
10/26/2011	6:55:29 PM	SiCl4 pre valve closed
10/26/2011	6:55:29 PM	SiCl4 post valve closed
10/26/2011	6:55:29 PM	Bypass valve closed
10/26/2011	6:55:29 PM	Bubbler valve closed
10/26/2011	6:55:29 PM	Main Vac valve opened
10/26/2011	6:55:29 PM	Helium MFC set to  0.000000
10/26/2011	6:55:29 PM	H2 MFC set to  0.000000
10/26/2011	6:55:29 PM	BCl3 MFC set to  0.000000
10/26/2011	6:55:29 PM	PHl3 MFC set to  0.000000
10/26/2011	6:55:29 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:55:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:55:29 PM	Tube furnace set to 150
10/26/2011	6:55:59 PM	H2 valve closed
10/26/2011	6:55:59 PM	BCl3 valve closed
10/26/2011	6:55:59 PM	PH3 valve closed
10/26/2011	6:55:59 PM	SiCl4 pre valve closed
10/26/2011	6:55:59 PM	SiCl4 post valve closed
10/26/2011	6:55:59 PM	Bypass valve closed
10/26/2011	6:55:59 PM	Bubbler valve closed
10/26/2011	6:55:59 PM	Helium valve opened
10/26/2011	6:55:59 PM	Main Vac valve opened
10/26/2011	6:55:59 PM	Helium MFC set to  20.000000
10/26/2011	6:55:59 PM	H2 MFC set to  0.000000
10/26/2011	6:55:59 PM	BCl3 MFC set to  0.000000
10/26/2011	6:55:59 PM	PHl3 MFC set to  0.000000
10/26/2011	6:55:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:55:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:55:59 PM	Tube furnace set to 150
10/26/2011	6:56:29 PM	Helium valve closed
10/26/2011	6:56:29 PM	H2 valve closed
10/26/2011	6:56:29 PM	BCl3 valve closed
10/26/2011	6:56:29 PM	PH3 valve closed
10/26/2011	6:56:29 PM	SiCl4 pre valve closed
10/26/2011	6:56:29 PM	SiCl4 post valve closed
10/26/2011	6:56:29 PM	Bypass valve closed
10/26/2011	6:56:29 PM	Bubbler valve closed
10/26/2011	6:56:29 PM	Main Vac valve opened
10/26/2011	6:56:29 PM	Helium MFC set to  0.000000
10/26/2011	6:56:29 PM	H2 MFC set to  0.000000
10/26/2011	6:56:29 PM	BCl3 MFC set to  0.000000
10/26/2011	6:56:29 PM	PHl3 MFC set to  0.000000
10/26/2011	6:56:29 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:56:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:56:29 PM	Tube furnace set to 150
10/26/2011	6:56:59 PM	H2 valve closed
10/26/2011	6:56:59 PM	BCl3 valve closed
10/26/2011	6:56:59 PM	PH3 valve closed
10/26/2011	6:56:59 PM	SiCl4 pre valve closed
10/26/2011	6:56:59 PM	SiCl4 post valve closed
10/26/2011	6:56:59 PM	Bypass valve closed
10/26/2011	6:56:59 PM	Bubbler valve closed
10/26/2011	6:56:59 PM	Helium valve opened
10/26/2011	6:56:59 PM	Main Vac valve opened
10/26/2011	6:56:59 PM	Helium MFC set to  20.000000
10/26/2011	6:56:59 PM	H2 MFC set to  0.000000
10/26/2011	6:56:59 PM	BCl3 MFC set to  0.000000
10/26/2011	6:56:59 PM	PHl3 MFC set to  0.000000
10/26/2011	6:56:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:56:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:57:00 PM	Tube furnace set to 150
10/26/2011	6:57:30 PM	Helium valve closed
10/26/2011	6:57:30 PM	H2 valve closed
10/26/2011	6:57:30 PM	BCl3 valve closed
10/26/2011	6:57:30 PM	PH3 valve closed
10/26/2011	6:57:30 PM	SiCl4 pre valve closed
10/26/2011	6:57:30 PM	SiCl4 post valve closed
10/26/2011	6:57:30 PM	Bypass valve closed
10/26/2011	6:57:30 PM	Bubbler valve closed
10/26/2011	6:57:30 PM	Main Vac valve opened
10/26/2011	6:57:30 PM	Helium MFC set to  0.000000
10/26/2011	6:57:30 PM	H2 MFC set to  0.000000
10/26/2011	6:57:30 PM	BCl3 MFC set to  0.000000
10/26/2011	6:57:30 PM	PHl3 MFC set to  0.000000
10/26/2011	6:57:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:57:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:57:30 PM	Tube furnace set to 150
10/26/2011	6:58:00 PM	H2 valve closed
10/26/2011	6:58:00 PM	BCl3 valve closed
10/26/2011	6:58:00 PM	PH3 valve closed
10/26/2011	6:58:00 PM	SiCl4 pre valve closed
10/26/2011	6:58:00 PM	SiCl4 post valve closed
10/26/2011	6:58:00 PM	Bypass valve closed
10/26/2011	6:58:00 PM	Bubbler valve closed
10/26/2011	6:58:00 PM	Helium valve opened
10/26/2011	6:58:00 PM	Main Vac valve opened
10/26/2011	6:58:00 PM	Helium MFC set to  20.000000
10/26/2011	6:58:00 PM	H2 MFC set to  0.000000
10/26/2011	6:58:00 PM	BCl3 MFC set to  0.000000
10/26/2011	6:58:00 PM	PHl3 MFC set to  0.000000
10/26/2011	6:58:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:58:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:58:00 PM	Tube furnace set to 150
10/26/2011	6:58:30 PM	Helium valve closed
10/26/2011	6:58:30 PM	H2 valve closed
10/26/2011	6:58:30 PM	BCl3 valve closed
10/26/2011	6:58:30 PM	PH3 valve closed
10/26/2011	6:58:30 PM	SiCl4 pre valve closed
10/26/2011	6:58:30 PM	SiCl4 post valve closed
10/26/2011	6:58:30 PM	Bypass valve closed
10/26/2011	6:58:30 PM	Bubbler valve closed
10/26/2011	6:58:30 PM	Main Vac valve opened
10/26/2011	6:58:30 PM	Helium MFC set to  0.000000
10/26/2011	6:58:30 PM	H2 MFC set to  0.000000
10/26/2011	6:58:30 PM	BCl3 MFC set to  0.000000
10/26/2011	6:58:30 PM	PHl3 MFC set to  0.000000
10/26/2011	6:58:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:58:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:58:30 PM	Tube furnace set to 150
10/26/2011	6:59:00 PM	H2 valve closed
10/26/2011	6:59:00 PM	BCl3 valve closed
10/26/2011	6:59:00 PM	PH3 valve closed
10/26/2011	6:59:00 PM	SiCl4 pre valve closed
10/26/2011	6:59:00 PM	SiCl4 post valve closed
10/26/2011	6:59:00 PM	Bypass valve closed
10/26/2011	6:59:00 PM	Bubbler valve closed
10/26/2011	6:59:00 PM	Helium valve opened
10/26/2011	6:59:00 PM	Main Vac valve opened
10/26/2011	6:59:00 PM	Helium MFC set to  20.000000
10/26/2011	6:59:00 PM	H2 MFC set to  0.000000
10/26/2011	6:59:00 PM	BCl3 MFC set to  0.000000
10/26/2011	6:59:00 PM	PHl3 MFC set to  0.000000
10/26/2011	6:59:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:59:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:59:00 PM	Tube furnace set to 150
10/26/2011	6:59:30 PM	Helium valve closed
10/26/2011	6:59:30 PM	H2 valve closed
10/26/2011	6:59:30 PM	BCl3 valve closed
10/26/2011	6:59:30 PM	PH3 valve closed
10/26/2011	6:59:30 PM	SiCl4 pre valve closed
10/26/2011	6:59:30 PM	SiCl4 post valve closed
10/26/2011	6:59:30 PM	Bypass valve closed
10/26/2011	6:59:30 PM	Bubbler valve closed
10/26/2011	6:59:30 PM	Main Vac valve opened
10/26/2011	6:59:30 PM	Helium MFC set to  0.000000
10/26/2011	6:59:30 PM	H2 MFC set to  0.000000
10/26/2011	6:59:30 PM	BCl3 MFC set to  0.000000
10/26/2011	6:59:30 PM	PHl3 MFC set to  0.000000
10/26/2011	6:59:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	6:59:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	6:59:31 PM	Tube furnace set to 150
10/26/2011	7:00:01 PM	H2 valve closed
10/26/2011	7:00:01 PM	BCl3 valve closed
10/26/2011	7:00:01 PM	PH3 valve closed
10/26/2011	7:00:01 PM	SiCl4 pre valve closed
10/26/2011	7:00:01 PM	SiCl4 post valve closed
10/26/2011	7:00:01 PM	Bypass valve closed
10/26/2011	7:00:01 PM	Bubbler valve closed
10/26/2011	7:00:01 PM	Helium valve opened
10/26/2011	7:00:01 PM	Main Vac valve opened
10/26/2011	7:00:01 PM	Helium MFC set to  20.000000
10/26/2011	7:00:01 PM	H2 MFC set to  0.000000
10/26/2011	7:00:01 PM	BCl3 MFC set to  0.000000
10/26/2011	7:00:01 PM	PHl3 MFC set to  0.000000
10/26/2011	7:00:01 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:00:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:00:01 PM	Tube furnace set to 150
10/26/2011	7:00:31 PM	Helium valve closed
10/26/2011	7:00:31 PM	H2 valve closed
10/26/2011	7:00:31 PM	BCl3 valve closed
10/26/2011	7:00:31 PM	PH3 valve closed
10/26/2011	7:00:31 PM	SiCl4 pre valve closed
10/26/2011	7:00:31 PM	SiCl4 post valve closed
10/26/2011	7:00:31 PM	Bypass valve closed
10/26/2011	7:00:31 PM	Bubbler valve closed
10/26/2011	7:00:31 PM	Main Vac valve opened
10/26/2011	7:00:31 PM	Helium MFC set to  0.000000
10/26/2011	7:00:31 PM	H2 MFC set to  0.000000
10/26/2011	7:00:31 PM	BCl3 MFC set to  0.000000
10/26/2011	7:00:31 PM	PHl3 MFC set to  0.000000
10/26/2011	7:00:31 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:00:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:00:31 PM	Tube furnace set to 150
10/26/2011	7:01:01 PM	H2 valve closed
10/26/2011	7:01:01 PM	BCl3 valve closed
10/26/2011	7:01:01 PM	PH3 valve closed
10/26/2011	7:01:01 PM	SiCl4 pre valve closed
10/26/2011	7:01:01 PM	SiCl4 post valve closed
10/26/2011	7:01:01 PM	Bypass valve closed
10/26/2011	7:01:01 PM	Bubbler valve closed
10/26/2011	7:01:01 PM	Helium valve opened
10/26/2011	7:01:01 PM	Main Vac valve opened
10/26/2011	7:01:01 PM	Helium MFC set to  20.000000
10/26/2011	7:01:01 PM	H2 MFC set to  0.000000
10/26/2011	7:01:01 PM	BCl3 MFC set to  0.000000
10/26/2011	7:01:01 PM	PHl3 MFC set to  0.000000
10/26/2011	7:01:01 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:01:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:01:01 PM	Tube furnace set to 150
10/26/2011	7:01:31 PM	Helium valve closed
10/26/2011	7:01:31 PM	H2 valve closed
10/26/2011	7:01:31 PM	BCl3 valve closed
10/26/2011	7:01:31 PM	PH3 valve closed
10/26/2011	7:01:31 PM	SiCl4 pre valve closed
10/26/2011	7:01:31 PM	SiCl4 post valve closed
10/26/2011	7:01:31 PM	Bypass valve closed
10/26/2011	7:01:31 PM	Bubbler valve closed
10/26/2011	7:01:31 PM	Main Vac valve opened
10/26/2011	7:01:31 PM	Helium MFC set to  0.000000
10/26/2011	7:01:31 PM	H2 MFC set to  0.000000
10/26/2011	7:01:31 PM	BCl3 MFC set to  0.000000
10/26/2011	7:01:31 PM	PHl3 MFC set to  0.000000
10/26/2011	7:01:31 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:01:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:01:31 PM	Tube furnace set to 150
10/26/2011	7:02:01 PM	H2 valve closed
10/26/2011	7:02:01 PM	BCl3 valve closed
10/26/2011	7:02:01 PM	PH3 valve closed
10/26/2011	7:02:01 PM	SiCl4 pre valve closed
10/26/2011	7:02:01 PM	SiCl4 post valve closed
10/26/2011	7:02:01 PM	Bypass valve closed
10/26/2011	7:02:01 PM	Bubbler valve closed
10/26/2011	7:02:01 PM	Helium valve opened
10/26/2011	7:02:01 PM	Main Vac valve opened
10/26/2011	7:02:01 PM	Helium MFC set to  20.000000
10/26/2011	7:02:01 PM	H2 MFC set to  0.000000
10/26/2011	7:02:01 PM	BCl3 MFC set to  0.000000
10/26/2011	7:02:01 PM	PHl3 MFC set to  0.000000
10/26/2011	7:02:01 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:02:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:02:01 PM	Tube furnace set to 150
10/26/2011	7:02:32 PM	Helium valve closed
10/26/2011	7:02:32 PM	H2 valve closed
10/26/2011	7:02:32 PM	BCl3 valve closed
10/26/2011	7:02:32 PM	PH3 valve closed
10/26/2011	7:02:32 PM	SiCl4 pre valve closed
10/26/2011	7:02:32 PM	SiCl4 post valve closed
10/26/2011	7:02:32 PM	Bypass valve closed
10/26/2011	7:02:32 PM	Bubbler valve closed
10/26/2011	7:02:32 PM	Main Vac valve opened
10/26/2011	7:02:32 PM	Helium MFC set to  0.000000
10/26/2011	7:02:32 PM	H2 MFC set to  0.000000
10/26/2011	7:02:32 PM	BCl3 MFC set to  0.000000
10/26/2011	7:02:32 PM	PHl3 MFC set to  0.000000
10/26/2011	7:02:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:02:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:02:32 PM	Tube furnace set to 150
10/26/2011	7:03:02 PM	H2 valve closed
10/26/2011	7:03:02 PM	BCl3 valve closed
10/26/2011	7:03:02 PM	PH3 valve closed
10/26/2011	7:03:02 PM	SiCl4 pre valve closed
10/26/2011	7:03:02 PM	SiCl4 post valve closed
10/26/2011	7:03:02 PM	Bypass valve closed
10/26/2011	7:03:02 PM	Bubbler valve closed
10/26/2011	7:03:02 PM	Helium valve opened
10/26/2011	7:03:02 PM	Main Vac valve opened
10/26/2011	7:03:02 PM	Helium MFC set to  20.000000
10/26/2011	7:03:02 PM	H2 MFC set to  0.000000
10/26/2011	7:03:02 PM	BCl3 MFC set to  0.000000
10/26/2011	7:03:02 PM	PHl3 MFC set to  0.000000
10/26/2011	7:03:02 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:03:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:03:02 PM	Tube furnace set to 150
10/26/2011	7:03:32 PM	Helium valve closed
10/26/2011	7:03:32 PM	H2 valve closed
10/26/2011	7:03:32 PM	BCl3 valve closed
10/26/2011	7:03:32 PM	PH3 valve closed
10/26/2011	7:03:32 PM	SiCl4 pre valve closed
10/26/2011	7:03:32 PM	SiCl4 post valve closed
10/26/2011	7:03:32 PM	Bypass valve closed
10/26/2011	7:03:32 PM	Bubbler valve closed
10/26/2011	7:03:32 PM	Main Vac valve opened
10/26/2011	7:03:32 PM	Helium MFC set to  0.000000
10/26/2011	7:03:32 PM	H2 MFC set to  0.000000
10/26/2011	7:03:32 PM	BCl3 MFC set to  0.000000
10/26/2011	7:03:32 PM	PHl3 MFC set to  0.000000
10/26/2011	7:03:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:03:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:03:32 PM	Tube furnace set to 150
10/26/2011	7:04:02 PM	H2 valve closed
10/26/2011	7:04:02 PM	BCl3 valve closed
10/26/2011	7:04:02 PM	PH3 valve closed
10/26/2011	7:04:02 PM	SiCl4 pre valve closed
10/26/2011	7:04:02 PM	SiCl4 post valve closed
10/26/2011	7:04:02 PM	Bypass valve closed
10/26/2011	7:04:02 PM	Bubbler valve closed
10/26/2011	7:04:02 PM	Helium valve opened
10/26/2011	7:04:02 PM	Main Vac valve opened
10/26/2011	7:04:02 PM	Helium MFC set to  20.000000
10/26/2011	7:04:02 PM	H2 MFC set to  0.000000
10/26/2011	7:04:02 PM	BCl3 MFC set to  0.000000
10/26/2011	7:04:02 PM	PHl3 MFC set to  0.000000
10/26/2011	7:04:02 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:04:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:04:02 PM	Tube furnace set to 150
10/26/2011	7:04:32 PM	Helium valve closed
10/26/2011	7:04:32 PM	H2 valve closed
10/26/2011	7:04:32 PM	BCl3 valve closed
10/26/2011	7:04:32 PM	PH3 valve closed
10/26/2011	7:04:32 PM	SiCl4 pre valve closed
10/26/2011	7:04:32 PM	SiCl4 post valve closed
10/26/2011	7:04:32 PM	Bypass valve closed
10/26/2011	7:04:32 PM	Bubbler valve closed
10/26/2011	7:04:32 PM	Main Vac valve opened
10/26/2011	7:04:32 PM	Helium MFC set to  0.000000
10/26/2011	7:04:32 PM	H2 MFC set to  0.000000
10/26/2011	7:04:32 PM	BCl3 MFC set to  0.000000
10/26/2011	7:04:32 PM	PHl3 MFC set to  0.000000
10/26/2011	7:04:32 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:04:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:04:32 PM	Tube furnace set to 150
10/26/2011	7:04:33 PM	Run finished at 7:04 PM
10/26/2011	7:05:03 PM	Recipe started at 7:04 PM
10/26/2011	7:05:03 PM	Helium valve closed
10/26/2011	7:05:03 PM	H2 valve closed
10/26/2011	7:05:03 PM	BCl3 valve closed
10/26/2011	7:05:03 PM	PH3 valve closed
10/26/2011	7:05:03 PM	SiCl4 pre valve closed
10/26/2011	7:05:03 PM	SiCl4 post valve closed
10/26/2011	7:05:03 PM	Bypass valve closed
10/26/2011	7:05:03 PM	Bubbler valve closed
10/26/2011	7:05:03 PM	Main Vac valve opened
10/26/2011	7:05:03 PM	Helium MFC set to  0.000000
10/26/2011	7:05:03 PM	H2 MFC set to  0.000000
10/26/2011	7:05:03 PM	BCl3 MFC set to  0.000000
10/26/2011	7:05:03 PM	PHl3 MFC set to  0.000000
10/26/2011	7:05:03 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:05:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:05:03 PM	Tube furnace set to 150
10/26/2011	7:05:33 PM	H2 valve closed
10/26/2011	7:05:33 PM	BCl3 valve closed
10/26/2011	7:05:33 PM	PH3 valve closed
10/26/2011	7:05:33 PM	SiCl4 pre valve closed
10/26/2011	7:05:33 PM	SiCl4 post valve closed
10/26/2011	7:05:33 PM	Bypass valve closed
10/26/2011	7:05:33 PM	Bubbler valve closed
10/26/2011	7:05:33 PM	Helium valve opened
10/26/2011	7:05:33 PM	Main Vac valve opened
10/26/2011	7:05:33 PM	Helium MFC set to  20.000000
10/26/2011	7:05:33 PM	H2 MFC set to  0.000000
10/26/2011	7:05:33 PM	BCl3 MFC set to  0.000000
10/26/2011	7:05:33 PM	PHl3 MFC set to  0.000000
10/26/2011	7:05:33 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:05:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:05:33 PM	Tube furnace set to 150
10/26/2011	7:06:03 PM	Helium valve closed
10/26/2011	7:06:03 PM	H2 valve closed
10/26/2011	7:06:03 PM	BCl3 valve closed
10/26/2011	7:06:03 PM	PH3 valve closed
10/26/2011	7:06:03 PM	SiCl4 pre valve closed
10/26/2011	7:06:03 PM	SiCl4 post valve closed
10/26/2011	7:06:03 PM	Bypass valve closed
10/26/2011	7:06:03 PM	Bubbler valve closed
10/26/2011	7:06:03 PM	Main Vac valve opened
10/26/2011	7:06:03 PM	Helium MFC set to  0.000000
10/26/2011	7:06:03 PM	H2 MFC set to  0.000000
10/26/2011	7:06:03 PM	BCl3 MFC set to  0.000000
10/26/2011	7:06:03 PM	PHl3 MFC set to  0.000000
10/26/2011	7:06:03 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:06:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:06:03 PM	Tube furnace set to 150
10/26/2011	7:06:33 PM	H2 valve closed
10/26/2011	7:06:33 PM	BCl3 valve closed
10/26/2011	7:06:33 PM	PH3 valve closed
10/26/2011	7:06:33 PM	SiCl4 pre valve closed
10/26/2011	7:06:33 PM	SiCl4 post valve closed
10/26/2011	7:06:33 PM	Bypass valve closed
10/26/2011	7:06:33 PM	Bubbler valve closed
10/26/2011	7:06:33 PM	Helium valve opened
10/26/2011	7:06:33 PM	Main Vac valve opened
10/26/2011	7:06:33 PM	Helium MFC set to  20.000000
10/26/2011	7:06:33 PM	H2 MFC set to  0.000000
10/26/2011	7:06:33 PM	BCl3 MFC set to  0.000000
10/26/2011	7:06:33 PM	PHl3 MFC set to  0.000000
10/26/2011	7:06:33 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:06:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:06:33 PM	Tube furnace set to 150
10/26/2011	7:07:04 PM	Helium valve closed
10/26/2011	7:07:04 PM	H2 valve closed
10/26/2011	7:07:04 PM	BCl3 valve closed
10/26/2011	7:07:04 PM	PH3 valve closed
10/26/2011	7:07:04 PM	SiCl4 pre valve closed
10/26/2011	7:07:04 PM	SiCl4 post valve closed
10/26/2011	7:07:04 PM	Bypass valve closed
10/26/2011	7:07:04 PM	Bubbler valve closed
10/26/2011	7:07:04 PM	Main Vac valve opened
10/26/2011	7:07:04 PM	Helium MFC set to  0.000000
10/26/2011	7:07:04 PM	H2 MFC set to  0.000000
10/26/2011	7:07:04 PM	BCl3 MFC set to  0.000000
10/26/2011	7:07:04 PM	PHl3 MFC set to  0.000000
10/26/2011	7:07:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:07:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:07:04 PM	Tube furnace set to 150
10/26/2011	7:07:34 PM	H2 valve closed
10/26/2011	7:07:34 PM	BCl3 valve closed
10/26/2011	7:07:34 PM	PH3 valve closed
10/26/2011	7:07:34 PM	SiCl4 pre valve closed
10/26/2011	7:07:34 PM	SiCl4 post valve closed
10/26/2011	7:07:34 PM	Bypass valve closed
10/26/2011	7:07:34 PM	Bubbler valve closed
10/26/2011	7:07:34 PM	Helium valve opened
10/26/2011	7:07:34 PM	Main Vac valve opened
10/26/2011	7:07:34 PM	Helium MFC set to  20.000000
10/26/2011	7:07:34 PM	H2 MFC set to  0.000000
10/26/2011	7:07:34 PM	BCl3 MFC set to  0.000000
10/26/2011	7:07:34 PM	PHl3 MFC set to  0.000000
10/26/2011	7:07:34 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:07:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:07:34 PM	Tube furnace set to 150
10/26/2011	7:08:04 PM	Helium valve closed
10/26/2011	7:08:04 PM	H2 valve closed
10/26/2011	7:08:04 PM	BCl3 valve closed
10/26/2011	7:08:04 PM	PH3 valve closed
10/26/2011	7:08:04 PM	SiCl4 pre valve closed
10/26/2011	7:08:04 PM	SiCl4 post valve closed
10/26/2011	7:08:04 PM	Bypass valve closed
10/26/2011	7:08:04 PM	Bubbler valve closed
10/26/2011	7:08:04 PM	Main Vac valve opened
10/26/2011	7:08:04 PM	Helium MFC set to  0.000000
10/26/2011	7:08:04 PM	H2 MFC set to  0.000000
10/26/2011	7:08:04 PM	BCl3 MFC set to  0.000000
10/26/2011	7:08:04 PM	PHl3 MFC set to  0.000000
10/26/2011	7:08:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:08:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:08:04 PM	Tube furnace set to 150
10/26/2011	7:08:34 PM	H2 valve closed
10/26/2011	7:08:34 PM	BCl3 valve closed
10/26/2011	7:08:34 PM	PH3 valve closed
10/26/2011	7:08:34 PM	SiCl4 pre valve closed
10/26/2011	7:08:34 PM	SiCl4 post valve closed
10/26/2011	7:08:34 PM	Bypass valve closed
10/26/2011	7:08:34 PM	Bubbler valve closed
10/26/2011	7:08:34 PM	Helium valve opened
10/26/2011	7:08:34 PM	Main Vac valve opened
10/26/2011	7:08:34 PM	Helium MFC set to  20.000000
10/26/2011	7:08:34 PM	H2 MFC set to  0.000000
10/26/2011	7:08:34 PM	BCl3 MFC set to  0.000000
10/26/2011	7:08:34 PM	PHl3 MFC set to  0.000000
10/26/2011	7:08:34 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:08:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:08:34 PM	Tube furnace set to 150
10/26/2011	7:09:04 PM	Helium valve closed
10/26/2011	7:09:04 PM	H2 valve closed
10/26/2011	7:09:04 PM	BCl3 valve closed
10/26/2011	7:09:04 PM	PH3 valve closed
10/26/2011	7:09:04 PM	SiCl4 pre valve closed
10/26/2011	7:09:04 PM	SiCl4 post valve closed
10/26/2011	7:09:04 PM	Bypass valve closed
10/26/2011	7:09:04 PM	Bubbler valve closed
10/26/2011	7:09:04 PM	Main Vac valve opened
10/26/2011	7:09:04 PM	Helium MFC set to  0.000000
10/26/2011	7:09:04 PM	H2 MFC set to  0.000000
10/26/2011	7:09:04 PM	BCl3 MFC set to  0.000000
10/26/2011	7:09:04 PM	PHl3 MFC set to  0.000000
10/26/2011	7:09:04 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:09:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:09:04 PM	Tube furnace set to 150
10/26/2011	7:09:34 PM	H2 valve closed
10/26/2011	7:09:34 PM	BCl3 valve closed
10/26/2011	7:09:34 PM	PH3 valve closed
10/26/2011	7:09:34 PM	SiCl4 pre valve closed
10/26/2011	7:09:34 PM	SiCl4 post valve closed
10/26/2011	7:09:34 PM	Bypass valve closed
10/26/2011	7:09:34 PM	Bubbler valve closed
10/26/2011	7:09:34 PM	Helium valve opened
10/26/2011	7:09:34 PM	Main Vac valve opened
10/26/2011	7:09:35 PM	Helium MFC set to  20.000000
10/26/2011	7:09:35 PM	H2 MFC set to  0.000000
10/26/2011	7:09:35 PM	BCl3 MFC set to  0.000000
10/26/2011	7:09:35 PM	PHl3 MFC set to  0.000000
10/26/2011	7:09:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:09:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:09:35 PM	Tube furnace set to 150
10/26/2011	7:10:05 PM	Helium valve closed
10/26/2011	7:10:05 PM	H2 valve closed
10/26/2011	7:10:05 PM	BCl3 valve closed
10/26/2011	7:10:05 PM	PH3 valve closed
10/26/2011	7:10:05 PM	SiCl4 pre valve closed
10/26/2011	7:10:05 PM	SiCl4 post valve closed
10/26/2011	7:10:05 PM	Bypass valve closed
10/26/2011	7:10:05 PM	Bubbler valve closed
10/26/2011	7:10:05 PM	Main Vac valve opened
10/26/2011	7:10:05 PM	Helium MFC set to  0.000000
10/26/2011	7:10:05 PM	H2 MFC set to  0.000000
10/26/2011	7:10:05 PM	BCl3 MFC set to  0.000000
10/26/2011	7:10:05 PM	PHl3 MFC set to  0.000000
10/26/2011	7:10:05 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:10:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:10:05 PM	Tube furnace set to 150
10/26/2011	7:10:35 PM	H2 valve closed
10/26/2011	7:10:35 PM	BCl3 valve closed
10/26/2011	7:10:35 PM	PH3 valve closed
10/26/2011	7:10:35 PM	SiCl4 pre valve closed
10/26/2011	7:10:35 PM	SiCl4 post valve closed
10/26/2011	7:10:35 PM	Bypass valve closed
10/26/2011	7:10:35 PM	Bubbler valve closed
10/26/2011	7:10:35 PM	Helium valve opened
10/26/2011	7:10:35 PM	Main Vac valve opened
10/26/2011	7:10:35 PM	Helium MFC set to  20.000000
10/26/2011	7:10:35 PM	H2 MFC set to  0.000000
10/26/2011	7:10:35 PM	BCl3 MFC set to  0.000000
10/26/2011	7:10:35 PM	PHl3 MFC set to  0.000000
10/26/2011	7:10:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:10:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:10:35 PM	Tube furnace set to 150
10/26/2011	7:11:05 PM	Helium valve closed
10/26/2011	7:11:05 PM	H2 valve closed
10/26/2011	7:11:05 PM	BCl3 valve closed
10/26/2011	7:11:05 PM	PH3 valve closed
10/26/2011	7:11:05 PM	SiCl4 pre valve closed
10/26/2011	7:11:05 PM	SiCl4 post valve closed
10/26/2011	7:11:05 PM	Bypass valve closed
10/26/2011	7:11:05 PM	Bubbler valve closed
10/26/2011	7:11:05 PM	Main Vac valve opened
10/26/2011	7:11:05 PM	Helium MFC set to  0.000000
10/26/2011	7:11:05 PM	H2 MFC set to  0.000000
10/26/2011	7:11:05 PM	BCl3 MFC set to  0.000000
10/26/2011	7:11:05 PM	PHl3 MFC set to  0.000000
10/26/2011	7:11:05 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:11:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:11:05 PM	Tube furnace set to 150
10/26/2011	7:11:35 PM	H2 valve closed
10/26/2011	7:11:35 PM	BCl3 valve closed
10/26/2011	7:11:35 PM	PH3 valve closed
10/26/2011	7:11:35 PM	SiCl4 pre valve closed
10/26/2011	7:11:35 PM	SiCl4 post valve closed
10/26/2011	7:11:35 PM	Bypass valve closed
10/26/2011	7:11:35 PM	Bubbler valve closed
10/26/2011	7:11:35 PM	Helium valve opened
10/26/2011	7:11:35 PM	Main Vac valve opened
10/26/2011	7:11:35 PM	Helium MFC set to  20.000000
10/26/2011	7:11:35 PM	H2 MFC set to  0.000000
10/26/2011	7:11:35 PM	BCl3 MFC set to  0.000000
10/26/2011	7:11:35 PM	PHl3 MFC set to  0.000000
10/26/2011	7:11:35 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:11:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:11:35 PM	Tube furnace set to 150
10/26/2011	7:12:06 PM	Helium valve closed
10/26/2011	7:12:06 PM	H2 valve closed
10/26/2011	7:12:06 PM	BCl3 valve closed
10/26/2011	7:12:06 PM	PH3 valve closed
10/26/2011	7:12:06 PM	SiCl4 pre valve closed
10/26/2011	7:12:06 PM	SiCl4 post valve closed
10/26/2011	7:12:06 PM	Bypass valve closed
10/26/2011	7:12:06 PM	Bubbler valve closed
10/26/2011	7:12:06 PM	Main Vac valve opened
10/26/2011	7:12:06 PM	Helium MFC set to  0.000000
10/26/2011	7:12:06 PM	H2 MFC set to  0.000000
10/26/2011	7:12:06 PM	BCl3 MFC set to  0.000000
10/26/2011	7:12:06 PM	PHl3 MFC set to  0.000000
10/26/2011	7:12:06 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:12:06 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:12:06 PM	Tube furnace set to 150
10/26/2011	7:12:36 PM	H2 valve closed
10/26/2011	7:12:36 PM	BCl3 valve closed
10/26/2011	7:12:36 PM	PH3 valve closed
10/26/2011	7:12:36 PM	SiCl4 pre valve closed
10/26/2011	7:12:36 PM	SiCl4 post valve closed
10/26/2011	7:12:36 PM	Bypass valve closed
10/26/2011	7:12:36 PM	Bubbler valve closed
10/26/2011	7:12:36 PM	Helium valve opened
10/26/2011	7:12:36 PM	Main Vac valve opened
10/26/2011	7:12:36 PM	Helium MFC set to  20.000000
10/26/2011	7:12:36 PM	H2 MFC set to  0.000000
10/26/2011	7:12:36 PM	BCl3 MFC set to  0.000000
10/26/2011	7:12:36 PM	PHl3 MFC set to  0.000000
10/26/2011	7:12:36 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:12:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:12:36 PM	Tube furnace set to 150
10/26/2011	7:13:06 PM	Helium valve closed
10/26/2011	7:13:06 PM	H2 valve closed
10/26/2011	7:13:06 PM	BCl3 valve closed
10/26/2011	7:13:06 PM	PH3 valve closed
10/26/2011	7:13:06 PM	SiCl4 pre valve closed
10/26/2011	7:13:06 PM	SiCl4 post valve closed
10/26/2011	7:13:06 PM	Bypass valve closed
10/26/2011	7:13:06 PM	Bubbler valve closed
10/26/2011	7:13:06 PM	Main Vac valve opened
10/26/2011	7:13:06 PM	Helium MFC set to  0.000000
10/26/2011	7:13:06 PM	H2 MFC set to  0.000000
10/26/2011	7:13:06 PM	BCl3 MFC set to  0.000000
10/26/2011	7:13:06 PM	PHl3 MFC set to  0.000000
10/26/2011	7:13:06 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:13:06 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:13:06 PM	Tube furnace set to 150
10/26/2011	7:13:36 PM	H2 valve closed
10/26/2011	7:13:36 PM	BCl3 valve closed
10/26/2011	7:13:36 PM	PH3 valve closed
10/26/2011	7:13:36 PM	SiCl4 pre valve closed
10/26/2011	7:13:36 PM	SiCl4 post valve closed
10/26/2011	7:13:36 PM	Bypass valve closed
10/26/2011	7:13:36 PM	Bubbler valve closed
10/26/2011	7:13:36 PM	Helium valve opened
10/26/2011	7:13:36 PM	Main Vac valve opened
10/26/2011	7:13:36 PM	Helium MFC set to  20.000000
10/26/2011	7:13:36 PM	H2 MFC set to  0.000000
10/26/2011	7:13:36 PM	BCl3 MFC set to  0.000000
10/26/2011	7:13:36 PM	PHl3 MFC set to  0.000000
10/26/2011	7:13:36 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:13:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:13:36 PM	Tube furnace set to 150
10/26/2011	7:14:06 PM	Helium valve closed
10/26/2011	7:14:06 PM	H2 valve closed
10/26/2011	7:14:06 PM	BCl3 valve closed
10/26/2011	7:14:06 PM	PH3 valve closed
10/26/2011	7:14:06 PM	SiCl4 pre valve closed
10/26/2011	7:14:06 PM	SiCl4 post valve closed
10/26/2011	7:14:06 PM	Bypass valve closed
10/26/2011	7:14:06 PM	Bubbler valve closed
10/26/2011	7:14:06 PM	Main Vac valve opened
10/26/2011	7:14:06 PM	Helium MFC set to  0.000000
10/26/2011	7:14:06 PM	H2 MFC set to  0.000000
10/26/2011	7:14:06 PM	BCl3 MFC set to  0.000000
10/26/2011	7:14:06 PM	PHl3 MFC set to  0.000000
10/26/2011	7:14:06 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:14:06 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:14:07 PM	Tube furnace set to 150
10/26/2011	7:14:37 PM	H2 valve closed
10/26/2011	7:14:37 PM	BCl3 valve closed
10/26/2011	7:14:37 PM	PH3 valve closed
10/26/2011	7:14:37 PM	SiCl4 pre valve closed
10/26/2011	7:14:37 PM	SiCl4 post valve closed
10/26/2011	7:14:37 PM	Bypass valve closed
10/26/2011	7:14:37 PM	Bubbler valve closed
10/26/2011	7:14:37 PM	Helium valve opened
10/26/2011	7:14:37 PM	Main Vac valve opened
10/26/2011	7:14:37 PM	Helium MFC set to  20.000000
10/26/2011	7:14:37 PM	H2 MFC set to  0.000000
10/26/2011	7:14:37 PM	BCl3 MFC set to  0.000000
10/26/2011	7:14:37 PM	PHl3 MFC set to  0.000000
10/26/2011	7:14:37 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:14:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:14:37 PM	Tube furnace set to 150
10/26/2011	7:15:07 PM	Helium valve closed
10/26/2011	7:15:07 PM	H2 valve closed
10/26/2011	7:15:07 PM	BCl3 valve closed
10/26/2011	7:15:07 PM	PH3 valve closed
10/26/2011	7:15:07 PM	SiCl4 pre valve closed
10/26/2011	7:15:07 PM	SiCl4 post valve closed
10/26/2011	7:15:07 PM	Bypass valve closed
10/26/2011	7:15:07 PM	Bubbler valve closed
10/26/2011	7:15:07 PM	Main Vac valve opened
10/26/2011	7:15:07 PM	Helium MFC set to  0.000000
10/26/2011	7:15:07 PM	H2 MFC set to  0.000000
10/26/2011	7:15:07 PM	BCl3 MFC set to  0.000000
10/26/2011	7:15:07 PM	PHl3 MFC set to  0.000000
10/26/2011	7:15:07 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:15:07 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:15:07 PM	Tube furnace set to 150
10/26/2011	7:15:08 PM	Run finished at 7:15 PM
10/26/2011	7:15:26 PM	Recipe started at 7:15 PM
10/26/2011	7:15:26 PM	Helium valve closed
10/26/2011	7:15:26 PM	H2 valve closed
10/26/2011	7:15:26 PM	BCl3 valve closed
10/26/2011	7:15:26 PM	PH3 valve closed
10/26/2011	7:15:26 PM	SiCl4 pre valve closed
10/26/2011	7:15:26 PM	SiCl4 post valve closed
10/26/2011	7:15:26 PM	Bypass valve closed
10/26/2011	7:15:26 PM	Bubbler valve closed
10/26/2011	7:15:26 PM	Main Vac valve opened
10/26/2011	7:15:26 PM	Helium MFC set to  0.000000
10/26/2011	7:15:26 PM	H2 MFC set to  0.000000
10/26/2011	7:15:26 PM	BCl3 MFC set to  0.000000
10/26/2011	7:15:26 PM	PHl3 MFC set to  0.000000
10/26/2011	7:15:26 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:15:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:15:26 PM	Tube furnace set to 150
10/26/2011	7:15:56 PM	H2 valve closed
10/26/2011	7:15:56 PM	BCl3 valve closed
10/26/2011	7:15:56 PM	PH3 valve closed
10/26/2011	7:15:56 PM	SiCl4 pre valve closed
10/26/2011	7:15:56 PM	SiCl4 post valve closed
10/26/2011	7:15:56 PM	Bypass valve closed
10/26/2011	7:15:56 PM	Bubbler valve closed
10/26/2011	7:15:56 PM	Helium valve opened
10/26/2011	7:15:56 PM	Main Vac valve opened
10/26/2011	7:15:56 PM	Helium MFC set to  20.000000
10/26/2011	7:15:56 PM	H2 MFC set to  0.000000
10/26/2011	7:15:56 PM	BCl3 MFC set to  0.000000
10/26/2011	7:15:56 PM	PHl3 MFC set to  0.000000
10/26/2011	7:15:56 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:15:56 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:15:57 PM	Tube furnace set to 150
10/26/2011	7:16:27 PM	Helium valve closed
10/26/2011	7:16:27 PM	H2 valve closed
10/26/2011	7:16:27 PM	BCl3 valve closed
10/26/2011	7:16:27 PM	PH3 valve closed
10/26/2011	7:16:27 PM	SiCl4 pre valve closed
10/26/2011	7:16:27 PM	SiCl4 post valve closed
10/26/2011	7:16:27 PM	Bypass valve closed
10/26/2011	7:16:27 PM	Bubbler valve closed
10/26/2011	7:16:27 PM	Main Vac valve opened
10/26/2011	7:16:27 PM	Helium MFC set to  0.000000
10/26/2011	7:16:27 PM	H2 MFC set to  0.000000
10/26/2011	7:16:27 PM	BCl3 MFC set to  0.000000
10/26/2011	7:16:27 PM	PHl3 MFC set to  0.000000
10/26/2011	7:16:27 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:16:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:16:27 PM	Tube furnace set to 150
10/26/2011	7:16:57 PM	H2 valve closed
10/26/2011	7:16:57 PM	BCl3 valve closed
10/26/2011	7:16:57 PM	PH3 valve closed
10/26/2011	7:16:57 PM	SiCl4 pre valve closed
10/26/2011	7:16:57 PM	SiCl4 post valve closed
10/26/2011	7:16:57 PM	Bypass valve closed
10/26/2011	7:16:57 PM	Bubbler valve closed
10/26/2011	7:16:57 PM	Helium valve opened
10/26/2011	7:16:57 PM	Main Vac valve opened
10/26/2011	7:16:57 PM	Helium MFC set to  20.000000
10/26/2011	7:16:57 PM	H2 MFC set to  0.000000
10/26/2011	7:16:57 PM	BCl3 MFC set to  0.000000
10/26/2011	7:16:57 PM	PHl3 MFC set to  0.000000
10/26/2011	7:16:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:16:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:16:57 PM	Tube furnace set to 150
10/26/2011	7:17:27 PM	Helium valve closed
10/26/2011	7:17:27 PM	H2 valve closed
10/26/2011	7:17:27 PM	BCl3 valve closed
10/26/2011	7:17:27 PM	PH3 valve closed
10/26/2011	7:17:27 PM	SiCl4 pre valve closed
10/26/2011	7:17:27 PM	SiCl4 post valve closed
10/26/2011	7:17:27 PM	Bypass valve closed
10/26/2011	7:17:27 PM	Bubbler valve closed
10/26/2011	7:17:27 PM	Main Vac valve opened
10/26/2011	7:17:27 PM	Helium MFC set to  0.000000
10/26/2011	7:17:27 PM	H2 MFC set to  0.000000
10/26/2011	7:17:27 PM	BCl3 MFC set to  0.000000
10/26/2011	7:17:27 PM	PHl3 MFC set to  0.000000
10/26/2011	7:17:27 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:17:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:17:27 PM	Tube furnace set to 150
10/26/2011	7:17:57 PM	H2 valve closed
10/26/2011	7:17:57 PM	BCl3 valve closed
10/26/2011	7:17:57 PM	PH3 valve closed
10/26/2011	7:17:57 PM	SiCl4 pre valve closed
10/26/2011	7:17:57 PM	SiCl4 post valve closed
10/26/2011	7:17:57 PM	Bypass valve closed
10/26/2011	7:17:57 PM	Bubbler valve closed
10/26/2011	7:17:57 PM	Helium valve opened
10/26/2011	7:17:57 PM	Main Vac valve opened
10/26/2011	7:17:57 PM	Helium MFC set to  20.000000
10/26/2011	7:17:57 PM	H2 MFC set to  0.000000
10/26/2011	7:17:57 PM	BCl3 MFC set to  0.000000
10/26/2011	7:17:57 PM	PHl3 MFC set to  0.000000
10/26/2011	7:17:57 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:17:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:17:57 PM	Tube furnace set to 150
10/26/2011	7:18:27 PM	Helium valve closed
10/26/2011	7:18:27 PM	H2 valve closed
10/26/2011	7:18:27 PM	BCl3 valve closed
10/26/2011	7:18:27 PM	PH3 valve closed
10/26/2011	7:18:27 PM	SiCl4 pre valve closed
10/26/2011	7:18:27 PM	SiCl4 post valve closed
10/26/2011	7:18:27 PM	Bypass valve closed
10/26/2011	7:18:27 PM	Bubbler valve closed
10/26/2011	7:18:27 PM	Main Vac valve opened
10/26/2011	7:18:27 PM	Helium MFC set to  0.000000
10/26/2011	7:18:27 PM	H2 MFC set to  0.000000
10/26/2011	7:18:27 PM	BCl3 MFC set to  0.000000
10/26/2011	7:18:27 PM	PHl3 MFC set to  0.000000
10/26/2011	7:18:27 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:18:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:18:28 PM	Tube furnace set to 150
10/26/2011	7:18:58 PM	H2 valve closed
10/26/2011	7:18:58 PM	BCl3 valve closed
10/26/2011	7:18:58 PM	PH3 valve closed
10/26/2011	7:18:58 PM	SiCl4 pre valve closed
10/26/2011	7:18:58 PM	SiCl4 post valve closed
10/26/2011	7:18:58 PM	Bypass valve closed
10/26/2011	7:18:58 PM	Bubbler valve closed
10/26/2011	7:18:58 PM	Helium valve opened
10/26/2011	7:18:58 PM	Main Vac valve opened
10/26/2011	7:18:58 PM	Helium MFC set to  20.000000
10/26/2011	7:18:58 PM	H2 MFC set to  0.000000
10/26/2011	7:18:58 PM	BCl3 MFC set to  0.000000
10/26/2011	7:18:58 PM	PHl3 MFC set to  0.000000
10/26/2011	7:18:58 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:18:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:18:58 PM	Tube furnace set to 150
10/26/2011	7:19:28 PM	Helium valve closed
10/26/2011	7:19:28 PM	H2 valve closed
10/26/2011	7:19:28 PM	BCl3 valve closed
10/26/2011	7:19:28 PM	PH3 valve closed
10/26/2011	7:19:28 PM	SiCl4 pre valve closed
10/26/2011	7:19:28 PM	SiCl4 post valve closed
10/26/2011	7:19:28 PM	Bypass valve closed
10/26/2011	7:19:28 PM	Bubbler valve closed
10/26/2011	7:19:28 PM	Main Vac valve opened
10/26/2011	7:19:28 PM	Helium MFC set to  0.000000
10/26/2011	7:19:28 PM	H2 MFC set to  0.000000
10/26/2011	7:19:28 PM	BCl3 MFC set to  0.000000
10/26/2011	7:19:28 PM	PHl3 MFC set to  0.000000
10/26/2011	7:19:28 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:19:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:19:28 PM	Tube furnace set to 150
10/26/2011	7:19:58 PM	H2 valve closed
10/26/2011	7:19:58 PM	BCl3 valve closed
10/26/2011	7:19:58 PM	PH3 valve closed
10/26/2011	7:19:58 PM	SiCl4 pre valve closed
10/26/2011	7:19:58 PM	SiCl4 post valve closed
10/26/2011	7:19:58 PM	Bypass valve closed
10/26/2011	7:19:58 PM	Bubbler valve closed
10/26/2011	7:19:58 PM	Helium valve opened
10/26/2011	7:19:58 PM	Main Vac valve opened
10/26/2011	7:19:58 PM	Helium MFC set to  20.000000
10/26/2011	7:19:58 PM	H2 MFC set to  0.000000
10/26/2011	7:19:58 PM	BCl3 MFC set to  0.000000
10/26/2011	7:19:58 PM	PHl3 MFC set to  0.000000
10/26/2011	7:19:58 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:19:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:19:58 PM	Tube furnace set to 150
10/26/2011	7:20:28 PM	Helium valve closed
10/26/2011	7:20:28 PM	H2 valve closed
10/26/2011	7:20:28 PM	BCl3 valve closed
10/26/2011	7:20:28 PM	PH3 valve closed
10/26/2011	7:20:28 PM	SiCl4 pre valve closed
10/26/2011	7:20:28 PM	SiCl4 post valve closed
10/26/2011	7:20:28 PM	Bypass valve closed
10/26/2011	7:20:28 PM	Bubbler valve closed
10/26/2011	7:20:28 PM	Main Vac valve opened
10/26/2011	7:20:28 PM	Helium MFC set to  0.000000
10/26/2011	7:20:28 PM	H2 MFC set to  0.000000
10/26/2011	7:20:28 PM	BCl3 MFC set to  0.000000
10/26/2011	7:20:28 PM	PHl3 MFC set to  0.000000
10/26/2011	7:20:28 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:20:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:20:28 PM	Tube furnace set to 150
10/26/2011	7:20:59 PM	H2 valve closed
10/26/2011	7:20:59 PM	BCl3 valve closed
10/26/2011	7:20:59 PM	PH3 valve closed
10/26/2011	7:20:59 PM	SiCl4 pre valve closed
10/26/2011	7:20:59 PM	SiCl4 post valve closed
10/26/2011	7:20:59 PM	Bypass valve closed
10/26/2011	7:20:59 PM	Bubbler valve closed
10/26/2011	7:20:59 PM	Helium valve opened
10/26/2011	7:20:59 PM	Main Vac valve opened
10/26/2011	7:20:59 PM	Helium MFC set to  20.000000
10/26/2011	7:20:59 PM	H2 MFC set to  0.000000
10/26/2011	7:20:59 PM	BCl3 MFC set to  0.000000
10/26/2011	7:20:59 PM	PHl3 MFC set to  0.000000
10/26/2011	7:20:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:20:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:20:59 PM	Tube furnace set to 150
10/26/2011	7:21:29 PM	Helium valve closed
10/26/2011	7:21:29 PM	H2 valve closed
10/26/2011	7:21:29 PM	BCl3 valve closed
10/26/2011	7:21:29 PM	PH3 valve closed
10/26/2011	7:21:29 PM	SiCl4 pre valve closed
10/26/2011	7:21:29 PM	SiCl4 post valve closed
10/26/2011	7:21:29 PM	Bypass valve closed
10/26/2011	7:21:29 PM	Bubbler valve closed
10/26/2011	7:21:29 PM	Main Vac valve opened
10/26/2011	7:21:29 PM	Helium MFC set to  0.000000
10/26/2011	7:21:29 PM	H2 MFC set to  0.000000
10/26/2011	7:21:29 PM	BCl3 MFC set to  0.000000
10/26/2011	7:21:29 PM	PHl3 MFC set to  0.000000
10/26/2011	7:21:29 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:21:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:21:29 PM	Tube furnace set to 150
10/26/2011	7:21:59 PM	H2 valve closed
10/26/2011	7:21:59 PM	BCl3 valve closed
10/26/2011	7:21:59 PM	PH3 valve closed
10/26/2011	7:21:59 PM	SiCl4 pre valve closed
10/26/2011	7:21:59 PM	SiCl4 post valve closed
10/26/2011	7:21:59 PM	Bypass valve closed
10/26/2011	7:21:59 PM	Bubbler valve closed
10/26/2011	7:21:59 PM	Helium valve opened
10/26/2011	7:21:59 PM	Main Vac valve opened
10/26/2011	7:21:59 PM	Helium MFC set to  20.000000
10/26/2011	7:21:59 PM	H2 MFC set to  0.000000
10/26/2011	7:21:59 PM	BCl3 MFC set to  0.000000
10/26/2011	7:21:59 PM	PHl3 MFC set to  0.000000
10/26/2011	7:21:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:21:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:21:59 PM	Tube furnace set to 150
10/26/2011	7:22:29 PM	Helium valve closed
10/26/2011	7:22:29 PM	H2 valve closed
10/26/2011	7:22:29 PM	BCl3 valve closed
10/26/2011	7:22:29 PM	PH3 valve closed
10/26/2011	7:22:29 PM	SiCl4 pre valve closed
10/26/2011	7:22:29 PM	SiCl4 post valve closed
10/26/2011	7:22:29 PM	Bypass valve closed
10/26/2011	7:22:29 PM	Bubbler valve closed
10/26/2011	7:22:29 PM	Main Vac valve opened
10/26/2011	7:22:29 PM	Helium MFC set to  0.000000
10/26/2011	7:22:29 PM	H2 MFC set to  0.000000
10/26/2011	7:22:29 PM	BCl3 MFC set to  0.000000
10/26/2011	7:22:29 PM	PHl3 MFC set to  0.000000
10/26/2011	7:22:29 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:22:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:22:29 PM	Tube furnace set to 150
10/26/2011	7:22:59 PM	H2 valve closed
10/26/2011	7:22:59 PM	BCl3 valve closed
10/26/2011	7:22:59 PM	PH3 valve closed
10/26/2011	7:22:59 PM	SiCl4 pre valve closed
10/26/2011	7:22:59 PM	SiCl4 post valve closed
10/26/2011	7:22:59 PM	Bypass valve closed
10/26/2011	7:22:59 PM	Bubbler valve closed
10/26/2011	7:22:59 PM	Helium valve opened
10/26/2011	7:22:59 PM	Main Vac valve opened
10/26/2011	7:22:59 PM	Helium MFC set to  20.000000
10/26/2011	7:22:59 PM	H2 MFC set to  0.000000
10/26/2011	7:22:59 PM	BCl3 MFC set to  0.000000
10/26/2011	7:22:59 PM	PHl3 MFC set to  0.000000
10/26/2011	7:22:59 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:22:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:23:00 PM	Tube furnace set to 150
10/26/2011	7:23:30 PM	Helium valve closed
10/26/2011	7:23:30 PM	H2 valve closed
10/26/2011	7:23:30 PM	BCl3 valve closed
10/26/2011	7:23:30 PM	PH3 valve closed
10/26/2011	7:23:30 PM	SiCl4 pre valve closed
10/26/2011	7:23:30 PM	SiCl4 post valve closed
10/26/2011	7:23:30 PM	Bypass valve closed
10/26/2011	7:23:30 PM	Bubbler valve closed
10/26/2011	7:23:30 PM	Main Vac valve opened
10/26/2011	7:23:30 PM	Helium MFC set to  0.000000
10/26/2011	7:23:30 PM	H2 MFC set to  0.000000
10/26/2011	7:23:30 PM	BCl3 MFC set to  0.000000
10/26/2011	7:23:30 PM	PHl3 MFC set to  0.000000
10/26/2011	7:23:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:23:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:23:30 PM	Tube furnace set to 150
10/26/2011	7:24:00 PM	H2 valve closed
10/26/2011	7:24:00 PM	BCl3 valve closed
10/26/2011	7:24:00 PM	PH3 valve closed
10/26/2011	7:24:00 PM	SiCl4 pre valve closed
10/26/2011	7:24:00 PM	SiCl4 post valve closed
10/26/2011	7:24:00 PM	Bypass valve closed
10/26/2011	7:24:00 PM	Bubbler valve closed
10/26/2011	7:24:00 PM	Helium valve opened
10/26/2011	7:24:00 PM	Main Vac valve opened
10/26/2011	7:24:00 PM	Helium MFC set to  20.000000
10/26/2011	7:24:00 PM	H2 MFC set to  0.000000
10/26/2011	7:24:00 PM	BCl3 MFC set to  0.000000
10/26/2011	7:24:00 PM	PHl3 MFC set to  0.000000
10/26/2011	7:24:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:24:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:24:00 PM	Tube furnace set to 150
10/26/2011	7:24:30 PM	Helium valve closed
10/26/2011	7:24:30 PM	H2 valve closed
10/26/2011	7:24:30 PM	BCl3 valve closed
10/26/2011	7:24:30 PM	PH3 valve closed
10/26/2011	7:24:30 PM	SiCl4 pre valve closed
10/26/2011	7:24:30 PM	SiCl4 post valve closed
10/26/2011	7:24:30 PM	Bypass valve closed
10/26/2011	7:24:30 PM	Bubbler valve closed
10/26/2011	7:24:30 PM	Main Vac valve opened
10/26/2011	7:24:30 PM	Helium MFC set to  0.000000
10/26/2011	7:24:30 PM	H2 MFC set to  0.000000
10/26/2011	7:24:30 PM	BCl3 MFC set to  0.000000
10/26/2011	7:24:30 PM	PHl3 MFC set to  0.000000
10/26/2011	7:24:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:24:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:24:30 PM	Tube furnace set to 150
10/26/2011	7:25:00 PM	H2 valve closed
10/26/2011	7:25:00 PM	BCl3 valve closed
10/26/2011	7:25:00 PM	PH3 valve closed
10/26/2011	7:25:00 PM	SiCl4 pre valve closed
10/26/2011	7:25:00 PM	SiCl4 post valve closed
10/26/2011	7:25:00 PM	Bypass valve closed
10/26/2011	7:25:00 PM	Bubbler valve closed
10/26/2011	7:25:00 PM	Helium valve opened
10/26/2011	7:25:00 PM	Main Vac valve opened
10/26/2011	7:25:00 PM	Helium MFC set to  20.000000
10/26/2011	7:25:00 PM	H2 MFC set to  0.000000
10/26/2011	7:25:00 PM	BCl3 MFC set to  0.000000
10/26/2011	7:25:00 PM	PHl3 MFC set to  0.000000
10/26/2011	7:25:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:25:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:25:00 PM	Tube furnace set to 150
10/26/2011	7:25:30 PM	Helium valve closed
10/26/2011	7:25:30 PM	H2 valve closed
10/26/2011	7:25:30 PM	BCl3 valve closed
10/26/2011	7:25:30 PM	PH3 valve closed
10/26/2011	7:25:30 PM	SiCl4 pre valve closed
10/26/2011	7:25:30 PM	SiCl4 post valve closed
10/26/2011	7:25:30 PM	Bypass valve closed
10/26/2011	7:25:30 PM	Bubbler valve closed
10/26/2011	7:25:30 PM	Main Vac valve opened
10/26/2011	7:25:30 PM	Helium MFC set to  0.000000
10/26/2011	7:25:30 PM	H2 MFC set to  0.000000
10/26/2011	7:25:30 PM	BCl3 MFC set to  0.000000
10/26/2011	7:25:30 PM	PHl3 MFC set to  0.000000
10/26/2011	7:25:30 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:25:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:25:31 PM	Tube furnace set to 150
10/26/2011	7:25:32 PM	Run finished at 7:25 PM
10/26/2011	7:26:42 PM	Main Vac valve closed
10/26/2011	7:26:51 PM	Main Vac valve opened
10/26/2011	7:27:12 PM	Recipe started at 7:27 PM
10/26/2011	7:27:12 PM	Helium valve closed
10/26/2011	7:27:12 PM	H2 valve closed
10/26/2011	7:27:12 PM	BCl3 valve closed
10/26/2011	7:27:12 PM	PH3 valve closed
10/26/2011	7:27:12 PM	SiCl4 pre valve closed
10/26/2011	7:27:12 PM	SiCl4 post valve closed
10/26/2011	7:27:12 PM	Bypass valve closed
10/26/2011	7:27:12 PM	Bubbler valve closed
10/26/2011	7:27:12 PM	Main Vac valve opened
10/26/2011	7:27:12 PM	Helium MFC set to  0.000000
10/26/2011	7:27:12 PM	H2 MFC set to  0.000000
10/26/2011	7:27:12 PM	BCl3 MFC set to  0.000000
10/26/2011	7:27:12 PM	PHl3 MFC set to  0.000000
10/26/2011	7:27:12 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:27:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:27:12 PM	Tube furnace set to 150
10/26/2011	7:27:42 PM	H2 valve closed
10/26/2011	7:27:42 PM	BCl3 valve closed
10/26/2011	7:27:42 PM	PH3 valve closed
10/26/2011	7:27:42 PM	SiCl4 pre valve closed
10/26/2011	7:27:42 PM	SiCl4 post valve closed
10/26/2011	7:27:42 PM	Bypass valve closed
10/26/2011	7:27:42 PM	Bubbler valve closed
10/26/2011	7:27:42 PM	Helium valve opened
10/26/2011	7:27:42 PM	Main Vac valve opened
10/26/2011	7:27:42 PM	Helium MFC set to  20.000000
10/26/2011	7:27:42 PM	H2 MFC set to  0.000000
10/26/2011	7:27:42 PM	BCl3 MFC set to  0.000000
10/26/2011	7:27:42 PM	PHl3 MFC set to  0.000000
10/26/2011	7:27:42 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:27:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:27:42 PM	Tube furnace set to 150
10/26/2011	7:28:12 PM	Helium valve closed
10/26/2011	7:28:12 PM	H2 valve closed
10/26/2011	7:28:12 PM	BCl3 valve closed
10/26/2011	7:28:12 PM	PH3 valve closed
10/26/2011	7:28:12 PM	SiCl4 pre valve closed
10/26/2011	7:28:12 PM	SiCl4 post valve closed
10/26/2011	7:28:12 PM	Bypass valve closed
10/26/2011	7:28:12 PM	Bubbler valve closed
10/26/2011	7:28:12 PM	Main Vac valve opened
10/26/2011	7:28:12 PM	Helium MFC set to  0.000000
10/26/2011	7:28:12 PM	H2 MFC set to  0.000000
10/26/2011	7:28:12 PM	BCl3 MFC set to  0.000000
10/26/2011	7:28:12 PM	PHl3 MFC set to  0.000000
10/26/2011	7:28:12 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:28:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:28:12 PM	Tube furnace set to 150
10/26/2011	7:28:42 PM	H2 valve closed
10/26/2011	7:28:42 PM	BCl3 valve closed
10/26/2011	7:28:42 PM	PH3 valve closed
10/26/2011	7:28:42 PM	SiCl4 pre valve closed
10/26/2011	7:28:42 PM	SiCl4 post valve closed
10/26/2011	7:28:42 PM	Bypass valve closed
10/26/2011	7:28:42 PM	Bubbler valve closed
10/26/2011	7:28:42 PM	Helium valve opened
10/26/2011	7:28:42 PM	Main Vac valve opened
10/26/2011	7:28:42 PM	Helium MFC set to  20.000000
10/26/2011	7:28:42 PM	H2 MFC set to  0.000000
10/26/2011	7:28:42 PM	BCl3 MFC set to  0.000000
10/26/2011	7:28:42 PM	PHl3 MFC set to  0.000000
10/26/2011	7:28:42 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:28:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:28:43 PM	Tube furnace set to 150
10/26/2011	7:29:13 PM	Helium valve closed
10/26/2011	7:29:13 PM	H2 valve closed
10/26/2011	7:29:13 PM	BCl3 valve closed
10/26/2011	7:29:13 PM	PH3 valve closed
10/26/2011	7:29:13 PM	SiCl4 pre valve closed
10/26/2011	7:29:13 PM	SiCl4 post valve closed
10/26/2011	7:29:13 PM	Bypass valve closed
10/26/2011	7:29:13 PM	Bubbler valve closed
10/26/2011	7:29:13 PM	Main Vac valve opened
10/26/2011	7:29:13 PM	Helium MFC set to  0.000000
10/26/2011	7:29:13 PM	H2 MFC set to  0.000000
10/26/2011	7:29:13 PM	BCl3 MFC set to  0.000000
10/26/2011	7:29:13 PM	PHl3 MFC set to  0.000000
10/26/2011	7:29:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:29:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:29:13 PM	Tube furnace set to 150
10/26/2011	7:29:43 PM	H2 valve closed
10/26/2011	7:29:43 PM	BCl3 valve closed
10/26/2011	7:29:43 PM	PH3 valve closed
10/26/2011	7:29:43 PM	SiCl4 pre valve closed
10/26/2011	7:29:43 PM	SiCl4 post valve closed
10/26/2011	7:29:43 PM	Bypass valve closed
10/26/2011	7:29:43 PM	Bubbler valve closed
10/26/2011	7:29:43 PM	Helium valve opened
10/26/2011	7:29:43 PM	Main Vac valve opened
10/26/2011	7:29:43 PM	Helium MFC set to  20.000000
10/26/2011	7:29:43 PM	H2 MFC set to  0.000000
10/26/2011	7:29:43 PM	BCl3 MFC set to  0.000000
10/26/2011	7:29:43 PM	PHl3 MFC set to  0.000000
10/26/2011	7:29:43 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:29:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:29:43 PM	Tube furnace set to 150
10/26/2011	7:30:13 PM	Helium valve closed
10/26/2011	7:30:13 PM	H2 valve closed
10/26/2011	7:30:13 PM	BCl3 valve closed
10/26/2011	7:30:13 PM	PH3 valve closed
10/26/2011	7:30:13 PM	SiCl4 pre valve closed
10/26/2011	7:30:13 PM	SiCl4 post valve closed
10/26/2011	7:30:13 PM	Bypass valve closed
10/26/2011	7:30:13 PM	Bubbler valve closed
10/26/2011	7:30:13 PM	Main Vac valve opened
10/26/2011	7:30:13 PM	Helium MFC set to  0.000000
10/26/2011	7:30:13 PM	H2 MFC set to  0.000000
10/26/2011	7:30:13 PM	BCl3 MFC set to  0.000000
10/26/2011	7:30:13 PM	PHl3 MFC set to  0.000000
10/26/2011	7:30:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:30:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:30:13 PM	Tube furnace set to 150
10/26/2011	7:30:43 PM	H2 valve closed
10/26/2011	7:30:43 PM	BCl3 valve closed
10/26/2011	7:30:43 PM	PH3 valve closed
10/26/2011	7:30:43 PM	SiCl4 pre valve closed
10/26/2011	7:30:43 PM	SiCl4 post valve closed
10/26/2011	7:30:43 PM	Bypass valve closed
10/26/2011	7:30:43 PM	Bubbler valve closed
10/26/2011	7:30:43 PM	Helium valve opened
10/26/2011	7:30:43 PM	Main Vac valve opened
10/26/2011	7:30:43 PM	Helium MFC set to  20.000000
10/26/2011	7:30:43 PM	H2 MFC set to  0.000000
10/26/2011	7:30:43 PM	BCl3 MFC set to  0.000000
10/26/2011	7:30:43 PM	PHl3 MFC set to  0.000000
10/26/2011	7:30:43 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:30:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:30:43 PM	Tube furnace set to 150
10/26/2011	7:31:13 PM	Helium valve closed
10/26/2011	7:31:13 PM	H2 valve closed
10/26/2011	7:31:13 PM	BCl3 valve closed
10/26/2011	7:31:13 PM	PH3 valve closed
10/26/2011	7:31:13 PM	SiCl4 pre valve closed
10/26/2011	7:31:13 PM	SiCl4 post valve closed
10/26/2011	7:31:13 PM	Bypass valve closed
10/26/2011	7:31:13 PM	Bubbler valve closed
10/26/2011	7:31:13 PM	Main Vac valve opened
10/26/2011	7:31:13 PM	Helium MFC set to  0.000000
10/26/2011	7:31:13 PM	H2 MFC set to  0.000000
10/26/2011	7:31:13 PM	BCl3 MFC set to  0.000000
10/26/2011	7:31:13 PM	PHl3 MFC set to  0.000000
10/26/2011	7:31:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:31:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:31:13 PM	Tube furnace set to 150
10/26/2011	7:31:44 PM	H2 valve closed
10/26/2011	7:31:44 PM	BCl3 valve closed
10/26/2011	7:31:44 PM	PH3 valve closed
10/26/2011	7:31:44 PM	SiCl4 pre valve closed
10/26/2011	7:31:44 PM	SiCl4 post valve closed
10/26/2011	7:31:44 PM	Bypass valve closed
10/26/2011	7:31:44 PM	Bubbler valve closed
10/26/2011	7:31:44 PM	Helium valve opened
10/26/2011	7:31:44 PM	Main Vac valve opened
10/26/2011	7:31:44 PM	Helium MFC set to  20.000000
10/26/2011	7:31:44 PM	H2 MFC set to  0.000000
10/26/2011	7:31:44 PM	BCl3 MFC set to  0.000000
10/26/2011	7:31:44 PM	PHl3 MFC set to  0.000000
10/26/2011	7:31:44 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:31:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:31:44 PM	Tube furnace set to 150
10/26/2011	7:32:14 PM	Helium valve closed
10/26/2011	7:32:14 PM	H2 valve closed
10/26/2011	7:32:14 PM	BCl3 valve closed
10/26/2011	7:32:14 PM	PH3 valve closed
10/26/2011	7:32:14 PM	SiCl4 pre valve closed
10/26/2011	7:32:14 PM	SiCl4 post valve closed
10/26/2011	7:32:14 PM	Bypass valve closed
10/26/2011	7:32:14 PM	Bubbler valve closed
10/26/2011	7:32:14 PM	Main Vac valve opened
10/26/2011	7:32:14 PM	Helium MFC set to  0.000000
10/26/2011	7:32:14 PM	H2 MFC set to  0.000000
10/26/2011	7:32:14 PM	BCl3 MFC set to  0.000000
10/26/2011	7:32:14 PM	PHl3 MFC set to  0.000000
10/26/2011	7:32:14 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:32:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:32:14 PM	Tube furnace set to 150
10/26/2011	7:32:44 PM	H2 valve closed
10/26/2011	7:32:44 PM	BCl3 valve closed
10/26/2011	7:32:44 PM	PH3 valve closed
10/26/2011	7:32:44 PM	SiCl4 pre valve closed
10/26/2011	7:32:44 PM	SiCl4 post valve closed
10/26/2011	7:32:44 PM	Bypass valve closed
10/26/2011	7:32:44 PM	Bubbler valve closed
10/26/2011	7:32:44 PM	Helium valve opened
10/26/2011	7:32:44 PM	Main Vac valve opened
10/26/2011	7:32:44 PM	Helium MFC set to  20.000000
10/26/2011	7:32:44 PM	H2 MFC set to  0.000000
10/26/2011	7:32:44 PM	BCl3 MFC set to  0.000000
10/26/2011	7:32:44 PM	PHl3 MFC set to  0.000000
10/26/2011	7:32:44 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:32:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:32:44 PM	Tube furnace set to 150
10/26/2011	7:33:14 PM	Helium valve closed
10/26/2011	7:33:14 PM	H2 valve closed
10/26/2011	7:33:14 PM	BCl3 valve closed
10/26/2011	7:33:14 PM	PH3 valve closed
10/26/2011	7:33:14 PM	SiCl4 pre valve closed
10/26/2011	7:33:14 PM	SiCl4 post valve closed
10/26/2011	7:33:14 PM	Bypass valve closed
10/26/2011	7:33:14 PM	Bubbler valve closed
10/26/2011	7:33:14 PM	Main Vac valve opened
10/26/2011	7:33:14 PM	Helium MFC set to  0.000000
10/26/2011	7:33:14 PM	H2 MFC set to  0.000000
10/26/2011	7:33:14 PM	BCl3 MFC set to  0.000000
10/26/2011	7:33:14 PM	PHl3 MFC set to  0.000000
10/26/2011	7:33:14 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:33:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:33:14 PM	Tube furnace set to 150
10/26/2011	7:33:44 PM	H2 valve closed
10/26/2011	7:33:44 PM	BCl3 valve closed
10/26/2011	7:33:44 PM	PH3 valve closed
10/26/2011	7:33:44 PM	SiCl4 pre valve closed
10/26/2011	7:33:44 PM	SiCl4 post valve closed
10/26/2011	7:33:44 PM	Bypass valve closed
10/26/2011	7:33:44 PM	Bubbler valve closed
10/26/2011	7:33:44 PM	Helium valve opened
10/26/2011	7:33:44 PM	Main Vac valve opened
10/26/2011	7:33:44 PM	Helium MFC set to  20.000000
10/26/2011	7:33:44 PM	H2 MFC set to  0.000000
10/26/2011	7:33:44 PM	BCl3 MFC set to  0.000000
10/26/2011	7:33:44 PM	PHl3 MFC set to  0.000000
10/26/2011	7:33:44 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:33:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:33:44 PM	Tube furnace set to 150
10/26/2011	7:34:15 PM	Helium valve closed
10/26/2011	7:34:15 PM	H2 valve closed
10/26/2011	7:34:15 PM	BCl3 valve closed
10/26/2011	7:34:15 PM	PH3 valve closed
10/26/2011	7:34:15 PM	SiCl4 pre valve closed
10/26/2011	7:34:15 PM	SiCl4 post valve closed
10/26/2011	7:34:15 PM	Bypass valve closed
10/26/2011	7:34:15 PM	Bubbler valve closed
10/26/2011	7:34:15 PM	Main Vac valve opened
10/26/2011	7:34:15 PM	Helium MFC set to  0.000000
10/26/2011	7:34:15 PM	H2 MFC set to  0.000000
10/26/2011	7:34:15 PM	BCl3 MFC set to  0.000000
10/26/2011	7:34:15 PM	PHl3 MFC set to  0.000000
10/26/2011	7:34:15 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:34:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:34:15 PM	Tube furnace set to 150
10/26/2011	7:34:45 PM	H2 valve closed
10/26/2011	7:34:45 PM	BCl3 valve closed
10/26/2011	7:34:45 PM	PH3 valve closed
10/26/2011	7:34:45 PM	SiCl4 pre valve closed
10/26/2011	7:34:45 PM	SiCl4 post valve closed
10/26/2011	7:34:45 PM	Bypass valve closed
10/26/2011	7:34:45 PM	Bubbler valve closed
10/26/2011	7:34:45 PM	Helium valve opened
10/26/2011	7:34:45 PM	Main Vac valve opened
10/26/2011	7:34:45 PM	Helium MFC set to  20.000000
10/26/2011	7:34:45 PM	H2 MFC set to  0.000000
10/26/2011	7:34:45 PM	BCl3 MFC set to  0.000000
10/26/2011	7:34:45 PM	PHl3 MFC set to  0.000000
10/26/2011	7:34:45 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:34:45 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:34:45 PM	Tube furnace set to 150
10/26/2011	7:35:15 PM	Helium valve closed
10/26/2011	7:35:15 PM	H2 valve closed
10/26/2011	7:35:15 PM	BCl3 valve closed
10/26/2011	7:35:15 PM	PH3 valve closed
10/26/2011	7:35:15 PM	SiCl4 pre valve closed
10/26/2011	7:35:15 PM	SiCl4 post valve closed
10/26/2011	7:35:15 PM	Bypass valve closed
10/26/2011	7:35:15 PM	Bubbler valve closed
10/26/2011	7:35:15 PM	Main Vac valve opened
10/26/2011	7:35:15 PM	Helium MFC set to  0.000000
10/26/2011	7:35:15 PM	H2 MFC set to  0.000000
10/26/2011	7:35:15 PM	BCl3 MFC set to  0.000000
10/26/2011	7:35:15 PM	PHl3 MFC set to  0.000000
10/26/2011	7:35:15 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:35:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:35:15 PM	Tube furnace set to 150
10/26/2011	7:35:45 PM	H2 valve closed
10/26/2011	7:35:45 PM	BCl3 valve closed
10/26/2011	7:35:45 PM	PH3 valve closed
10/26/2011	7:35:45 PM	SiCl4 pre valve closed
10/26/2011	7:35:45 PM	SiCl4 post valve closed
10/26/2011	7:35:45 PM	Bypass valve closed
10/26/2011	7:35:45 PM	Bubbler valve closed
10/26/2011	7:35:45 PM	Helium valve opened
10/26/2011	7:35:45 PM	Main Vac valve opened
10/26/2011	7:35:45 PM	Helium MFC set to  20.000000
10/26/2011	7:35:45 PM	H2 MFC set to  0.000000
10/26/2011	7:35:45 PM	BCl3 MFC set to  0.000000
10/26/2011	7:35:45 PM	PHl3 MFC set to  0.000000
10/26/2011	7:35:45 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:35:45 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:35:45 PM	Tube furnace set to 150
10/26/2011	7:36:15 PM	Helium valve closed
10/26/2011	7:36:15 PM	H2 valve closed
10/26/2011	7:36:15 PM	BCl3 valve closed
10/26/2011	7:36:15 PM	PH3 valve closed
10/26/2011	7:36:15 PM	SiCl4 pre valve closed
10/26/2011	7:36:15 PM	SiCl4 post valve closed
10/26/2011	7:36:15 PM	Bypass valve closed
10/26/2011	7:36:15 PM	Bubbler valve closed
10/26/2011	7:36:15 PM	Main Vac valve opened
10/26/2011	7:36:15 PM	Helium MFC set to  0.000000
10/26/2011	7:36:15 PM	H2 MFC set to  0.000000
10/26/2011	7:36:15 PM	BCl3 MFC set to  0.000000
10/26/2011	7:36:15 PM	PHl3 MFC set to  0.000000
10/26/2011	7:36:15 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:36:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:36:16 PM	Tube furnace set to 150
10/26/2011	7:36:46 PM	H2 valve closed
10/26/2011	7:36:46 PM	BCl3 valve closed
10/26/2011	7:36:46 PM	PH3 valve closed
10/26/2011	7:36:46 PM	SiCl4 pre valve closed
10/26/2011	7:36:46 PM	SiCl4 post valve closed
10/26/2011	7:36:46 PM	Bypass valve closed
10/26/2011	7:36:46 PM	Bubbler valve closed
10/26/2011	7:36:46 PM	Helium valve opened
10/26/2011	7:36:46 PM	Main Vac valve opened
10/26/2011	7:36:46 PM	Helium MFC set to  20.000000
10/26/2011	7:36:46 PM	H2 MFC set to  0.000000
10/26/2011	7:36:46 PM	BCl3 MFC set to  0.000000
10/26/2011	7:36:46 PM	PHl3 MFC set to  0.000000
10/26/2011	7:36:46 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:36:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:36:46 PM	Tube furnace set to 150
10/26/2011	7:37:16 PM	Helium valve closed
10/26/2011	7:37:16 PM	H2 valve closed
10/26/2011	7:37:16 PM	BCl3 valve closed
10/26/2011	7:37:16 PM	PH3 valve closed
10/26/2011	7:37:16 PM	SiCl4 pre valve closed
10/26/2011	7:37:16 PM	SiCl4 post valve closed
10/26/2011	7:37:16 PM	Bypass valve closed
10/26/2011	7:37:16 PM	Bubbler valve closed
10/26/2011	7:37:16 PM	Main Vac valve opened
10/26/2011	7:37:16 PM	Helium MFC set to  0.000000
10/26/2011	7:37:16 PM	H2 MFC set to  0.000000
10/26/2011	7:37:16 PM	BCl3 MFC set to  0.000000
10/26/2011	7:37:16 PM	PHl3 MFC set to  0.000000
10/26/2011	7:37:16 PM	SiCl4 MFC set to  0.000000
10/26/2011	7:37:16 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	7:37:16 PM	Tube furnace set to 150
10/26/2011	7:37:17 PM	Run finished at 7:37 PM
10/26/2011	9:08:48 PM	Main Vac valve closed
10/26/2011	9:09:05 PM	Main Vac valve opened
10/26/2011	9:10:10 PM	Recipe started at 9:10 PM
10/26/2011	9:10:10 PM	Helium valve closed
10/26/2011	9:10:10 PM	H2 valve closed
10/26/2011	9:10:10 PM	BCl3 valve closed
10/26/2011	9:10:10 PM	PH3 valve closed
10/26/2011	9:10:10 PM	SiCl4 pre valve closed
10/26/2011	9:10:10 PM	SiCl4 post valve closed
10/26/2011	9:10:10 PM	Main Vac valve closed
10/26/2011	9:10:10 PM	Bypass valve closed
10/26/2011	9:10:10 PM	Bubbler valve closed
10/26/2011	9:10:10 PM	Helium MFC set to  0.000000
10/26/2011	9:10:10 PM	H2 MFC set to  0.000000
10/26/2011	9:10:10 PM	BCl3 MFC set to  0.000000
10/26/2011	9:10:10 PM	PHl3 MFC set to  0.000000
10/26/2011	9:10:10 PM	SiCl4 MFC set to  0.000000
10/26/2011	9:10:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:10:10 PM	Tube furnace set to 0
10/26/2011	9:10:13 PM	Helium valve closed
10/26/2011	9:10:13 PM	BCl3 valve closed
10/26/2011	9:10:13 PM	PH3 valve closed
10/26/2011	9:10:13 PM	SiCl4 pre valve closed
10/26/2011	9:10:13 PM	SiCl4 post valve closed
10/26/2011	9:10:13 PM	Main Vac valve closed
10/26/2011	9:10:13 PM	Bypass valve closed
10/26/2011	9:10:13 PM	Bubbler valve closed
10/26/2011	9:10:13 PM	H2 valve opened
10/26/2011	9:10:13 PM	Helium MFC set to  0.000000
10/26/2011	9:10:13 PM	H2 MFC set to  500.000000
10/26/2011	9:10:13 PM	BCl3 MFC set to  0.000000
10/26/2011	9:10:13 PM	PHl3 MFC set to  0.000000
10/26/2011	9:10:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	9:10:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:10:13 PM	Tube furnace set to 0
10/26/2011	9:11:18 PM	Helium valve closed
10/26/2011	9:11:18 PM	BCl3 valve closed
10/26/2011	9:11:18 PM	PH3 valve closed
10/26/2011	9:11:18 PM	SiCl4 pre valve closed
10/26/2011	9:11:18 PM	SiCl4 post valve closed
10/26/2011	9:11:18 PM	Main Vac valve closed
10/26/2011	9:11:18 PM	Bypass valve closed
10/26/2011	9:11:18 PM	H2 valve opened
10/26/2011	9:11:18 PM	Bubbler valve opened
10/26/2011	9:11:18 PM	Helium MFC set to  0.000000
10/26/2011	9:11:18 PM	H2 MFC set to  500.000000
10/26/2011	9:11:18 PM	BCl3 MFC set to  0.000000
10/26/2011	9:11:18 PM	PHl3 MFC set to  0.000000
10/26/2011	9:11:18 PM	SiCl4 MFC set to  0.000000
10/26/2011	9:11:18 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:11:18 PM	Tube furnace set to 0
10/26/2011	9:11:19 PM	Helium valve closed
10/26/2011	9:11:19 PM	BCl3 valve closed
10/26/2011	9:11:19 PM	PH3 valve closed
10/26/2011	9:11:19 PM	SiCl4 pre valve closed
10/26/2011	9:11:19 PM	SiCl4 post valve closed
10/26/2011	9:11:19 PM	Main Vac valve closed
10/26/2011	9:11:19 PM	Bypass valve closed
10/26/2011	9:11:19 PM	H2 valve opened
10/26/2011	9:11:19 PM	Bubbler valve opened
10/26/2011	9:11:19 PM	Helium MFC set to  0.000000
10/26/2011	9:11:19 PM	H2 MFC set to  500.000000
10/26/2011	9:11:19 PM	BCl3 MFC set to  0.000000
10/26/2011	9:11:19 PM	PHl3 MFC set to  0.000000
10/26/2011	9:11:19 PM	SiCl4 MFC set to  0.000000
10/26/2011	9:11:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:11:19 PM	Tube furnace set to 1048
10/26/2011	9:41:19 PM	Helium valve closed
10/26/2011	9:41:19 PM	PH3 valve closed
10/26/2011	9:41:19 PM	Main Vac valve closed
10/26/2011	9:41:19 PM	Bypass valve closed
10/26/2011	9:41:19 PM	H2 valve opened
10/26/2011	9:41:19 PM	BCl3 valve opened
10/26/2011	9:41:19 PM	SiCl4 pre valve opened
10/26/2011	9:41:19 PM	SiCl4 post valve opened
10/26/2011	9:41:19 PM	Bubbler valve opened
10/26/2011	9:41:19 PM	Helium MFC set to  0.000000
10/26/2011	9:41:19 PM	H2 MFC set to  500.000000
10/26/2011	9:41:19 PM	BCl3 MFC set to  2.000000
10/26/2011	9:41:19 PM	PHl3 MFC set to  0.000000
10/26/2011	9:41:19 PM	SiCl4 MFC set to  50.000000
10/26/2011	9:41:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	9:41:19 PM	Tube furnace set to 1048
10/26/2011	10:06:19 PM	Helium valve closed
10/26/2011	10:06:19 PM	BCl3 valve closed
10/26/2011	10:06:19 PM	PH3 valve closed
10/26/2011	10:06:19 PM	SiCl4 pre valve closed
10/26/2011	10:06:19 PM	SiCl4 post valve closed
10/26/2011	10:06:19 PM	Main Vac valve closed
10/26/2011	10:06:19 PM	Bypass valve closed
10/26/2011	10:06:19 PM	H2 valve opened
10/26/2011	10:06:19 PM	Bubbler valve opened
10/26/2011	10:06:19 PM	Helium MFC set to  0.000000
10/26/2011	10:06:19 PM	H2 MFC set to  500.000000
10/26/2011	10:06:19 PM	BCl3 MFC set to  0.000000
10/26/2011	10:06:19 PM	PHl3 MFC set to  0.000000
10/26/2011	10:06:19 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:06:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:06:19 PM	Tube furnace set to 750
10/26/2011	10:16:19 PM	H2 valve closed
10/26/2011	10:16:19 PM	BCl3 valve closed
10/26/2011	10:16:19 PM	PH3 valve closed
10/26/2011	10:16:19 PM	SiCl4 pre valve closed
10/26/2011	10:16:19 PM	SiCl4 post valve closed
10/26/2011	10:16:19 PM	Main Vac valve closed
10/26/2011	10:16:19 PM	Bypass valve closed
10/26/2011	10:16:19 PM	Helium valve opened
10/26/2011	10:16:19 PM	Bubbler valve opened
10/26/2011	10:16:19 PM	Helium MFC set to  500.000000
10/26/2011	10:16:19 PM	H2 MFC set to  0.000000
10/26/2011	10:16:19 PM	BCl3 MFC set to  0.000000
10/26/2011	10:16:19 PM	PHl3 MFC set to  0.000000
10/26/2011	10:16:19 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:16:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:16:20 PM	Tube furnace set to 0
10/26/2011	10:35:39 PM	Helium valve closed
10/26/2011	10:35:39 PM	H2 valve closed
10/26/2011	10:35:39 PM	BCl3 valve closed
10/26/2011	10:35:39 PM	PH3 valve closed
10/26/2011	10:35:39 PM	SiCl4 pre valve closed
10/26/2011	10:35:39 PM	SiCl4 post valve closed
10/26/2011	10:35:39 PM	Main Vac valve closed
10/26/2011	10:35:39 PM	Bypass valve closed
10/26/2011	10:35:39 PM	Bubbler valve closed
10/26/2011	10:35:39 PM	Helium MFC set to  0.000000
10/26/2011	10:35:39 PM	H2 MFC set to  0.000000
10/26/2011	10:35:39 PM	BCl3 MFC set to  0.000000
10/26/2011	10:35:39 PM	PHl3 MFC set to  0.000000
10/26/2011	10:35:39 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:35:39 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:35:39 PM	Tube furnace set to 0
10/26/2011	10:35:40 PM	Run finished at 10:35 PM
10/26/2011	10:35:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	10:35:45 PM	Recipe started at 10:35 PM
10/26/2011	10:35:45 PM	Helium valve closed
10/26/2011	10:35:45 PM	H2 valve closed
10/26/2011	10:35:45 PM	BCl3 valve closed
10/26/2011	10:35:45 PM	PH3 valve closed
10/26/2011	10:35:46 PM	SiCl4 pre valve closed
10/26/2011	10:35:46 PM	SiCl4 post valve closed
10/26/2011	10:35:46 PM	Main Vac valve closed
10/26/2011	10:35:46 PM	Bypass valve closed
10/26/2011	10:35:46 PM	Bubbler valve closed
10/26/2011	10:35:46 PM	Helium MFC set to  0.000000
10/26/2011	10:35:46 PM	H2 MFC set to  0.000000
10/26/2011	10:35:46 PM	BCl3 MFC set to  0.000000
10/26/2011	10:35:46 PM	PHl3 MFC set to  0.000000
10/26/2011	10:35:46 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:35:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:35:46 PM	Tube furnace set to 0
10/26/2011	10:35:49 PM	H2 valve closed
10/26/2011	10:35:49 PM	BCl3 valve closed
10/26/2011	10:35:49 PM	PH3 valve closed
10/26/2011	10:35:49 PM	SiCl4 pre valve closed
10/26/2011	10:35:49 PM	SiCl4 post valve closed
10/26/2011	10:35:49 PM	Main Vac valve closed
10/26/2011	10:35:49 PM	Bypass valve closed
10/26/2011	10:35:49 PM	Bubbler valve closed
10/26/2011	10:35:49 PM	Helium valve opened
10/26/2011	10:35:49 PM	Helium MFC set to  500.000000
10/26/2011	10:35:49 PM	H2 MFC set to  0.000000
10/26/2011	10:35:49 PM	BCl3 MFC set to  0.000000
10/26/2011	10:35:49 PM	PHl3 MFC set to  0.000000
10/26/2011	10:35:49 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:35:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:35:49 PM	Tube furnace set to 0
10/26/2011	10:35:49 PM	Helium valve closed
10/26/2011	10:35:49 PM	H2 valve closed
10/26/2011	10:35:49 PM	BCl3 valve closed
10/26/2011	10:35:49 PM	PH3 valve closed
10/26/2011	10:35:49 PM	SiCl4 pre valve closed
10/26/2011	10:35:49 PM	SiCl4 post valve closed
10/26/2011	10:35:49 PM	Main Vac valve closed
10/26/2011	10:35:49 PM	Bypass valve closed
10/26/2011	10:35:49 PM	Bubbler valve closed
10/26/2011	10:35:49 PM	Helium MFC set to  0.000000
10/26/2011	10:35:49 PM	H2 MFC set to  0.000000
10/26/2011	10:35:49 PM	BCl3 MFC set to  0.000000
10/26/2011	10:35:49 PM	PHl3 MFC set to  0.000000
10/26/2011	10:35:49 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:35:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:35:49 PM	Tube furnace set to 0
10/26/2011	10:35:50 PM	Run finished at 10:35 PM
10/26/2011	10:35:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2011	10:48:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2011	10:49:00 PM	Recipe started at 10:49 PM
10/26/2011	10:49:00 PM	Helium valve closed
10/26/2011	10:49:00 PM	H2 valve closed
10/26/2011	10:49:00 PM	BCl3 valve closed
10/26/2011	10:49:00 PM	PH3 valve closed
10/26/2011	10:49:00 PM	SiCl4 pre valve closed
10/26/2011	10:49:00 PM	SiCl4 post valve closed
10/26/2011	10:49:00 PM	Main Vac valve closed
10/26/2011	10:49:00 PM	Bubbler valve closed
10/26/2011	10:49:00 PM	Bypass valve opened
10/26/2011	10:49:00 PM	Helium MFC set to  0.000000
10/26/2011	10:49:00 PM	H2 MFC set to  0.000000
10/26/2011	10:49:00 PM	BCl3 MFC set to  0.000000
10/26/2011	10:49:00 PM	PHl3 MFC set to  0.000000
10/26/2011	10:49:00 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:49:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:49:01 PM	Tube furnace set to 0
10/26/2011	10:50:12 PM	Helium valve closed
10/26/2011	10:50:12 PM	H2 valve closed
10/26/2011	10:50:12 PM	BCl3 valve closed
10/26/2011	10:50:12 PM	PH3 valve closed
10/26/2011	10:50:12 PM	SiCl4 pre valve closed
10/26/2011	10:50:12 PM	SiCl4 post valve closed
10/26/2011	10:50:12 PM	Main Vac valve closed
10/26/2011	10:50:12 PM	Bubbler valve closed
10/26/2011	10:50:12 PM	Bypass valve opened
10/26/2011	10:50:12 PM	Helium MFC set to  0.000000
10/26/2011	10:50:12 PM	H2 MFC set to  0.000000
10/26/2011	10:50:12 PM	BCl3 MFC set to  0.000000
10/26/2011	10:50:12 PM	PHl3 MFC set to  0.000000
10/26/2011	10:50:12 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:50:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:50:12 PM	Tube furnace set to 0
10/26/2011	10:51:12 PM	Helium valve closed
10/26/2011	10:51:12 PM	H2 valve closed
10/26/2011	10:51:13 PM	BCl3 valve closed
10/26/2011	10:51:13 PM	PH3 valve closed
10/26/2011	10:51:13 PM	SiCl4 pre valve closed
10/26/2011	10:51:13 PM	SiCl4 post valve closed
10/26/2011	10:51:13 PM	Bypass valve closed
10/26/2011	10:51:13 PM	Bubbler valve closed
10/26/2011	10:51:13 PM	Main Vac valve opened
10/26/2011	10:51:13 PM	Helium MFC set to  0.000000
10/26/2011	10:51:13 PM	H2 MFC set to  0.000000
10/26/2011	10:51:13 PM	BCl3 MFC set to  0.000000
10/26/2011	10:51:13 PM	PHl3 MFC set to  0.000000
10/26/2011	10:51:13 PM	SiCl4 MFC set to  0.000000
10/26/2011	10:51:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2011	10:51:13 PM	Tube furnace set to 0
10/26/2011	10:51:14 PM	Run finished at 10:51 PM
10/26/2011	10:51:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
